JPH01136489A - Color solid-state image pickup element - Google Patents
Color solid-state image pickup elementInfo
- Publication number
- JPH01136489A JPH01136489A JP62293920A JP29392087A JPH01136489A JP H01136489 A JPH01136489 A JP H01136489A JP 62293920 A JP62293920 A JP 62293920A JP 29392087 A JP29392087 A JP 29392087A JP H01136489 A JPH01136489 A JP H01136489A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- layer
- color element
- ditch
- element layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011347 resin Substances 0.000 claims abstract description 39
- 229920005989 resin Polymers 0.000 claims abstract description 39
- 238000000926 separation method Methods 0.000 abstract description 22
- 238000000206 photolithography Methods 0.000 abstract description 16
- 239000006185 dispersion Substances 0.000 abstract description 5
- 238000012856 packing Methods 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000000975 dye Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 10
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 108010010803 Gelatin Proteins 0.000 description 3
- 239000005018 casein Substances 0.000 description 3
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 3
- 235000021240 caseins Nutrition 0.000 description 3
- 229920000159 gelatin Polymers 0.000 description 3
- 239000008273 gelatin Substances 0.000 description 3
- 235000019322 gelatine Nutrition 0.000 description 3
- 235000011852 gelatine desserts Nutrition 0.000 description 3
- -1 gray Proteins 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- YJTKZCDBKVTVBY-UHFFFAOYSA-N 1,3-Diphenylbenzene Chemical group C1=CC=CC=C1C1=CC=CC(C=2C=CC=CC=2)=C1 YJTKZCDBKVTVBY-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 1
- CMMUKUYEPRGBFB-UHFFFAOYSA-L dichromic acid Chemical compound O[Cr](=O)(=O)O[Cr](O)(=O)=O CMMUKUYEPRGBFB-UHFFFAOYSA-L 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 239000001046 green dye Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Color Television Image Signal Generators (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、色分解フィルター上に透明樹脂を施して該
色分解フィルター上面を平坦化したカラー固体搬像素子
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a color solid image carrier in which a transparent resin is applied on a color separation filter to flatten the upper surface of the color separation filter.
カラー固体撮像素子では、色分解フィルターを介して各
画素に入力される情報を制御する必要がある。このカラ
ー固体搬像素子として、透明基板に色分解フィルターを
形成し、色分解フィルターの色素層側の而を固体搬像素
子と向い合わせて、接６剤を用いて貼り合わせたものが
知られている。In a color solid-state image sensor, it is necessary to control information input to each pixel via a color separation filter. As this color solid-state image carrier, one is known in which a color separation filter is formed on a transparent substrate, and the dye layer side of the color separation filter faces the solid-state image carrier and is bonded together using an adhesive. ing.
これに対して、固体ａ像素子上に直接色分解フィルター
を形成させたカラー固体ｍ像ｓ子も知られている。これ
は素子上に直接フィルターを形成したものであるから、
前述のカラー固体撮像素子の場合における、位置決めの
際の誤差や手間、基板の熱膨脹による誤差、素子上に接
着剤を直接塗布することによる悪影響等に起因する諸問
題を解消することができる。On the other hand, color solid-state m-image elements are also known in which color separation filters are formed directly on solid-state a-image elements. This is a filter formed directly on the element, so
In the case of the above-mentioned color solid-state image sensor, various problems caused by errors and labor during positioning, errors due to thermal expansion of the substrate, adverse effects caused by applying adhesive directly onto the element, etc. can be solved.
（発明が解決しようとする問題点〕 ′カラー固体撮
像素子は、まず素子上に平坦化層を形成し、その後に各
画素上の色素層と素子全体を覆う中間層を交互に形成し
て最後の色素層の上に最終層を形成することにより製造
する。これは異なった色素を用いて同時に染色すること
ができないためであるが、そのために後から形成された
色素層はそれ以前に形成された中間層の上に乗ることに
なり異なった色の色素層の頂部はその高さが異なる。し
たがって、色素層形成の回数にもよるが、その表面には
２．０μｍ程度の段差が生じてしまう。この素子表面の
凹凸は、入射光の分散、集光等を引起こし、偽信号を発
生する、などの問題の要因となる。(Problems to be Solved by the Invention) 'A color solid-state image sensor is manufactured by first forming a flattening layer on the device, then alternately forming a dye layer on each pixel and an intermediate layer covering the entire device. This is because it is not possible to dye with different dyes at the same time, and therefore a dye layer formed later is produced by forming a final layer on top of the dye layer formed earlier. The tops of the dye layers of different colors are placed on top of the intermediate layer, and the heights are different.Therefore, depending on the number of times the dye layer is formed, a step of about 2.0 μm is created on the surface. This unevenness on the surface of the element causes problems such as dispersion and condensation of incident light, and generation of false signals.
