JPH01130151U - - Google Patents

Info

Publication number
JPH01130151U
JPH01130151U JP2631288U JP2631288U JPH01130151U JP H01130151 U JPH01130151 U JP H01130151U JP 2631288 U JP2631288 U JP 2631288U JP 2631288 U JP2631288 U JP 2631288U JP H01130151 U JPH01130151 U JP H01130151U
Authority
JP
Japan
Prior art keywords
thin film
irradiated light
forming apparatus
film forming
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2631288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2631288U priority Critical patent/JPH01130151U/ja
Publication of JPH01130151U publication Critical patent/JPH01130151U/ja
Pending legal-status Critical Current

Links

JP2631288U 1988-02-29 1988-02-29 Pending JPH01130151U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2631288U JPH01130151U (enrdf_load_stackoverflow) 1988-02-29 1988-02-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2631288U JPH01130151U (enrdf_load_stackoverflow) 1988-02-29 1988-02-29

Publications (1)

Publication Number Publication Date
JPH01130151U true JPH01130151U (enrdf_load_stackoverflow) 1989-09-05

Family

ID=31247822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2631288U Pending JPH01130151U (enrdf_load_stackoverflow) 1988-02-29 1988-02-29

Country Status (1)

Country Link
JP (1) JPH01130151U (enrdf_load_stackoverflow)

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