JPH01124581U - - Google Patents
Info
- Publication number
- JPH01124581U JPH01124581U JP1877088U JP1877088U JPH01124581U JP H01124581 U JPH01124581 U JP H01124581U JP 1877088 U JP1877088 U JP 1877088U JP 1877088 U JP1877088 U JP 1877088U JP H01124581 U JPH01124581 U JP H01124581U
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- measuring device
- circuit measuring
- load
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Description
第１図、第２図は本考案の一実施例を示す図で
あり、第１図はロードボードの装着前を示す断面
図、第２図は装着後を示す断面図、第３図は従来
例を示す断面図である。
１……ロードボード、２……パツド、３……ガ
イドピン、４……外周リング、５……リング、６
……スプリング、７……プローブコンタクト、８
……ボード押えリング。
Figures 1 and 2 are views showing an embodiment of the present invention. Figure 1 is a cross-sectional view showing the load board before it is installed, Figure 2 is a cross-sectional view after it is installed, and Figure 3 is a conventional It is a sectional view showing an example. 1... Load board, 2... Padded, 3... Guide pin, 4... Outer ring, 5... Ring, 6
... Spring, 7 ... Probe contact, 8
...Board holding ring.
Claims (1)
おいて、負荷抵抗を付けたロードボードを支持す
るリングをプローブコンタクトより高い位置に弾
性的に支持させたことを特徴とする半導体集積回
路測定装置における可動式ボード装着リング。 A movable board mounting ring for a semiconductor integrated circuit measuring device, characterized in that, in the measuring station of the semiconductor integrated circuit measuring device, a ring supporting a load board with a load resistor is elastically supported at a position higher than a probe contact. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1877088U JPH01124581U (en) | 1988-02-16 | 1988-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1877088U JPH01124581U (en) | 1988-02-16 | 1988-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01124581U true JPH01124581U (en) | 1989-08-24 |
Family
ID=31233704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1877088U Pending JPH01124581U (en) | 1988-02-16 | 1988-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01124581U (en) |
-
1988
- 1988-02-16 JP JP1877088U patent/JPH01124581U/ja active Pending