JPH01137535U - - Google Patents

Info

Publication number
JPH01137535U
JPH01137535U JP3257588U JP3257588U JPH01137535U JP H01137535 U JPH01137535 U JP H01137535U JP 3257588 U JP3257588 U JP 3257588U JP 3257588 U JP3257588 U JP 3257588U JP H01137535 U JPH01137535 U JP H01137535U
Authority
JP
Japan
Prior art keywords
wafer mounting
vacuum chamber
wafer
pressure
reducing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3257588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3257588U priority Critical patent/JPH01137535U/ja
Publication of JPH01137535U publication Critical patent/JPH01137535U/ja
Pending legal-status Critical Current

Links

JP3257588U 1988-03-14 1988-03-14 Pending JPH01137535U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3257588U JPH01137535U (enrdf_load_stackoverflow) 1988-03-14 1988-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3257588U JPH01137535U (enrdf_load_stackoverflow) 1988-03-14 1988-03-14

Publications (1)

Publication Number Publication Date
JPH01137535U true JPH01137535U (enrdf_load_stackoverflow) 1989-09-20

Family

ID=31259123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3257588U Pending JPH01137535U (enrdf_load_stackoverflow) 1988-03-14 1988-03-14

Country Status (1)

Country Link
JP (1) JPH01137535U (enrdf_load_stackoverflow)

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