JPH01126425A - Static pressure slide device - Google Patents

Abstract

PURPOSE:To enlarge a load capable of being applied to a slider by providing a static pressure bearing having a plurality of branch grooves extended from a main groove and a static pressure bearing having a nozzle, in the static pressure slide device of an X-Y table. CONSTITUTION:A deep groove 25 on the upper surface, facing a guide block 2, of an X-shaft slider 3 and a plurality of shallow grooves extended from the deep groove 25 are provided. An orifice 27 formed in a nozzle for throttling compressed air is provided on the under surface, facing a level block 1, of the X-shaft slider 3. And also, the area, facing the level block 1, of the under surface of the X-shaft slider 3 is enlarged. Thus, a load capable of being applied to the slider can be enlarged.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a static pressure slide device for an X-Y table used in an electronic component mounting device and a measuring device.

BACKGROUND ART FIG. 4 is a perspective view showing an example of an X-Y table equipped with a conventional static pressure slide device, in which 1 is a surface plate, 2 is a guide block, and 3 is a table that fits into a groove in the guide block 2. An X-axis slider that moves in the direction of arrow A, 4 a bracket provided on the surface plate 1, 5 a drive motor fixed to the bracket 4 and driving the X-axis slider 3, 6 a feed screw connected to the drive motor 5 , 7 is a bracket that fixes the feed screw 6, 8 is an encoder fixed to the bracket 7 and detects the rotational position of the feed screw 6, 9 is a bearing nut,
10 is a bracket that connects the X-axis slider 3 and the feed screw 6; 11 is a Y-axis slider that moves in the direction of arrow B;
12 is a bracket provided on the X-axis slider 3;
3 is a drive motor that is fixed to the bracket 12 and drives the Y-axis slider 11; 14 is a feed screw connected to the drive motor 13; 15 is a bracket that fixes the feed screw 14; 16 is a drive motor that is fixed to the bracket 15 and drives the feed screw 14; An encoder 17 for detecting the rotational position is a movable table provided on the Y-axis slider 11.

FIG. 5, FIG. 6, and FIG. 7 are a side view, a top view of a main part, and a bottom view of a main part, respectively, showing the details of the static pressure slide device provided on the X-Y table. 18 is the air inlet, 1
9 is an air hole, 20 is an air supply hole from which air is blown out, 2
1, 22, 23, and 24 are orifice chairs formed by nozzles that throttle compressed air.

The operation of the XY table configured as described above will be explained below.

First, compressed air is sent into the X-axis slider 3 and the Y-axis slider 11. The X-axis slider 3 is moved in the direction of the arrow by a drive motor 5 and a feed screw 6. The Y-axis slider 11 is moved in the direction of arrow B by a drive motor 13 and a feed screw 14.

At that time, air enters from the air inlet 18 of the X-axis slider 3 in the direction of arrow C, passes through the air hole 19, and enters the air supply hole 20.
Air is blown out in the direction of the arrow from the orifices 21, 22. ．． Air is blown out from 23.24 in the directions of arrows E and F.

Problems to be Solved by the Invention However, in the above conventional configuration, the movable table 17
In order to increase the amount of movement of the X-axis slider 3, the opposing area of the guide block 2 that faces the top surface of the The problem is that the load that can be applied to the shaft slider 3 is small.

Furthermore, in order to solve this problem, the area of the lower surface of the X-axis slider 3 facing the surface plate 1 should be made thicker (if this is done, the area of the guide block 2 that faces the upper surface of the X-axis slider should also be made thicker) Therefore, there was a problem in that the amount of movement of the movable table 17 was reduced.

Means for Solving the Problems In order to solve the above-mentioned problems, the present invention provides a hydrostatic bearing having a main groove and a plurality of branch grooves extending from the main groove on the upper surface of the slider facing the guide member. A hydrostatic bearing having a nozzle is provided on the lower surface facing the guide member.

Function The present invention uses the static pressure bearing to increase the air pressure acting on the guide surface of the guide member facing the upper surface of the slider.

Embodiment FIGS. 1, 2, and 3 are a side view, a top view of a main part, and a bottom view of a main part, respectively, showing details of a hydrostatic slide device according to an embodiment of the present invention. 1 is a surface plate, 2 is a guide block, 3 is an X-axis slider, 18 is an air inlet, 19 is an air hole, and 20 is an air supply hole. Up to this point, the configuration is the same as that of the conventional static pressure slide device shown in FIG. 3, so a detailed explanation will be omitted.

In this embodiment, a deep groove 25 and a plurality of shallow grooves 26 extending from the deep groove 25 are provided on the upper surface of the X-axis slider 3 that faces the guide block 2 . The deep groove 25 is
It is formed in the same direction as the moving direction of the shaft slider 3.

Furthermore, orifices 27 and 28 formed by nozzles for squeezing compressed air are provided on the surface of the lower surface of the X-axis slider 3 that faces the surface plate 1, and the area of the lower surface of the X-axis slider 3 that faces the surface plate 1 is increased. I am doing.

Figure 8 is a characteristic diagram of a hydrostatic bearing under the condition that the air pressure supplied to the slider and the area of the lower surface of the slider facing the guide member are constant, and G is the characteristic when a nozzle is used in the slider. In the graph, H is a characteristic graph using grooves in the slider, and ■ is the range of the bearing clearance commonly used. From this, the generally used bearing clearance range I
In this regard, a hydrostatic bearing using a nozzle has the advantage that the slider positioning accuracy is high because the change in the bearing clearance with respect to a change in load is smaller than that of a hydrostatic bearing using a groove. On the other hand, hydrostatic bearings using grooves have the advantage that a larger load can be applied to the slider than hydrostatic bearings using nozzles.

The operation of the static pressure slide device configured as described above will be explained.

Air enters in the direction of arrow J from the air inlet 18 of the X-axis slider 3, passes through the air hole 19, and is blown out in the direction of the arrow from the air supply hole 20.

The air passing through the air hole 19 is blown out in the direction indicated by the arrow, passes through a deep groove 25 provided on the upper surface of the X-axis slider 3 facing the guide block 2, and is guided to a plurality of shallow grooves 26. At this time, the pressure of the air is kept approximately constant until the air that has passed through the air hole 19 passes through the deep grooves 25 and reaches the plurality of shallow grooves 26. The X-axis slider 3 is formed by a plurality of shallow grooves 26 uniformly provided on the upper surface of the X-axis slider 3 facing the guide block 2.
Stronger air pressure acts on the guide surface of the guide block 2 facing the upper surface than when a nozzle is applied to the surface facing the guide block 2 on the upper surface of the X-axis slider 3 (.

Furthermore, the air passing through the air hole 19 is
Orifice 2 provided on the opposite surface of the lower surface of the shaft slider 3
7. Air is blown out in the direction of arrow M by 28, and air pressure acts on the guide surface of the surface plate 1 facing the lower surface of the X-axis slider 3 (
.

At this time, since the area of the lower surface of the X-axis slider 3 facing the surface plate 1 is increased, the load that can be applied to the X-axis slider 3 is increased. Therefore, a deep groove 25 is formed on the upper surface of the X-axis slider 3 on the surface facing the guide block 2.
By providing a hydrostatic bearing having a plurality of shallow grooves extending from the deep groove 25, stronger air pressure can be generated than when using a hydrostatic bearing having a nozzle on the upper surface of the X-axis slider 3 facing the guide block 2. To work, X-axis slider 3
A static pressure slide device can be manufactured without increasing the area of the guide block 2 facing the upper surface.

As described above, according to this embodiment, the deep groove 25 is formed on the upper surface of the X-axis slider 3 on the surface facing the guide block 2.
By providing a plurality of shallow grooves 26 extending from the bottom surface of the X-axis slider 3, and by providing orifices 27 and 28 formed by nozzles for squeezing compressed air on the surface facing the surface plate 1 on the lower surface of the X-axis slider 3, the X-axis slider By increasing the area of the guide block 2 facing the upper surface of the guide block 3, the load that can be applied to the X-axis slider 3 can be increased.

Effects of the Invention The present invention provides a static pressure bearing having a main groove and a plurality of branch grooves extending from the main groove on the upper surface of the slider facing the guide member, and a static pressure bearing having a nozzle on the lower surface of the slider facing the guide member. By providing a pressure bearing, the air pressure acting on the guide surface of the guide member facing the top surface of the slider can be increased without reducing the amount of movement of the movable table, and the load that can be applied to the slider can be increased. (can do)

[Brief Description of the Drawings] Fig. 1 is a side view showing a hydrostatic slide device according to an embodiment of the present invention, Fig. 2 is a top view of the main parts, Fig. 3 is a bottom view of the main parts, and Fig. 4 X with conventional hydrostatic slide device
- A perspective view of the Y-table, FIG. 5 is a side view showing a conventional static pressure slide device, FIG. 6 is a top view of the same main part, FIG. 7 is a bottom view of the same main part, and FIG. FIG. 4 is a characteristic diagram of the hydrostatic bearing under conditions where the air pressure and the area of the lower surface of the slider facing the guide member are constant. 1....Surface plate 2..Guide block 3
... X-axis slider 11 ... Y-axis slider 17 ... Movable table 25 ... Deep groove 26 ... Shallow groove Name of agent Patent attorney Toshio Nakao 1 person f- -One complete 1 t9--One air hole 20- Unusual hole f--Constant 1 2-P4V block f'! -11 Air Sawa. 20--- λ on g gong

Claims (1)

[Claims] A guide member having a groove, a slider inserted into the groove with a gap and movable relative to the groove, and a main groove and the main groove on the upper surface of the slider facing the guide member A hydrostatic slide device, comprising: a hydrostatic bearing having a plurality of branch grooves extending from the groove; and a hydrostatic bearing having a nozzle on a lower surface of the slider facing the guide member.