JPH01128840A - Manufacture of inkjet head - Google Patents
Manufacture of inkjet headInfo
- Publication number
- JPH01128840A JPH01128840A JP28898487A JP28898487A JPH01128840A JP H01128840 A JPH01128840 A JP H01128840A JP 28898487 A JP28898487 A JP 28898487A JP 28898487 A JP28898487 A JP 28898487A JP H01128840 A JPH01128840 A JP H01128840A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle plate
- substrate
- plate
- nozzle
- inkjet head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000003825 pressing Methods 0.000 claims abstract description 3
- 239000000758 substrate Substances 0.000 claims description 43
- 238000005192 partition Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 17
- 238000005304 joining Methods 0.000 claims 1
- 238000007639 printing Methods 0.000 abstract description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 4
- 238000000137 annealing Methods 0.000 abstract description 3
- 229910052759 nickel Inorganic materials 0.000 abstract description 2
- 239000007767 bonding agent Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 20
- 239000004020 conductor Substances 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14024—Assembling head parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1625—Manufacturing processes electroforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14362—Assembling elements of heads
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はインクジェットプリンタに使用されるインクジ
ェットヘッドの製造方法に係り、特に、隔壁を基板に密
着させることができるインクジ；ットヘッドの製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing an inkjet head used in an inkjet printer, and particularly relates to a method of manufacturing an inkjet head that allows partition walls to be brought into close contact with a substrate.
一般的に、インクジェットヘッドは第４図に示される構
造となっている。即ち、第４図は従来のインクジェット
ヘッドの要部断面図であり、この図にあって１は基板で
、この基板ｌ上には発熱部における熱間（温度上昇）を
確保するために印刷技術及び焼成によってガラス質の部
分グレーズ層２が形成されている。又、基板１の表面及
び部分グレーズ層２ヒには、同時にアンダーコート層３
が積層形成され、そのアンダーコート層３ヒに発熱抵抗
体層４が形成されている。この発熱抵抗体層４上には図
に表われない導体層が形成され、その導体層で囲まれて
露出状態となった部分が発熱部５となる。さらに、この
発熱部５・５・・・及び導体層上には保護層６が積層形
成されている。Generally, an inkjet head has a structure shown in FIG. 4. That is, FIG. 4 is a cross-sectional view of the main parts of a conventional inkjet head. In this figure, 1 is a substrate, and on this substrate 1 there is printed technology to ensure hot (temperature rise) in the heat generating part. A glassy partial glaze layer 2 is formed by firing. Further, an undercoat layer 3 is simultaneously applied to the surface of the substrate 1 and the partial glaze layer 2.
are formed in layers, and a heating resistor layer 4 is formed on the undercoat layer 3H. A conductor layer (not shown) is formed on the heat generating resistor layer 4, and the exposed portion surrounded by the conductor layer becomes the heat generating portion 5. Further, a protective layer 6 is laminated on the heat generating parts 5, 5, . . . and the conductor layer.
一方、図中７はノズル板で、このノズル板７には前記発
熱部５・５・・・と対応する位置にインクを吐出するた
めのノズル孔（オリフィス）８・８・・・が穿設されて
いる。又、このノズル板７には前記した各発熱部５・５
・・・間に位置してインクの擾乱を防ぐための隔壁９・
９・・・が一体に形成されている。この隔壁９１１９・
・・が前記基板１上に当接されるとともに接着剤ｉｏで
接合される。On the other hand, 7 in the figure is a nozzle plate, and this nozzle plate 7 has nozzle holes (orifices) 8, 8, etc. for ejecting ink at positions corresponding to the heat generating parts 5, 5, etc. has been done. Also, this nozzle plate 7 has the above-mentioned heat generating parts 5 and 5.
...A partition wall 9 located between the two to prevent ink from being disturbed.
9... are integrally formed. This bulkhead 9119・
... are brought into contact with the substrate 1 and bonded with an adhesive io.
