JPH01130323A - Production of magnetic disk - Google Patents

Abstract

PURPOSE:To enable the sure reading of numbers and symbols even after lapse of time by previously mounting a mask member having slits on a substrate and forming the numbers and symbols by films at the time of forming films such as magnetic films. CONSTITUTION:The mask member 19 is mounted on the inside peripheral face of the aperture 12A of the substrate 12 and annular magnetron sputtering is executed by using, for example, Cr to deposit the Cr particles flying from 1st targets 13, 14 on the substrate 12, thereby forming the Cr film which is an underlying film. The bar codes consisting of the Cr films are formed via the slits 23 of the mask member 19 simultaneously with the formation of the Cr film. The bar codes consisting of CoNiCr films are formed by the mask member 19 simultaneously with the formation of the CoNiCr film. The Cr film which serves as a protective film is formed on the CoNiCr film and simultaneously the bar codes consisting of C films are formed on the bar codes. The need for the stage to be exclusively used for attaching the number and symbols for discrimination is thereby eliminated and the numbers and symbols are surely read even after lapse of time.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention relates to a method for manufacturing a magnetic disk in which identification numbers and symbols are formed on the film when forming a film such as a magnetic film by sputtering. Regarding.

When manufacturing a metal thin film type magnetic disk by sputtering, it is necessary to attach an identification number or identification symbol to the magnetic disk in order to clearly indicate the serial number.

(Prior Art) Examples of conventional methods for manufacturing this type of magnetic disk include the following.

In FIG. 5, first, annular magnetron sputtering is performed using a Cr target to make Cr particles fly to form a Cr film 2 serving as a base film of a predetermined thickness on a glass substrate 1, and then this Cr film Annular magnetron sputtering was performed using a C0NiCr target on CON iC
CON of a predetermined thickness that becomes a magnetic film by flying r particles
iCr film 3 is formed, and then Cr film 3 is formed on CoNiCr film 3.
A magnetic disk was obtained by performing annular magnetron sputtering using a target to make C particles fly and form a C film 4 having a predetermined thickness as a protective film.

Then, a number or symbol for identifying the disk was attached to the obtained magnetic disk using a stamp or an inkjet method.

(Problems to be Solved by the Invention) However, in such conventional magnetic disk manufacturing methods, numbers and symbols for disk identification are attached to the magnetic disk using a stamp or inkjet. There was a problem in that a special process was required to attach numbers and symbols. Additionally, since the numbers and symbols are attached using stamps or inkjet, there is also the problem that they become difficult to distinguish over time.

(Means for Solving the Problems) The present invention has been made in view of the above-mentioned problems of the conventional art. By forming numbers and symbols on the film, no special process is required.
Another object of the present invention is to provide a method for manufacturing a magnetic disk that allows numbers and symbols to be read reliably even over time.

To achieve this object, the present invention provides a method for manufacturing a magnetic disk in which a film such as a magnetic film is formed on a substrate by sputtering, which includes a slit for forming an identification number or symbol on the substrate. After the mask member is attached, the film is formed, and the numbers and symbols are formed using the film.

(Function) In the present invention, a mask member having slits is attached to the substrate, and when forming a film such as a magnetic film, a number or symbol for disc identification is formed by the film through the slit of the mask member. This eliminates the need for the traditional process of adding numbers and symbols using stamps or inkjet. Furthermore, since the numbers and symbols are formed using a film, they do not peel off, and the numbers and symbols can be reliably read even over time.

(Example) Embodiments of the present invention will be described below based on the drawings.

1 to 3 show a substrate, a mask member, and a sputtering apparatus, respectively, for carrying out an embodiment of the present invention.

First, starting with the in-line sputtering apparatus shown in FIG. 3, reference numeral 11 denotes a vacuum container constituting the in-line sputtering apparatus, and the substrate 12 is transported in the direction indicated by arrow A within the vacuum container 11.

As the substrate 12, a glass plate is used, which is free from scratches and has better smoothness than an aluminum substrate.

Inside the vacuum container 11, a pair of first
Target 13.14, a pair of second targets 15.1
6 and a pair of third targets 17, 18 are installed, respectively.

