JPH01124116A - Magnetic memory medium and its production - Google Patents

Abstract

PURPOSE:To obtain high wear resistance and corrosion preventiveness in the state of maintaining a good friction characteristic by adopting the constitution consisting in forming a protective film of specific inter-layer solid lubricating components and nonmetallic hard compds. so that the formation thereof can be easily dealt with at the present technical level. CONSTITUTION:An underlying body 1, a magnetic medium layer 2 formed on this underlying body and the protective layer 3a formed of at least the two layers; the hard compd. layer 31 formed of a mixture composed of at least one kind of the nonmetallic hard compds. and at least one kind among the inter-layer solid lubricating components consisting of B2O3, MoO3, MoS2, MoSe2, NbS2, NbSe2, PbO, PbS, ReS2, TaS2, VS2, WS2, WSe2, and ZrS2 or the nonmetallic hard compds. and the solid lubricating layer 32 formed of at least one kind among the inter-layer solid lubricating components on said magnetic medium layer 2 are provided. The production of the medium can be dealt with at least at the present technical level. The magnetic memory medium having the high wear resistance in the state of maintaining the good friction characteristics is thereby obtd.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magnetic storage medium and a method of manufacturing the same, and particularly to a magnetic storage medium such as a magnetic disk, magnetic drum, or magnetic tape used in a magnetic recording device, and a manufacturing method thereof. Regarding.

[Conventional technology]

17. In recent years, there has been a significant demand for increased recording density for magnetic recording. Means to satisfy this demand include the adoption of a metal magnetic thin film and the thinning of the protective film that protects the medium.

A protective film for a magnetic memory using a metal magnetic thin film has mechanical durability to withstand the frictional contact with the magnetic head that occurs when the device starts and stops, corrosion resistance to prevent corrosion of the magnetic thin film, and Surface properties are required to prevent adsorption with the magnetic head.

The conventional protective film is 8i02 (for example, Special Publication 1986-
185029) and 8iN (for example, U.S. Pat. No. 427)
7540) and carbon with solid lubricating properties (e.g.
There are two types of solid lubricant protective films, such as Japanese Patent Publication No. 0-23406). In particular, 8i02 films formed by the sputtering method or the spin-to method, and carbon films formed by the sputtering method have been put into practical use.

[Problem that the invention seeks to solve]

The above-mentioned conventional magnetic memory and its manufacturing method have a structure in which the protective film is formed using a hard material such as 8102 or solid lubricant molecules such as carbon. In order to reduce and stabilize the coefficient of friction and prevent wear and tear on the protective film itself and the magnetic head, it is necessary to apply a liquid lubricant to the surface of the magnetic disk.

A surface roughness called texture is formed on the surface of the hard protective film to prevent the liquid lubricant from scattering (spin-off) that occurs when the magnetic disk rotates, and to prevent the head from adhering to the disk when the magnetic disk stops due to the liquid lubricant. Is it necessary?) Forming such fine protrusions in a controlled manner in a protective film having a thickness of 50 nm or less is a problem that is difficult to solve at the current state of the art.

On the other hand, solid lubricant protective films have advantages such as not requiring liquid lubricant, and when manufacturing magnetic metal media by sputtering, it is possible to form a continuous film from the magnetic medium to the protective film by sputtering. .

However, considering that many solid lubricants containing carbon provide a low coefficient of friction due to their interlayer properties, that is, they exhibit lubricity (low friction) by shearing the weakest bonds between solid lubricant molecules or atoms. Good wear resistance cannot be expected, and the amount of wear particles generated during sliding is larger than that of a hard protective film coated with a liquid lubricant, and a solid lubricant protective film has high mechanical durability. The problem is that it cannot be maintained.

The object of the present invention is to obtain a magnetic memory body which can be achieved with the current state of the art and has high wear resistance while maintaining good frictional properties.

[Means for solving problems]

The magnetic storage body of the first invention includes a base body, a sweetfish medium layer formed on the base body, and at least one nonmetallic hard compound and BIOI, MoO on the magnetic medium layer.
3, Mo82, Mode 2, NbS 2,
NbSe2, PbO, PbS, Re52, Ta
A mixture with at least one of the interlayer solid lubricant components consisting of S2, VSI, WS2, WSe2, and ZrS2, or a hard compound layer formed of the nonmetallic hard compound and the interlayer solid lubricant component. The solid lubricant layer is formed of at least one of the following: and a protective film is formed of two layers.

