JPH041459U - - Google Patents
Info
- Publication number
- JPH041459U JPH041459U JP4143490U JP4143490U JPH041459U JP H041459 U JPH041459 U JP H041459U JP 4143490 U JP4143490 U JP 4143490U JP 4143490 U JP4143490 U JP 4143490U JP H041459 U JPH041459 U JP H041459U
- Authority
- JP
- Japan
- Prior art keywords
- acceleration sensor
- semiconductor acceleration
- elastic body
- members
- package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 2
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4143490U JPH041459U (en18) | 1990-04-18 | 1990-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4143490U JPH041459U (en18) | 1990-04-18 | 1990-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH041459U true JPH041459U (en18) | 1992-01-08 |
Family
ID=31552098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4143490U Pending JPH041459U (en18) | 1990-04-18 | 1990-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH041459U (en18) |
-
1990
- 1990-04-18 JP JP4143490U patent/JPH041459U/ja active Pending