JPH01122835U - - Google Patents
Info
- Publication number
- JPH01122835U JPH01122835U JP1406888U JP1406888U JPH01122835U JP H01122835 U JPH01122835 U JP H01122835U JP 1406888 U JP1406888 U JP 1406888U JP 1406888 U JP1406888 U JP 1406888U JP H01122835 U JPH01122835 U JP H01122835U
- Authority
- JP
- Japan
- Prior art keywords
- main cylinder
- cylinder
- liquid
- raw material
- material liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 8
- 239000002994 raw material Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1406888U JPH01122835U (id) | 1988-02-03 | 1988-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1406888U JPH01122835U (id) | 1988-02-03 | 1988-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01122835U true JPH01122835U (id) | 1989-08-21 |
Family
ID=31224930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1406888U Pending JPH01122835U (id) | 1988-02-03 | 1988-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01122835U (id) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010284628A (ja) * | 2009-06-15 | 2010-12-24 | Hemmi Slide Rule Co Ltd | 液体原料のバブリング気化供給方法及び装置 |
| JP2011167680A (ja) * | 2010-01-14 | 2011-09-01 | Rohm & Haas Electronic Materials Llc | 一定濃度の蒸発のための方法およびその方法を使用する装置 |
| JP2013002815A (ja) * | 2011-06-10 | 2013-01-07 | Ulvac Japan Ltd | フロースルー式測定装置 |
-
1988
- 1988-02-03 JP JP1406888U patent/JPH01122835U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010284628A (ja) * | 2009-06-15 | 2010-12-24 | Hemmi Slide Rule Co Ltd | 液体原料のバブリング気化供給方法及び装置 |
| JP2011167680A (ja) * | 2010-01-14 | 2011-09-01 | Rohm & Haas Electronic Materials Llc | 一定濃度の蒸発のための方法およびその方法を使用する装置 |
| JP2016128163A (ja) * | 2010-01-14 | 2016-07-14 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ | 一定濃度の蒸発のための方法およびその方法を使用する装置 |
| JP2013002815A (ja) * | 2011-06-10 | 2013-01-07 | Ulvac Japan Ltd | フロースルー式測定装置 |