かかる構造としたインクジェットヘッドの動作を説明す
ると、基板１とノズル板７間へ送り込まれたインクは毛
細管現象によってその間隔内へ侵債し、ノズル孔８まで
満たされた状態となる。この状態で導体層へドライブ回
路からの電気信号が印加されると、その信号は発熱部５
において熱エネルギーに変わり、その発熱部５と接して
いるインクに気泡を発生させ、インクの体積変化によっ
て生じる圧力変動等によってインクをノズル孔８・８・
・・から飛ばし記録紙トヘ印字することとなる。To explain the operation of the inkjet head having such a structure, the ink sent between the substrate 1 and the nozzle plate 7 penetrates into the gap by capillary action, and the nozzle holes 8 are filled up. When an electrical signal from the drive circuit is applied to the conductor layer in this state, the signal is transmitted to the heating section 5.
The heat energy is converted into thermal energy, generates bubbles in the ink in contact with the heat generating part 5, and the ink is transferred to the nozzle holes 8, 8, etc. due to pressure fluctuations caused by changes in the volume of the ink.
...and then prints onto the recording paper.
しかしながら、この上記した従来のインクジェットヘッ
ドによると、第４図に示されるように平板状のノズル板
７の間隔９・９・・・はその先端を基板１側の表面（保
護層）に当接させて接合させていた。そのため、接着剤
のバランスがくずれると、複数ある隔壁９の一部が基板
１より離れてしまったり、あるいは、接合部で基板１方
向の力がノズル板７に加わると中央部が浮き一部がり、
隔壁９が基板ｌより離れてしまうことがあった。この浮
き１１が発生すると、発熱部５によるインクの擾乱の影
響が大きくなって印字に乱れが生じてしまう。However, according to the above-mentioned conventional inkjet head, as shown in FIG. It was then joined together. Therefore, if the balance of the adhesive is lost, some of the multiple partition walls 9 may separate from the substrate 1, or if a force in the direction of the substrate 1 is applied to the nozzle plate 7 at the joint, the center part may float and a part may sag. ,
The partition wall 9 was sometimes separated from the substrate l. When this floating 11 occurs, the effect of disturbance of the ink by the heat generating section 5 increases, resulting in irregularities in printing.
そこで、本発明は係る従来の技術の問題点に着目してな
されたもので、かかる問題点を解消して、隔壁を基板上
に確実に密着させることができ、印字精度を高めること
ができるインクジェットヘッドの製造方法を提供するこ
とを目的としている。Therefore, the present invention has been made by focusing on the problems of the related art, and it is an inkjet jet that solves these problems, makes it possible to reliably bring the partition walls into close contact with the substrate, and improve printing accuracy. The purpose of this invention is to provide a method for manufacturing a head.
この目的を達成するために、本発明に係るインクジェッ
トヘッドの製造方法は複数の発熱部を形成した基板の表
面側に、前記発熱部と対応する位置にノズル孔を穿設し
、前記各発熱部間に位置される隔壁を設けたノズル板を
、その隔壁によって間隔を隔てて接合するインクジェッ
トヘッドの製造方法において、前記ノズル板を前記基板
と反対側にそらす処理を行ない、この処理によりそらせ
たノズル板を前記基板に当接し、前記ノズル板の端８′
ｌｌ寄りを前記基板方向に押圧しながら前記基板と接合
することを特徴としている。In order to achieve this object, a method for manufacturing an inkjet head according to the present invention includes forming nozzle holes at positions corresponding to the heat generating parts on the surface side of a substrate on which a plurality of heat generating parts are formed, and A method for manufacturing an inkjet head in which a nozzle plate having a partition wall positioned between the partition walls is joined at a distance by the partition wall, wherein a process is performed to deflect the nozzle plate to a side opposite to the substrate, and the nozzle deflected by this process is performed. The plate is brought into contact with the substrate, and the end 8' of the nozzle plate is
It is characterized in that it is joined to the substrate while pressing the ll side toward the substrate.
上記したように、ノズル板を基板と反対側にそらす処理
を行ない、ノズル板を基板方向に押圧しながら接合する
ため、そったノズル板は押圧によって変形して平板状態
となるので、ノズル板の各隔壁は基板上に密着され浮き
上がることがない、したがって、インクの擾乱によって
印字精度が悪化することもない。As mentioned above, the nozzle plate is deflected to the opposite side from the substrate, and the nozzle plate is bonded while being pressed toward the substrate, so the deflected nozzle plate is deformed by the pressure and becomes a flat plate. Each of the partition walls is tightly attached to the substrate and does not float up, so that printing accuracy does not deteriorate due to ink disturbance.
次に、本発明の実施の一例を第１図乃至第３図を参照し
て詳細に説明する。Next, an example of implementation of the present invention will be described in detail with reference to FIGS. 1 to 3.
第１図は本発明に係るインクジェットヘッドの製造方法
によって得られたインクジェットヘッドの要部断面図、
第２図及び第３図はノズル板の変形処理前後を示す断面
図である。FIG. 1 is a sectional view of the main parts of an inkjet head obtained by the method for manufacturing an inkjet head according to the present invention,
FIGS. 2 and 3 are cross-sectional views showing the nozzle plate before and after the deformation process.
第１図において２０は高速型動に対応するためにガラス
よりも熱伝導性のよいアルミナで成形された基板である
。このアルミナ基板２０上には印刷技術及び焼成によっ
てガラス質の部分グレーズ層２１が形成されている。又
、アルミナ基板２０の表面にはグレーズ２１も同時にア
ンダーコート層２２が積層形成され、そのアンダーコー
ト層２２十に発熱抵抗体層２３が形成されている。この
発熱抵抗体層２３上には図に表われない導体層が形成さ
れ、その導体層で囲まれて露出状態となった部分が発熱
部２４・２４・・・となる、さらに、この発熱部２４−
２４・・・及び導体層上には保護層２５が積層形成され
ている。In FIG. 1, reference numeral 20 denotes a substrate molded from alumina, which has better thermal conductivity than glass, in order to cope with high-speed mold movement. A glassy partial glaze layer 21 is formed on this alumina substrate 20 by printing technology and baking. Furthermore, an undercoat layer 22 is laminated on the surface of the alumina substrate 20 at the same time as the glaze 21, and a heating resistor layer 23 is formed on the undercoat layer 220. A conductor layer (not shown) is formed on this heating resistor layer 23, and the exposed portions surrounded by the conductor layer become heating parts 24, 24, etc. 24-
24... and a protective layer 25 is laminated on the conductor layer.
−４、図中２６はノズル板で、このノズル板２６には前
記発熱部２４−２４・・・と対応する位置にインクを吐
出するためのノズル孔２７・２７・・・が穿設されてい
る。又、このノズル板２６には前記した各発熱部２４−
２４・・・間に位置してインクの擾乱を防ぐための隔壁
２８−２８・・・が一体に形成されている。この隔壁２
８の先端は基板２ｏの表面（保護層２５）上に当接され
ている。尚、２９は基板２０とノズル板２６とを接合す
る接着剤である。-4, 26 in the figure is a nozzle plate, and this nozzle plate 26 has nozzle holes 27, 27... for ejecting ink at positions corresponding to the heat generating parts 24-24... There is. The nozzle plate 26 also has the heat generating parts 24-
24... partition walls 28-28 are integrally formed between the partition walls 28-28 for preventing ink from being disturbed. This bulkhead 2
The tip of 8 is in contact with the surface (protective layer 25) of the substrate 2o. Note that 29 is an adhesive for bonding the substrate 20 and the nozzle plate 26 together.
このように構成されたインクジェットヘッドの製造方法
を次に説明する。A method of manufacturing the inkjet head configured as described above will be described next.
前記したノズル板２６は例えばニッケルを電鋳して形成
し、第２図に示すように平板状のものが得られる。この
第２図に示すノズル板２６を１６０°Ｃで１時間アニー
ル処理することにより第３図に示すように基板２０が当
接される面と反対側にそった形状となる。また、このア
ニール処理によってノズル板２６の内部応力も取り除か
れる。The nozzle plate 26 described above is formed by electroforming nickel, for example, to obtain a flat plate as shown in FIG. By annealing the nozzle plate 26 shown in FIG. 2 at 160° C. for one hour, the nozzle plate 26 has a shape curved on the side opposite to the surface to which the substrate 20 is brought into contact, as shown in FIG. Further, internal stress in the nozzle plate 26 is also removed by this annealing process.
