JPH01110830U - - Google Patents
Info
- Publication number
- JPH01110830U JPH01110830U JP570288U JP570288U JPH01110830U JP H01110830 U JPH01110830 U JP H01110830U JP 570288 U JP570288 U JP 570288U JP 570288 U JP570288 U JP 570288U JP H01110830 U JPH01110830 U JP H01110830U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- liquid
- chambers
- partition wall
- outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP570288U JPH01110830U (id) | 1988-01-20 | 1988-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP570288U JPH01110830U (id) | 1988-01-20 | 1988-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110830U true JPH01110830U (id) | 1989-07-26 |
Family
ID=31209307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP570288U Pending JPH01110830U (id) | 1988-01-20 | 1988-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110830U (id) |
-
1988
- 1988-01-20 JP JP570288U patent/JPH01110830U/ja active Pending