A method for manufacturing a magnetic storage body according to a second aspect of the invention includes the step of forming a magnetic medium layer on a base body, and on the magnetic medium layer, at least one kind of non-metallic hard compound, B2O3, MoO3, B2O3, MoO3,
Mo82. MoSe2. NbS2. NbSe2. PbO
, PbS, Be82, TaS2, WS2, WS2
, Woe@, a mixture with at least one of the glabellar solid lubricant components consisting of ZrS2, or a hard compound layer formed of multiple layers of the nonmetallic hard compound and at least one of the interlayer solid lubricant components. The method includes a step of forming a protective film consisting of two layers, including a solid lubricant layer formed on the seeds.

[Effect]

If the adhesion between the interlayer solid lubricant component and the nonmetallic hard compound is low, the lubricant component will selectively fall off as wear particles during sliding with the head, making it impossible to obtain good friction and wear characteristics.

The interlayer solid lubricant component according to the present invention may be other solid lubricants such as carbon, BaF2.CaF2.Pb
Because the surface energy is higher than that of fluorides (such as F2(CF)n), high adhesion to hard non-metallic compounds to be mixed or laminated can be obtained, and the lubricating friction due to the interlayer solid lubricant component can be obtained. It becomes a protective film that combines performance and wear resistance due to the non-metallic hard compound.

In addition, in laminated films and mixture films, peeling and cracking due to low adhesion often become the beginning of corrosion, but in the present invention, the adhesion between the interlayer solid lubricant component and the nonmetallic hard compound, i.e. Since the consistency is good, an excellent effect can be expected in terms of corrosion protection of the magnetic medium.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional view showing a first embodiment of the first invention.

In this example, an N1-P nonmagnetic alloy is coated as an intermediate layer on a disk-shaped Alonicum alloy substrate to a thickness of 80 μm by electroless plating, and the surface is coated with a N1-P film by polishing and boring. After the roughness was set to about 20 nm, a Cr film was coated on the N1-P film to a thickness of 0.5μ by sputtering.
A magnetic medium layer 2 formed of o5oNixo alloy to a thickness of 60 nm, at least one nonmetallic hard compound, and B z Oa e MoOa + MoS2 tMod.
e2, NbS2, Nb8ez, PbO,
pbs, ReS2, TaS2°V8z, W
82, W8e2, and ZrS2, and a protective film 3 with a thickness of 25 to 30 nm made of a mixture with at least one of the glabellar solid lubricant components.

FIG. 2 is a sectional view showing a second embodiment of the fourth invention.

In this embodiment, the protective film 3a is formed of at least one non-metallic hard compound on the magnetic medium layer 2 to a thickness of 15 mm.
It has a two-layer structure consisting of a hard compound layer 31 with a thickness of nm thick and a solid lubricant layer 32 with a thickness of 1Q nm formed on the hard compound layer 31 from at least one of the interlayer solid lubricant components.

Next, an embodiment of the second invention will be described.

First, the magnetic medium layer 2 is formed by coating the base body 1 with a c08ONt20 alloy to a thickness of 60 nm by sputtering.

Next, B2O3, MoO3, MoS 2 , Mode
z, NbS 2 , Nb5e2 , PbO, Pb
S, Re52, TaS2, VS2, WS2, W
Se2. A protective film 3 with a thickness of 25 to 30 nm is formed from a mixture of these by a co-sputtering method using targets of at least one of the glabellar solid lubricant components consisting of Zr82 and at least one nonmetallic hard compound.

These formation steps can be easily accommodated by the current state of the art.

The two-layer protective film 3a is formed by coating the magnetic medium layer 2 with at least one non-metallic hard compound to a thickness of 15 nm by RF magnetron sputtering to form a hard compound layer 31. The solid lubricant layer 32 is formed by coating the solid lubricant layer 32 with at least one of the interlayer solid lubricant components to a thickness of lQnm by RF magnetron sputtering.

Next, a rounding test method for confirming the effects of these examples and its results will be explained.

Tables 1 and 2 show the compositions and test results when the components constituting the protective films 3 and 3a of the first and second embodiments of the first invention were changed, respectively.

In the test, the corrosion resistance of the protective film according to the present invention was investigated by leaving the sample magnetic disk in an environmental test chamber at a temperature of SO'C and a relative humidity of 85% for 250 hours, and measuring the number of bit errors before and after the corrosion resistance test. Ta.

