JPH01120037U - - Google Patents

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Publication number
JPH01120037U
JPH01120037U JP16446388U JP16446388U JPH01120037U JP H01120037 U JPH01120037 U JP H01120037U JP 16446388 U JP16446388 U JP 16446388U JP 16446388 U JP16446388 U JP 16446388U JP H01120037 U JPH01120037 U JP H01120037U
Authority
JP
Japan
Prior art keywords
air
filter
ultra
approximately
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16446388U
Other languages
English (en)
Other versions
JPH031739Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988164463U priority Critical patent/JPH031739Y2/ja
Publication of JPH01120037U publication Critical patent/JPH01120037U/ja
Application granted granted Critical
Publication of JPH031739Y2 publication Critical patent/JPH031739Y2/ja
Expired legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は従来のクリーンルームへの給気装置の
平面図、第２図および第３図は本考案のクリーン
ルームへの給気装置の平面図および断面図、第４
図のイ，ロ，ハ，ニ，ホは、本考案の給気装置の
他の例を示す平面図である。 １：クリーンルーム、２，２ａ，２ｂ…：給気
ダクト、３，３ａ，３ｂ…：フイルターボツクス
、４：超高精密空気過器。

Claims (1)

    【実用新案登録請求の範囲】
  1. 空気抵抗が略同一である超高清密空気過器を
    内蔵したほぼ同形のフイルターボツクスを間隔を
    おいて複数個配置し、該フイルターボツクスのそ
    れぞれを末端に行くに従つて順次細い給気ダクト
    にて分岐管を介することなく直接に接続し、各フ
    イルターボツクスの超高精密空気過器からの清
    浄な空気をクリーンルーム内にほぼ均一化した吹
    出風量で噴出せしめる如くなしたことを特徴とす
    るクリーンルーム用給気装置。
JP1988164463U 1988-12-21 1988-12-21 Expired JPH031739Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988164463U JPH031739Y2 (ja) 1988-12-21 1988-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988164463U JPH031739Y2 (ja) 1988-12-21 1988-12-21

Publications (2)

Publication Number Publication Date
JPH01120037U true JPH01120037U (ja) 1989-08-15
JPH031739Y2 JPH031739Y2 (ja) 1991-01-18

Family

ID=31450094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988164463U Expired JPH031739Y2 (ja) 1988-12-21 1988-12-21

Country Status (1)

Country Link
JP (1) JPH031739Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000346416A (ja) * 1999-06-08 2000-12-15 Takasago Thermal Eng Co Ltd 循環型クリーンルーム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629732U (ja) * 1979-08-14 1981-03-20

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629732B2 (ja) * 1974-10-03 1981-07-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629732U (ja) * 1979-08-14 1981-03-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000346416A (ja) * 1999-06-08 2000-12-15 Takasago Thermal Eng Co Ltd 循環型クリーンルーム

Also Published As

Publication number Publication date
JPH031739Y2 (ja) 1991-01-18

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