JPH01127243U - - Google Patents
Info
- Publication number
- JPH01127243U JPH01127243U JP2357988U JP2357988U JPH01127243U JP H01127243 U JPH01127243 U JP H01127243U JP 2357988 U JP2357988 U JP 2357988U JP 2357988 U JP2357988 U JP 2357988U JP H01127243 U JPH01127243 U JP H01127243U
- Authority
- JP
- Japan
- Prior art keywords
- mounter
- wafer cassette
- section
- cassette holder
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2357988U JPH01127243U (en18) | 1988-02-23 | 1988-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2357988U JPH01127243U (en18) | 1988-02-23 | 1988-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01127243U true JPH01127243U (en18) | 1989-08-31 |
Family
ID=31242690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2357988U Pending JPH01127243U (en18) | 1988-02-23 | 1988-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01127243U (en18) |
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1988
- 1988-02-23 JP JP2357988U patent/JPH01127243U/ja active Pending