JPH01136940U - - Google Patents
Info
- Publication number
- JPH01136940U JPH01136940U JP3227988U JP3227988U JPH01136940U JP H01136940 U JPH01136940 U JP H01136940U JP 3227988 U JP3227988 U JP 3227988U JP 3227988 U JP3227988 U JP 3227988U JP H01136940 U JPH01136940 U JP H01136940U
- Authority
- JP
- Japan
- Prior art keywords
- projection optical
- illumination device
- optical system
- enlargement
- reduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 238000000206 photolithography Methods 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
Landscapes
- Projection-Type Copiers In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3227988U JPH01136940U (pt) | 1988-03-11 | 1988-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3227988U JPH01136940U (pt) | 1988-03-11 | 1988-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01136940U true JPH01136940U (pt) | 1989-09-19 |
Family
ID=31258671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3227988U Pending JPH01136940U (pt) | 1988-03-11 | 1988-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01136940U (pt) |
-
1988
- 1988-03-11 JP JP3227988U patent/JPH01136940U/ja active Pending
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