この発明は、フィルター最終層の凹凸をなくして表面を
平坦化し、光の直進性を向上させて、光の分散、集光等
の問題を解消したカラー固体撮像素子を提供することを
目的とする。An object of the present invention is to provide a color solid-state image sensor in which problems such as light dispersion and condensation are solved by eliminating irregularities in the final filter layer to flatten the surface and improving the straightness of light. .
この発明のカラー固体ＩＩ（ＩＩ素子は、色分解フィル
ターの最終層の表面に生ずる凹凸部の窪みを透明樹脂で
充填することによって平坦化したことを′特徴とする。The color solid II (II element) of the present invention is characterized by flattening the depressions of the uneven portions that occur on the surface of the final layer of the color separation filter by filling them with a transparent resin.
色分解フィルター上面の窪みを透明樹脂で埋める方法と
しては種々の方法が考えられるが、その一つにフォトリ
ソグラフィがある。すなわち、色分解フィルター最終層
の表面に感光性透明樹脂を塗布し、フォトマスクを用い
て窪み部分（または窪み以外の部分）に適切な露光を行
なったのち現像することによって、未硬化樹脂を除去し
て色分解フィルター表面の窪みに上記樹脂を充填して色
分解フィルター表面を全体的に平坦化することができる
。Various methods can be considered for filling the recesses on the top surface of the color separation filter with transparent resin, one of which is photolithography. That is, a photosensitive transparent resin is applied to the surface of the final layer of the color separation filter, the recessed areas (or areas other than the recessed areas) are appropriately exposed using a photomask, and the uncured resin is removed by development. By filling the above resin into the depressions on the surface of the color separation filter, the surface of the color separation filter can be flattened as a whole.
また、色分解フィルターの上面全体に透明樹脂を設け、
色分解フィルター上面の窪みに応じて透明樹脂の厚みを
変えることにより表面を平坦化することもできる。In addition, a transparent resin is placed on the entire top surface of the color separation filter,
The surface can also be flattened by changing the thickness of the transparent resin depending on the depressions on the upper surface of the color separation filter.
ここで用いられる樹脂としては、ＦＶＲ（富士薬品工業
製）等の感光性透明樹脂が好適に用いられる。As the resin used here, a photosensitive transparent resin such as FVR (manufactured by Fuji Pharmaceutical Co., Ltd.) is preferably used.
フォトリソグラフィを用いてフィルター表面の窪みに透
明樹脂を充填する場合、この充填操作を複数回に分けて
行なうことができる。特に色素層が３層以上存在する場
合には、表面の窪みの深さも一様ではなく種々異なるの
で、その深さに応じてフォトリソグラフィを繰返すこと
により、表面の平坦化をより一層図ることができる。例
えば、色素層が３１１１にわたる場合には色分解フィル
ター上面に生じる窪みの深ざは２種類あるので、まず最
初に深い部分に透明１１脂を充填し次に浅い部分に充填
する方法、あるいは、最初に窪み全体に透明樹脂を充填
しなおも残る窪みにさらに充填する方法などが考えられ
る。When filling the hollows on the filter surface with transparent resin using photolithography, this filling operation can be performed in multiple steps. In particular, when there are three or more dye layers, the depth of the depressions on the surface is not uniform and varies, so it is possible to further flatten the surface by repeating photolithography depending on the depth. can. For example, when the dye layer extends over 3111 mm, there are two types of depths of the depressions formed on the top surface of the color separation filter. One possible method is to fill the entire depression with transparent resin and then fill the remaining depressions with more.
この発明のカラー固体撮像素子の最上面を平坦化する方
法としては、以上述べたフォトリソグラフィのほかに、
色分解フィルター上面にリフト材を設け、続いて透明樹
脂を設けたのちにリフト材゛上の透明樹脂をリフト材と
共に除去するリフトオフ法、透明樹脂をパターン化して
色分解フィルター上面に印刷する方法、色分解フィルタ
ー上面にある程度余分の厚みを有する透明樹脂を設けた
のち研磨する方法等がある。In addition to the photolithography described above, methods for flattening the top surface of the color solid-state image sensor of the present invention include:
A lift-off method in which a lift material is provided on the top surface of the color separation filter, a transparent resin is subsequently provided, and the transparent resin on the lift material is removed together with the lift material; a method in which the transparent resin is patterned and printed on the top surface of the color separation filter; There is a method in which a transparent resin having a certain extra thickness is provided on the upper surface of the color separation filter and then polished.
