JPH01137467U - - Google Patents
Info
- Publication number
- JPH01137467U JPH01137467U JP3504988U JP3504988U JPH01137467U JP H01137467 U JPH01137467 U JP H01137467U JP 3504988 U JP3504988 U JP 3504988U JP 3504988 U JP3504988 U JP 3504988U JP H01137467 U JPH01137467 U JP H01137467U
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- insulating layer
- metal plate
- electrode
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１Ａ図はこの考案の一実施例を示す平面図で
あり、第１Ｂ図は第１Ａ図の線Ｂ―Ｂにおけ
る断面図である。第２Ａ図はこの考案の感湿セン
サの他の実施例を示す平面図であり、第２Ｂ図は
第２Ａ図の線Ｂ―Ｂにおける断面図である。
第３Ａ図はこの考案のさらに他の実施例を示す平
面図であり、第３Ｂ図は第３Ａ図の線Ｂ―Ｂ
における断面図である。第４Ａ図はこの考案の背
景となる従来の感湿センサの一例を示す平面図で
あり、第４Ｂ図は第４Ａ図の線Ｂ―Ｂにおけ
る断面図である。
図において、１０は感湿センサ、１２は金属板
、１４は絶縁層、１６はくし形電極、２０は感湿
膜を示す。
FIG. 1A is a plan view showing an embodiment of this invention, and FIG. 1B is a sectional view taken along line BB in FIG. 1A. FIG. 2A is a plan view showing another embodiment of the humidity sensor of this invention, and FIG. 2B is a sectional view taken along line BB in FIG. 2A.
FIG. 3A is a plan view showing still another embodiment of this invention, and FIG. 3B is a line B--B in FIG. 3A.
FIG. FIG. 4A is a plan view showing an example of a conventional moisture-sensitive sensor that is the background of this invention, and FIG. 4B is a sectional view taken along line BB in FIG. 4A. In the figure, 10 is a moisture-sensitive sensor, 12 is a metal plate, 14 is an insulating layer, 16 is a comb-shaped electrode, and 20 is a moisture-sensitive film.
Claims (1)
ンサ。[Claims for Utility Model Registration] A moisture-sensitive sensor comprising: a metal plate, an insulating layer formed on the metal plate, an electrode formed on the insulating layer, and a moisture-sensitive film formed on the electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3504988U JPH01137467U (en) | 1988-03-15 | 1988-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3504988U JPH01137467U (en) | 1988-03-15 | 1988-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01137467U true JPH01137467U (en) | 1989-09-20 |
Family
ID=31261708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3504988U Pending JPH01137467U (en) | 1988-03-15 | 1988-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01137467U (en) |
-
1988
- 1988-03-15 JP JP3504988U patent/JPH01137467U/ja active Pending
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