JPH01134234U - - Google Patents
Info
- Publication number
- JPH01134234U JPH01134234U JP3062988U JP3062988U JPH01134234U JP H01134234 U JPH01134234 U JP H01134234U JP 3062988 U JP3062988 U JP 3062988U JP 3062988 U JP3062988 U JP 3062988U JP H01134234 U JPH01134234 U JP H01134234U
- Authority
- JP
- Japan
- Prior art keywords
- metal diaphragm
- casing
- planar
- disposed
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3062988U JPH01134234U (de) | 1988-03-08 | 1988-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3062988U JPH01134234U (de) | 1988-03-08 | 1988-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01134234U true JPH01134234U (de) | 1989-09-13 |
Family
ID=31255856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3062988U Pending JPH01134234U (de) | 1988-03-08 | 1988-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01134234U (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55103441A (en) * | 1979-02-01 | 1980-08-07 | Yokogawa Hokushin Electric Corp | Pressure converter |
-
1988
- 1988-03-08 JP JP3062988U patent/JPH01134234U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55103441A (en) * | 1979-02-01 | 1980-08-07 | Yokogawa Hokushin Electric Corp | Pressure converter |
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