JPH01129058U - - Google Patents
Info
- Publication number
- JPH01129058U JPH01129058U JP2389888U JP2389888U JPH01129058U JP H01129058 U JPH01129058 U JP H01129058U JP 2389888 U JP2389888 U JP 2389888U JP 2389888 U JP2389888 U JP 2389888U JP H01129058 U JPH01129058 U JP H01129058U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mounting surface
- polishing jig
- polishing
- slope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2389888U JPH01129058U (US07923587-20110412-C00022.png) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2389888U JPH01129058U (US07923587-20110412-C00022.png) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129058U true JPH01129058U (US07923587-20110412-C00022.png) | 1989-09-04 |
Family
ID=31243277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2389888U Pending JPH01129058U (US07923587-20110412-C00022.png) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129058U (US07923587-20110412-C00022.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015174166A (ja) * | 2014-03-14 | 2015-10-05 | 日本碍子株式会社 | 基板キャリア及び研磨基板の製造方法 |
-
1988
- 1988-02-26 JP JP2389888U patent/JPH01129058U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015174166A (ja) * | 2014-03-14 | 2015-10-05 | 日本碍子株式会社 | 基板キャリア及び研磨基板の製造方法 |
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