このようにして得られたノズル板２６を基板２０の表面
に載置し、例えば接合部分でノズル板２６を基板２０方
向（第１図に示す矢印）に押圧すると、ノズル板２６は
中央部分の隔壁２８が基板２０の表面に当接しているの
で、ノズル板２６はそりを解消するように、即ち、基板
２０の表面形状に沿って平板状に変形されていく、そし
て、接着剤２９によって基板２０とノズル板２６は接合
され、第１図に示すインクジェットヘッドが得られる。When the nozzle plate 26 obtained in this way is placed on the surface of the substrate 20 and the nozzle plate 26 is pressed in the direction of the substrate 20 (indicated by the arrow shown in FIG. 1) at the joint portion, for example, the nozzle plate 26 is Since the partition wall 28 is in contact with the surface of the substrate 20, the nozzle plate 26 is deformed into a flat plate shape along the surface shape of the substrate 20 to eliminate warpage, and the adhesive 29 is applied to the substrate 20. 20 and the nozzle plate 26 are joined to obtain the inkjet head shown in FIG. 1.
この実施例に係るインクジェットヘッドの製造方法によ
ると、ノズル板２６を基板２０と反対方向にそらせるた
め、接合時にノズル板２６を押圧して変形し、基板２０
の表面形状に沿わせることができるので、各隔壁２８を
基板２０の表面に確実に密着させることができ、インク
の擾乱を防止して印字精度を高めることができる。According to the method of manufacturing an inkjet head according to this embodiment, in order to deflect the nozzle plate 26 in the opposite direction to the substrate 20, the nozzle plate 26 is pressed and deformed during bonding, and the substrate 20 is
Since the partition walls 28 can be made to follow the surface shape of the substrate 20, each partition wall 28 can be reliably brought into close contact with the surface of the substrate 20, and disturbance of ink can be prevented and printing accuracy can be improved.
尚、上記実施例にあっては、ノズル板２６をそらせる処
理に７ニール処理を用いているが、本発明はこれに限ら
れるものではなく、他の処理によってそらせてもよいも
のである。In the above embodiment, the 7-neel process is used to deflect the nozzle plate 26, but the present invention is not limited to this, and other processes may be used to deflect the nozzle plate 26.
上記したように、本発明に係るインクジェットヘッドの
製造方法によると、ノズル板を基板と反対方向にそらせ
、接合時にノズル板を基板方向へ押圧して接合するので
、ノズル板の隔壁を基板の表面に沿わせることができ、
隔壁の浮きが生じず、インクの擾乱を防止できて印字精
度を高めることができる。As described above, according to the method for manufacturing an inkjet head according to the present invention, the nozzle plate is deflected in the opposite direction to the substrate, and the nozzle plate is pressed toward the substrate during bonding. can be aligned with
The partition wall does not float, preventing ink from being disturbed, and printing accuracy can be improved.