（作用〕
フィルター最終層の窪みに透明樹脂が充填された結果、
フィルター表面が平坦化し、これによりフィルターに入
射した光の直進性が高まり、分散、集光することなく受
光部に入射する。(Function) As a result of filling the hollow of the final layer of the filter with transparent resin,
The filter surface is flattened, which increases the straightness of the light that enters the filter, and the light enters the light receiving section without being dispersed or condensed.
（実施例）
以下、この発明の一員体例を図を用いて詳細に説明する
。(Example) Hereinafter, an example of a unit of the present invention will be explained in detail using the drawings.
、 第１図はこの発明のカラー固体撮像素子の色分解フ
ィルタ一部の断面を示す図である。固体１ｌｉｉ像素子
上にＦＶＲをスピンコードしたのちフォトリソグラフィ
によって平坦化層１を直接形成し、ついでゼラチン、グ
リユー、カゼイン等の重クロム酸系レジストを全面形成
したのちフォトリソグラフィによってパターン化し、ア
ゾ系色素等の色素を用いて染色することにより赤の色′
ｌＡ層２ａを形成し、その上にＦＶＲからなる中間１３
ａをスピンコード法によって全面に形成し、ついでゼラ
チン、グリユー、カゼイン等の重クロム酸系レジストを
全面形成したのちフォトリソグラフィによってパターン
化し、トリフェニル系色素を用いて染色することにより
緑の色素１ｍ２ｂを形成し、その上にＦＶＲからなる中
間ＷＪ３ｂをフォトリソグラフィによって全面に形成し
、ついでゼラチン、グリユー、カゼイン等の重りＯム酸
系レジストを全面形成したのちフォトリソグラフィによ
ってパターン化し、トリフェニル系色素を用いて染色す
ることにより胃の色素１ｉ１２ｃを形成し、その上に感
光性透明樹脂からなるＲｆｌＮＩＪ ４をフォトリソグ
ラフィによって全面に形成し、ざらに最終１１４の上面
に生じた窪みを、まず全面に感光性樹脂であるＦＶＲを
塗布し、ついで色素１１２ａ上の深い窪みの樹脂のみ硬
化するようにフォトマスクを用いてフォトリソグラフィ
を行ない、現像処理を施して未硬化樹脂を除去したのち
、さらにＦＶＲを全面に塗布し、色素層２ｂ上の浅い窪
みの樹脂のみが硬化するようなフォトマスクに替えてフ
ォトリソグラフィを行ない、現像処理を施して未硬化樹
脂を除去することにより充填した。その結果、窪みを充
填した樹脂の上面と色素１ｍ２ｃ上の最終層４の上面と
が同一平面をなし、色分解フィルターの表面を平坦にす
ることができた。FIG. 1 is a cross-sectional view of a part of a color separation filter of a color solid-state image sensor according to the present invention. After spin-coding FVR on a solid-state 1lii image element, a flattening layer 1 is directly formed by photolithography, and then a dichromic acid resist such as gelatin, gray, casein, etc. is formed on the entire surface, and then patterned by photolithography, and an azo-based resist is formed. The color red is produced by dyeing with dyes such as pigments.
1A layer 2a is formed, and an intermediate layer 13 made of FVR is formed thereon.
A is formed on the entire surface by a spin code method, and then a dichromate resist such as gelatin, gryu, casein, etc. is formed on the entire surface, patterned by photolithography, and dyed with a triphenyl dye to obtain 1 m2b of green dye. An intermediate WJ3b made of FVR is formed on the entire surface by photolithography, and then a weight acid-based resist such as gelatin, gray, casein, etc. is formed on the entire surface, and then patterned by photolithography, and a triphenyl-based dye is formed. A stomach dye 1i12c is formed by staining with the dye 1i12c, and RflNIJ 4 made of a photosensitive transparent resin is formed on the entire surface by photolithography. FVR, which is a photosensitive resin, is applied, then photolithography is performed using a photomask so that only the resin in the deep depressions on the dye 112a is cured, and after development is performed to remove the uncured resin, FVR is further applied. The entire surface was coated, a photomask was used in which only the resin in shallow depressions on the dye layer 2b was cured, photolithography was performed, and development was performed to remove the uncured resin, thereby filling. As a result, the upper surface of the resin filling the depressions and the upper surface of the final layer 4 on the dye 1 m2c formed the same plane, making it possible to make the surface of the color separation filter flat.
