JPH01127930A - 振動形差圧センサ - Google Patents

振動形差圧センサ

Info

Publication number
JPH01127930A
JPH01127930A JP28627587A JP28627587A JPH01127930A JP H01127930 A JPH01127930 A JP H01127930A JP 28627587 A JP28627587 A JP 28627587A JP 28627587 A JP28627587 A JP 28627587A JP H01127930 A JPH01127930 A JP H01127930A
Authority
JP
Japan
Prior art keywords
pressure
differential pressure
vibrating
diaphragm
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28627587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519091B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kinji Harada
原田　謹爾
Kyoichi Ikeda
恭一 池田
Hideki Kuwayama
桑山　秀樹
Takashi Kobayashi
隆 小林
Tetsuya Watanabe
哲也 渡辺
Sunao Nishikawa
直 西川
Takashi Yoshida
隆司 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP28627587A priority Critical patent/JPH01127930A/ja
Publication of JPH01127930A publication Critical patent/JPH01127930A/ja
Publication of JPH0519091B2 publication Critical patent/JPH0519091B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP28627587A 1987-11-12 1987-11-12 振動形差圧センサ Granted JPH01127930A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28627587A JPH01127930A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28627587A JPH01127930A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Publications (2)

Publication Number Publication Date
JPH01127930A true JPH01127930A (ja) 1989-05-19
JPH0519091B2 JPH0519091B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-15

Family

ID=17702258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28627587A Granted JPH01127930A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Country Status (1)

Country Link
JP (1) JPH01127930A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0431728A (ja) * 1990-05-28 1992-02-03 Yokogawa Electric Corp 半導体圧力計
US20220120627A1 (en) * 2013-08-19 2022-04-21 Yokogawa Electric Corporation Resonant pressure sensor and manufacturing method therefor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0431728A (ja) * 1990-05-28 1992-02-03 Yokogawa Electric Corp 半導体圧力計
US20220120627A1 (en) * 2013-08-19 2022-04-21 Yokogawa Electric Corporation Resonant pressure sensor and manufacturing method therefor
US11835413B2 (en) * 2013-08-19 2023-12-05 Yokogawa Electric Corporation Resonant pressure sensor and manufacturing method therefor

Also Published As

Publication number Publication date
JPH0519091B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-15

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees