JPH01129044U - - Google Patents
Info
- Publication number
- JPH01129044U JPH01129044U JP2326588U JP2326588U JPH01129044U JP H01129044 U JPH01129044 U JP H01129044U JP 2326588 U JP2326588 U JP 2326588U JP 2326588 U JP2326588 U JP 2326588U JP H01129044 U JPH01129044 U JP H01129044U
- Authority
- JP
- Japan
- Prior art keywords
- rotary shaft
- arm
- magnetic chuck
- brush
- robot cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
Landscapes
- Auxiliary Devices For Machine Tools (AREA)
- Combined Means For Separation Of Solids (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2326588U JPH01129044U (fr) | 1988-02-24 | 1988-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2326588U JPH01129044U (fr) | 1988-02-24 | 1988-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129044U true JPH01129044U (fr) | 1989-09-04 |
Family
ID=31242106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2326588U Pending JPH01129044U (fr) | 1988-02-24 | 1988-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129044U (fr) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5851906B2 (ja) * | 1979-08-17 | 1983-11-18 | 松下電器産業株式会社 | 高周波スパッタリング用タ−ゲット磁器の製造方法 |
| JPS60123247A (ja) * | 1983-12-07 | 1985-07-01 | Seiko Seiki Co Ltd | 主軸装置におけるワ−クの着座基準面清掃装置 |
-
1988
- 1988-02-24 JP JP2326588U patent/JPH01129044U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5851906B2 (ja) * | 1979-08-17 | 1983-11-18 | 松下電器産業株式会社 | 高周波スパッタリング用タ−ゲット磁器の製造方法 |
| JPS60123247A (ja) * | 1983-12-07 | 1985-07-01 | Seiko Seiki Co Ltd | 主軸装置におけるワ−クの着座基準面清掃装置 |