JPH01120326U - - Google Patents

Info

Publication number
JPH01120326U
JPH01120326U JP1607188U JP1607188U JPH01120326U JP H01120326 U JPH01120326 U JP H01120326U JP 1607188 U JP1607188 U JP 1607188U JP 1607188 U JP1607188 U JP 1607188U JP H01120326 U JPH01120326 U JP H01120326U
Authority
JP
Japan
Prior art keywords
heater
wafer
furnace
holding jig
supports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1607188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1607188U priority Critical patent/JPH01120326U/ja
Publication of JPH01120326U publication Critical patent/JPH01120326U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP1607188U 1988-02-08 1988-02-08 Pending JPH01120326U (US08087162-20120103-C00010.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1607188U JPH01120326U (US08087162-20120103-C00010.png) 1988-02-08 1988-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1607188U JPH01120326U (US08087162-20120103-C00010.png) 1988-02-08 1988-02-08

Publications (1)

Publication Number Publication Date
JPH01120326U true JPH01120326U (US08087162-20120103-C00010.png) 1989-08-15

Family

ID=31228678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1607188U Pending JPH01120326U (US08087162-20120103-C00010.png) 1988-02-08 1988-02-08

Country Status (1)

Country Link
JP (1) JPH01120326U (US08087162-20120103-C00010.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095917A (ja) * 1983-10-29 1985-05-29 Gijutsu Joho Kenkyusho:Kk 熱処理炉
JPS63278227A (ja) * 1987-05-08 1988-11-15 Teru Sagami Kk 熱処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095917A (ja) * 1983-10-29 1985-05-29 Gijutsu Joho Kenkyusho:Kk 熱処理炉
JPS63278227A (ja) * 1987-05-08 1988-11-15 Teru Sagami Kk 熱処理装置

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