Furthermore, we conducted a C8S test (contact start/stop test) on each magnetic disk to evaluate the mechanical durability of the protective film. I tried it. The C8S exam.

A magnetic head consisting of a hard ceramic slider made of alumina and titanium carbide was used, and the magnetic head was pressed under conditions of a load of 18 g and a head flying height of 0.12 μm.

The volume mixing ratio of the interlayer solid lubricant component and the nonmetallic hard compound was 1:2 to 1:4, and the amount of the nonmetallic hard compound was increased. Further, the thickness of all protective films 3 was 25 nm.

In addition, magnetic disks were prepared in which carbon and 5i02 were deposited to a thickness of 50 nm on the magnetic medium layer 2 (by sputtering) as in the conventional example, and these were used as Comparative Samples 1 and 2. In addition, as comparative sample 3, magnetic medium layer 2
A magnetic disk was also fabricated on which MoS2 was coated to a thickness of 40 nm by sputtering.

These Comparative Samples 1 to 3 were subjected to the same tests as the samples of the above-mentioned Examples. The results are shown in Table 3.

Table 3 From Tables 1 to 3, it is clear that the magnetic storage bodies according to the present invention (sample numbers 1 to 28) are different from the conventional magnetic storage bodies (comparative sample numbers 1 and 2).
) shows extremely good corrosion resistance. In addition, comparative sample 1 is C8S 2,000 times, and comparative sample 2 is C8S 2,000 times.
Abrasion powder was generated during the test, and Comparative Sample 3 became MoS after 100 times.
Significant damage occurred to the protective film of No. 2. On the other hand, all magnetic storage bodies based on the present invention withstand over 20,000 C8S tests,
It was found to have extremely high mechanical durability.

〔Effect of the invention〕

As explained above, the present invention has a structure in which the protective film is formed of a predetermined interlayer solid lubricant component and a non-metallic hard compound, which can be easily handled with the current state of the art, and provides good friction. This has the effect of making it possible to obtain a magnetic memory having high wear resistance and corrosion resistance while maintaining its properties.

[Brief explanation of the drawing]

FIGS. 1 and 2 are sectional views showing first and second embodiments of the magnetic storage body of the first invention, respectively. DESCRIPTION OF SYMBOLS 1... Base body, 2... Magnetic medium layer, 3, 3a...
Protective film, 31... Hard compound layer, 32... Solid lubricant layer. Agent Patent Attorney Oto Uchihara

Claims (4)

[Claims] (1) A base body, a magnetic medium layer formed on the base body, and at least one nonmetallic hard compound on the magnetic medium layer, including B_2O_3, MoO_3, MoS_2, Mo
Se_2, NbS_2, NbSe_2, PbO, PbS
, ReS_2, TaS_2, VS_2, WS_2, WS
1. A magnetic memory comprising a protective film formed of a mixture with at least one of interlayer solid lubricant components consisting of e_2 and ZrS_2. (2) The protective film includes a hard compound layer formed of at least one type of nonmetallic hard compound, B_2O_3, Mo
O_3, MoS_2, MoSe_2, NbS_2, Nb
Se_2, PbO, PbS, ReS_2, TaS_2,
The magnetic storage body according to claim (1), comprising a solid lubricant layer formed of at least one kind of interlayer solid lubricant components consisting of VS_2, WS_2, WSe_2, and ZrS_2. (3) forming a magnetic medium layer on the base body, and forming at least one non-metallic hard compound on the magnetic medium layer;
B_2O_3, MoO_3, MoS_2, MoSe_2
, NbS_2, NbSe_2, PbO, PbS, ReS
_2, TaS_2, VS_2, WS_2, WSe_2,
A method for manufacturing a magnetic memory body, comprising the step of forming a protective film made of a mixture of ZrS_2 and at least one interlayer solid lubricant component. (4) The step of forming the protective film includes a step of forming a hard compound layer made of at least one non-metallic hard compound on the magnetic medium, B_2O_3, MoO_3, MoS_2
, MoSe_2, NbS_2, NbSe_2, PbO,
PbS, ReS_2, TaS_2, VS_2, WS_2
, WSe_2, ZrS_2, and forming a hard compound layer made of at least one of the interlayer solid lubricant components, WSe_2, and ZrS_2.