JPH01137525U - - Google Patents
Info
- Publication number
- JPH01137525U JPH01137525U JP3304588U JP3304588U JPH01137525U JP H01137525 U JPH01137525 U JP H01137525U JP 3304588 U JP3304588 U JP 3304588U JP 3304588 U JP3304588 U JP 3304588U JP H01137525 U JPH01137525 U JP H01137525U
- Authority
- JP
- Japan
- Prior art keywords
- wafer support
- semiconductor wafer
- wafer
- gas
- supply plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3304588U JPH01137525U (ar) | 1988-03-11 | 1988-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3304588U JPH01137525U (ar) | 1988-03-11 | 1988-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01137525U true JPH01137525U (ar) | 1989-09-20 |
Family
ID=31259680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3304588U Pending JPH01137525U (ar) | 1988-03-11 | 1988-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01137525U (ar) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012015476A (ja) * | 2010-06-30 | 2012-01-19 | Samsung Mobile Display Co Ltd | 基板加工装置 |
-
1988
- 1988-03-11 JP JP3304588U patent/JPH01137525U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012015476A (ja) * | 2010-06-30 | 2012-01-19 | Samsung Mobile Display Co Ltd | 基板加工装置 |