JPH01127928A - 振動形歪センサ - Google Patents

振動形歪センサ

Info

Publication number
JPH01127928A
JPH01127928A JP28627387A JP28627387A JPH01127928A JP H01127928 A JPH01127928 A JP H01127928A JP 28627387 A JP28627387 A JP 28627387A JP 28627387 A JP28627387 A JP 28627387A JP H01127928 A JPH01127928 A JP H01127928A
Authority
JP
Japan
Prior art keywords
substrate
vibrating
vibration beam
silicon
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28627387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519089B2 (enrdf_load_stackoverflow
Inventor
Kinji Harada
原田　謹爾
Kyoichi Ikeda
恭一 池田
Hideki Kuwayama
桑山　秀樹
Takashi Kobayashi
隆 小林
Tetsuya Watanabe
哲也 渡辺
Sunao Nishikawa
直 西川
Takashi Yoshida
隆司 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP28627387A priority Critical patent/JPH01127928A/ja
Publication of JPH01127928A publication Critical patent/JPH01127928A/ja
Publication of JPH0519089B2 publication Critical patent/JPH0519089B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP28627387A 1987-11-12 1987-11-12 振動形歪センサ Granted JPH01127928A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28627387A JPH01127928A (ja) 1987-11-12 1987-11-12 振動形歪センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28627387A JPH01127928A (ja) 1987-11-12 1987-11-12 振動形歪センサ

Publications (2)

Publication Number Publication Date
JPH01127928A true JPH01127928A (ja) 1989-05-19
JPH0519089B2 JPH0519089B2 (enrdf_load_stackoverflow) 1993-03-15

Family

ID=17702230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28627387A Granted JPH01127928A (ja) 1987-11-12 1987-11-12 振動形歪センサ

Country Status (1)

Country Link
JP (1) JPH01127928A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001313054A (ja) * 2000-02-21 2001-11-09 Denso Corp 燃料電池システム
CN102374915A (zh) * 2010-08-06 2012-03-14 中国科学院电子学研究所 一种电磁驱动谐振式微结构压力传感器封装方法
JP2013117419A (ja) * 2011-12-02 2013-06-13 Yokogawa Electric Corp 振動式トランスデューサの製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001313054A (ja) * 2000-02-21 2001-11-09 Denso Corp 燃料電池システム
CN102374915A (zh) * 2010-08-06 2012-03-14 中国科学院电子学研究所 一种电磁驱动谐振式微结构压力传感器封装方法
JP2013117419A (ja) * 2011-12-02 2013-06-13 Yokogawa Electric Corp 振動式トランスデューサの製造方法

Also Published As

Publication number Publication date
JPH0519089B2 (enrdf_load_stackoverflow) 1993-03-15

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