JPH01134351U - - Google Patents
Info
- Publication number
- JPH01134351U JPH01134351U JP2965388U JP2965388U JPH01134351U JP H01134351 U JPH01134351 U JP H01134351U JP 2965388 U JP2965388 U JP 2965388U JP 2965388 U JP2965388 U JP 2965388U JP H01134351 U JPH01134351 U JP H01134351U
- Authority
- JP
- Japan
- Prior art keywords
- gear
- outer ring
- inner ring
- electrode
- rotatably
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2965388U JPH0612603Y2 (ja) | 1988-03-05 | 1988-03-05 | イオン源の電極駆動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2965388U JPH0612603Y2 (ja) | 1988-03-05 | 1988-03-05 | イオン源の電極駆動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01134351U true JPH01134351U (cs) | 1989-09-13 |
| JPH0612603Y2 JPH0612603Y2 (ja) | 1994-03-30 |
Family
ID=31254048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2965388U Expired - Lifetime JPH0612603Y2 (ja) | 1988-03-05 | 1988-03-05 | イオン源の電極駆動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612603Y2 (cs) |
-
1988
- 1988-03-05 JP JP2965388U patent/JPH0612603Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0612603Y2 (ja) | 1994-03-30 |
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