なお、最終層４の表面に生じる窪みを充填する方法とし
ては、上記の方法のほかに、まずＦＶＲを全体に塗布し
、窪み全体（色素１１１２ａおよび２ｂ上の窪み）の樹
脂が硬化するようにフォトマスクを用いてフォトリソグ
ラフィを行ない、現像によって未硬化樹脂を除去したの
ち、再ｒｌＦＶＲを全面に塗布し、残った窪み（色素層
２ａ上の窪み）に充填された樹脂のみが硬化するように
フォトマスクを用いてフォトリソグラフィを行ない、現
像によって未硬化樹脂を除去する方法がある。In addition to the method described above, as a method for filling the depressions that occur on the surface of the final layer 4, first apply FVR to the entire surface, and then apply the resin in the entire depression (the depressions on the dyes 1112a and 2b) so that the resin hardens. After photolithography was performed using a photomask and uncured resin was removed by development, rlFVR was applied to the entire surface again so that only the resin filled in the remaining depressions (the depressions on the dye layer 2a) would be cured. There is a method in which photolithography is performed using a photomask and uncured resin is removed by development.
以上述べたように、この発明が提供するカラー固体撮像
素子は、色分解フィルターの表面が平坦であり、入射光
が分散、集光等を起こすことなく直進して受光部に正確
に届くために、入射光の分散、集光等に起因する偽信号
の発生などを防止することができる。As described above, the color solid-state image sensor provided by the present invention has a flat surface of the color separation filter, which allows incident light to travel straight and accurately reach the light receiving section without causing any dispersion or condensation. It is possible to prevent the generation of false signals due to dispersion, condensation, etc. of incident light.
第１図はこの発明の一実施例に係わるカラー固体撮像素
子の色分解フィルタ一部の断面を示す図である。
１・・・平坦化層、２ａ、２ｂ、２ｃ・・・色素層、３
ａ、３ｂ・・・中間層、４・・・最ＩＩ層、５・・・透
明樹脂出願人代理人 弁理士 鈴江 武彦FIG. 1 is a diagram showing a cross section of a part of a color separation filter of a color solid-state image sensor according to an embodiment of the present invention. 1... Flattening layer, 2a, 2b, 2c... Dye layer, 3
a, 3b...middle layer, 4...secondmost layer, 5...transparent resin applicant's representative patent attorney Takehiko Suzue
Claims (1)
とも窪み部分に透明樹脂が設けられ、かつ最上面がほぼ
平坦であることを特徴とするカラー固体撮像素子。[Claims] Consisting of a plurality of patterned dye layers and intermediate layers alternately laminated on a solid-state image sensor, a transparent resin is further provided in at least the recessed portion on top of the patterned dye layers, and the uppermost surface is substantially flat. A color solid-state image sensor characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62293920A JP2661072B2 (en) | 1987-11-24 | 1987-11-24 | Color solid-state imaging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62293920A JP2661072B2 (en) | 1987-11-24 | 1987-11-24 | Color solid-state imaging device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01136489A true JPH01136489A (en) | 1989-05-29 |
| JP2661072B2 JP2661072B2 (en) | 1997-10-08 |
Family
ID=17800871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62293920A Expired - Lifetime JP2661072B2 (en) | 1987-11-24 | 1987-11-24 | Color solid-state imaging device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2661072B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0365960A (en) * | 1989-08-05 | 1991-03-20 | Matsushita Electric Ind Co Ltd | Electrophotographic sensitive body |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5189437A (en) * | 1975-02-03 | 1976-08-05 | ||
| JPS6064303A (en) * | 1983-09-20 | 1985-04-12 | Toshiba Corp | Production of color filter |
| JPS60261278A (en) * | 1984-06-08 | 1985-12-24 | Toppan Printing Co Ltd | Color solid-state image pickup element |
| JPS62161102A (en) * | 1986-01-10 | 1987-07-17 | Mitsubishi Electric Corp | Color separating filter |
-
1987
- 1987-11-24 JP JP62293920A patent/JP2661072B2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5189437A (en) * | 1975-02-03 | 1976-08-05 | ||
| JPS6064303A (en) * | 1983-09-20 | 1985-04-12 | Toshiba Corp | Production of color filter |
| JPS60261278A (en) * | 1984-06-08 | 1985-12-24 | Toppan Printing Co Ltd | Color solid-state image pickup element |
| JPS62161102A (en) * | 1986-01-10 | 1987-07-17 | Mitsubishi Electric Corp | Color separating filter |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0365960A (en) * | 1989-08-05 | 1991-03-20 | Matsushita Electric Ind Co Ltd | Electrophotographic sensitive body |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2661072B2 (en) | 1997-10-08 |
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| JPH03145603A (en) | Production of color filter and color image sensor | |
| JPS62257104A (en) | Color filter |
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