第１図乃至第３図は本発明の一実施例を示した説明図で
、第１図は本発明に係るインクジェットヘッドの製造方
法によって得られたインクジェットヘッドの要部断面図
、第２図はノズル板の変形処理前を示す要部断面図、第
３図はノズル板の変形処理後を示す要部断面図、第４図
は従来のインクジェットヘッドの要部断面図である。
２０・・・基板 ２１・・・部分グレーズ層２４
・・・発熱部 ２６・・・ノズル板２７・・・ノズ
ル孔 ２８・・・隔壁２９・・・接着剤
特許出願人 アルプス電気株式会社
第２図
２７ 否
０ 哨 〜 −1 to 3 are explanatory diagrams showing one embodiment of the present invention, in which FIG. 1 is a sectional view of essential parts of an inkjet head obtained by the method of manufacturing an inkjet head according to the present invention, and FIG. FIG. 3 is a cross-sectional view of the main part of the nozzle plate before the deformation process, FIG. 3 is a cross-sectional view of the main part of the nozzle plate after the deformation process, and FIG. 4 is a cross-sectional view of the main part of a conventional inkjet head. 20... Substrate 21... Partial glaze layer 24
... Heat generating part 26 ... Nozzle plate 27 ... Nozzle hole 28 ... Partition wall 29 ... Adhesive patent applicant Alps Electric Co., Ltd. Figure 2 27 No 0 - -
Claims (1)
熱部と対応する位置にノズル孔を穿設し、前記各発熱部
間に位置される隔壁を設けたノズル板を、その隔壁によ
って間隔を隔てて接合するインクジェットヘッドの製造
方法において、前記ノズル板を前記基板と反対側にそら
す処理を行ない、この処理によりそらせたノズル板を前
記基板に当接し、前記ノズル板の端部寄りを前記基板方
向に押圧しながら前記基板と接合することを特徴とする
インクジェットヘッドの製造方法。(1) Nozzle holes are formed on the surface side of a substrate on which a plurality of heat generating parts are formed at positions corresponding to the heat generating parts, and a nozzle plate provided with a partition wall located between each of the heat generating parts is connected to the partition wall. In the method for manufacturing an inkjet head in which the nozzle plate is joined at intervals, the nozzle plate is deflected to the opposite side from the substrate, and the nozzle plate deflected by this process is brought into contact with the substrate, and the nozzle plate is attached near the end of the nozzle plate. A method for manufacturing an inkjet head, the method comprising: joining the substrate to the substrate while pressing the substrate toward the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28898487A JPH01128840A (en) | 1987-11-16 | 1987-11-16 | Manufacture of inkjet head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28898487A JPH01128840A (en) | 1987-11-16 | 1987-11-16 | Manufacture of inkjet head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01128840A true JPH01128840A (en) | 1989-05-22 |
Family
ID=17737334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28898487A Pending JPH01128840A (en) | 1987-11-16 | 1987-11-16 | Manufacture of inkjet head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01128840A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5332466A (en) * | 1990-11-28 | 1994-07-26 | Canon Kabushiki Kaisha | Liquid jet recording head manufacturing method |
| US5500178A (en) * | 1992-07-31 | 1996-03-19 | Asahi Denka Kogyo Kabushikikaisya | Method of manufacturing hollow molded articles |
| EP0899109A3 (en) * | 1997-08-29 | 1999-09-15 | Hewlett-Packard Company | Reduced size printhead for an inkjet printer |
| EP1666258A3 (en) * | 2004-12-01 | 2006-09-27 | Fuji Photo Film Co., Ltd. | Repellency increasing structure and method of producing the same, liquid ejection head and method of producing the same, and stain-resistant film |
| US20100224499A1 (en) * | 2008-03-25 | 2010-09-09 | Industrial Technology Research Institute | Nozzle plate of a spray apparatus and fabrication method thereof |
-
1987
- 1987-11-16 JP JP28898487A patent/JPH01128840A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5332466A (en) * | 1990-11-28 | 1994-07-26 | Canon Kabushiki Kaisha | Liquid jet recording head manufacturing method |
| US5500178A (en) * | 1992-07-31 | 1996-03-19 | Asahi Denka Kogyo Kabushikikaisya | Method of manufacturing hollow molded articles |
| EP0899109A3 (en) * | 1997-08-29 | 1999-09-15 | Hewlett-Packard Company | Reduced size printhead for an inkjet printer |
| US6146915A (en) * | 1997-08-29 | 2000-11-14 | Hewlett-Packard Company | Reduced size printhead for an inkjet printer |
| EP1666258A3 (en) * | 2004-12-01 | 2006-09-27 | Fuji Photo Film Co., Ltd. | Repellency increasing structure and method of producing the same, liquid ejection head and method of producing the same, and stain-resistant film |
| US7735750B2 (en) | 2004-12-01 | 2010-06-15 | Fujifilm Corporation | Liquid ejection head |
| US20100224499A1 (en) * | 2008-03-25 | 2010-09-09 | Industrial Technology Research Institute | Nozzle plate of a spray apparatus and fabrication method thereof |
| US9015946B2 (en) * | 2008-03-25 | 2015-04-28 | Industrial Technology Research Institute | Method of fabricating a nozzle plate of a spray apparatus |
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