The first targets 13.14 are for forming a base film (for example, a Cr film), and the second targets 15.
Reference numeral 16 is for forming a magnetic recording film (for example, CONiCr film), and third targets 17 and 18 are for forming a protective film (for example, C film).

FIG. 2 shows a mask member 19, which has a substantially concave cross section and a curved bottom portion 2.
0 and 2 formed to extend from both end sides of the bottom portion 20.
It has two side walls 21,22.

The inner surface of the bottom portion 20 is curved so as to be in close contact with the inner circumferential surface of the opening formed in the substrate 12, and has two side walls 21.
22 is adapted to be attached in close contact with both sides of the substrate 12. A plurality of slits 23 are formed in the side walls 21 and 22 for forming identification numbers or symbols on the substrate 12, and in this example, these slits 23 form, for example, a bar code pattern. ing.

Next, a method for manufacturing a magnetic disk will be explained.

First, as shown in FIG. 1, the inner surface of the bottom 20 of the mask member 19 is brought into close contact with the inner peripheral surface of the opening 12A of the substrate 12,
The mask member 19 is attached to the substrate 12 so that the side walls 21 and 22 are in close contact with both sides of the opening 12A of the substrate 12.

Next, as shown in FIG. 3, annular magnetron sputtering is performed using, for example, Cr to cause Cr particles to fly from the first target 13 and 14 to form a base film of a predetermined thickness on the substrate 12. Forms a film. At the same time as forming the Cr film, Cr film is formed through the slit 23 of the mask member 19.
Forming a membrane barcode.

Next, annular magnetron sputtering is performed on the CrwA using, for example, CONiCr to form a second target 15.
CoNiCr particles are made to fly from 16 to form a CON i Cr film having a predetermined thickness and serving as a magnetic recording film. Simultaneously with the formation of the C0NiCr film, a barcode of the C0NiCr film is formed on the barcode through the slit 23 of the mask member 19.

Next, on the CON i Qr defilming, for example, 11
1e? Go to the third target 17 by doing the Kunetrons Batsuta.
．． C particles are made to fly from 18 to form a C film that serves as a thin insulation film with a predetermined thickness.

Then, at the same time as forming the C film, CPA is applied on the barcode.
form a barcode.

In this way, as shown in FIG.
At the time of forming the film and the C film, a barcode 24 made of a Cr film, a C0NiCr film, and a C film can be formed on the substrate 12. This barcode 24 allows the disc to be identified.

Therefore, there is no need for a dedicated process for attaching identification numbers or symbols using stamps, inkjet, etc., as shown in the conventional example. Furthermore, since the numbers and symbols are formed using a film, the numbers and symbols do not peel off and can be read reliably even over time.

In this embodiment, the barcode 24 is formed by the slit 23 of the mask member 19, but the present invention is not limited to this, and by changing the shape of the slit 23, characters etc. can be formed with a film. It's okay.

(Effects of the Invention) As explained above, according to the present invention, since numbers and symbols are formed with a film using a mask member, identification numbers using stamps, inkjet, etc. as shown in the past can be used. There is no need for a dedicated process to add or symbols.

In addition, since numbers and symbols are formed using the membrane,
The numbers and symbols do not peel off and can be reliably read even over time.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing a disk substrate with a mask member attached; FIG. 2 is a perspective view of the mask member; Figure 3 is a diagram showing the barcode formed on the disk substrate; Figure 4 is a schematic diagram of the vacuum container; FIG. 5 is a half sectional view of the magnetic disk. In the figure, 11...vacuum container, 12...Substrate, 12A...opening 13.14...First target, 15.16...Second target, 17.18...Third target, 19...Mask member, 20...bottom, 21.22... side wall, 23...slit, 24...Barcode. Patent applicant: Nippon Sheet Glass Co., Ltd. Agent: Patent Attorney Kotonai Sabetsu

Claims (1)

[Claims] In a method for manufacturing a magnetic disk in which a film such as a magnetic film is formed on a substrate by sputtering, the film is formed after a mask member having slits for forming identification numbers and symbols is attached to the substrate. . A method of manufacturing a magnetic disk, characterized in that the numbers and symbols are formed by the film.