JPH01120339U - - Google Patents

Info

Publication number
JPH01120339U
JPH01120339U JP1559788U JP1559788U JPH01120339U JP H01120339 U JPH01120339 U JP H01120339U JP 1559788 U JP1559788 U JP 1559788U JP 1559788 U JP1559788 U JP 1559788U JP H01120339 U JPH01120339 U JP H01120339U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
semiconductor
support device
supported
organic resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1559788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0711469Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1559788U priority Critical patent/JPH0711469Y2/ja
Publication of JPH01120339U publication Critical patent/JPH01120339U/ja
Application granted granted Critical
Publication of JPH0711469Y2 publication Critical patent/JPH0711469Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1559788U 1988-02-08 1988-02-08 半導体製造装置 Expired - Lifetime JPH0711469Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1559788U JPH0711469Y2 (ja) 1988-02-08 1988-02-08 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1559788U JPH0711469Y2 (ja) 1988-02-08 1988-02-08 半導体製造装置

Publications (2)

Publication Number Publication Date
JPH01120339U true JPH01120339U (enrdf_load_stackoverflow) 1989-08-15
JPH0711469Y2 JPH0711469Y2 (ja) 1995-03-15

Family

ID=31227781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1559788U Expired - Lifetime JPH0711469Y2 (ja) 1988-02-08 1988-02-08 半導体製造装置

Country Status (1)

Country Link
JP (1) JPH0711469Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0381628U (enrdf_load_stackoverflow) * 1989-12-13 1991-08-21
JP2012015327A (ja) * 2010-06-30 2012-01-19 Sumco Corp ウェーハチャージ補助台

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0381628U (enrdf_load_stackoverflow) * 1989-12-13 1991-08-21
JP2012015327A (ja) * 2010-06-30 2012-01-19 Sumco Corp ウェーハチャージ補助台

Also Published As

Publication number Publication date
JPH0711469Y2 (ja) 1995-03-15

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