JPH01119671A - Manufacture of diamond-coated member - Google Patents
Manufacture of diamond-coated memberInfo
- Publication number
- JPH01119671A JPH01119671A JP27353787A JP27353787A JPH01119671A JP H01119671 A JPH01119671 A JP H01119671A JP 27353787 A JP27353787 A JP 27353787A JP 27353787 A JP27353787 A JP 27353787A JP H01119671 A JPH01119671 A JP H01119671A
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- polishing
- ultrasonic
- liquor
- dispersed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010432 diamond Substances 0.000 title claims abstract description 29
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 238000000576 coating method Methods 0.000 claims abstract description 12
- 239000011248 coating agent Substances 0.000 claims abstract description 11
- 239000004094 surface-active agent Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims abstract description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 5
- 238000005498 polishing Methods 0.000 claims description 33
- 239000002245 particle Substances 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 7
- 239000006185 dispersion Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 6
- 239000001293 FEMA 3089 Substances 0.000 abstract description 2
- 238000009826 distribution Methods 0.000 abstract description 2
- 238000002156 mixing Methods 0.000 abstract description 2
- 238000000227 grinding Methods 0.000 abstract 5
- 230000000052 comparative effect Effects 0.000 description 4
- 238000010907 mechanical stirring Methods 0.000 description 4
- 230000006911 nucleation Effects 0.000 description 3
- 238000010899 nucleation Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- GJRQTCIYDGXPES-UHFFFAOYSA-N iso-butyl acetate Natural products CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 description 1
- FGKJLKRYENPLQH-UHFFFAOYSA-M isocaproate Chemical compound CC(C)CCC([O-])=O FGKJLKRYENPLQH-UHFFFAOYSA-M 0.000 description 1
- OQAGVSWESNCJJT-UHFFFAOYSA-N isovaleric acid methyl ester Natural products COC(=O)CC(C)C OQAGVSWESNCJJT-UHFFFAOYSA-N 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は耐摩耗部品や工具に適するダイアモンドコーテ
ィング部材の製造方法に関し、ヒートシンク等の電子部
材へも適用可能なものである。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a method of manufacturing a diamond coating member suitable for wear-resistant parts and tools, and is also applicable to electronic members such as heat sinks.
〈従来の技術〉
ＣＶＤ法によるダイアモンドコーティングは低温、低圧
下で気相合成するため、基材をダイアそンドパウダー（
粒子）などで予め研摩しなければ膜状に成長しなかった
。その理由は、気相からの析出核を多数形成させる必要
があり、このため前処理として研摩が必要であるからで
ある。従来、この研摩は手研摩又はダイアモンド粒子を
分散させた研摩液による超音波研摩によって行なわれて
いた。<Conventional technology> Diamond coating using the CVD method is synthesized in the vapor phase at low temperature and low pressure, so the base material is made of diamond powder (
It did not grow into a film unless it was polished in advance with particles (particles) or the like. The reason for this is that it is necessary to form a large number of precipitation nuclei from the gas phase, and therefore polishing is necessary as a pretreatment. Conventionally, this polishing has been carried out by hand or by ultrasonic polishing using a polishing liquid in which diamond particles are dispersed.
〈発明が解決しようとする問題点〉
しかし、従来の手研摩では研摩状態が一定でなく、再現
性に乏しく、研摩が不均一であり、又研摩時間が長いと
いう欠点があった。<Problems to be Solved by the Invention> However, conventional manual polishing has disadvantages in that the polishing condition is not constant, the reproducibility is poor, the polishing is non-uniform, and the polishing time is long.
また、超音波研摩では、ダイアモンド粒子が超音波によ
って十分に撹拌されないため均−に分散させることが困
難であり、手研摩と同様の問題があった。Further, in ultrasonic polishing, it is difficult to disperse the diamond particles evenly because the diamond particles are not sufficiently agitated by the ultrasonic waves, and there is a problem similar to that in manual polishing.
本発明は、ダイアモンド粒子を分散した分散液に界面活
性剤を混入することにより、分散液中のダイアモンド粒
子の分布を均一化させ、再現性及び均一性を確保すると
共に研摩時間の短縮を可能とするダイアモンドコーティ
ング部材の製造方法を提供することを目的とするもので
あり、更に他の目的は超音波研摩時に機械的撹拌を行う
ことによって、上記効果を一層向上させることにある。The present invention makes it possible to homogenize the distribution of diamond particles in the dispersion by mixing a surfactant into the dispersion in which diamond particles are dispersed, thereby ensuring reproducibility and uniformity and shortening the polishing time. Another object of the present invention is to provide a method for manufacturing a diamond-coated member, and another object is to further improve the above-mentioned effects by performing mechanical stirring during ultrasonic polishing.
〈問題点を解決するための手段〉
斯かる目的を達成するための本発明の構成、 は基材に
超音波研摩を行った後、ＣＶＤ法により前記基材にダイ
アモンドコーティングを行う方法において、前記超音波
研摩の研摩液としてダイアモンド粒子を分散した分散液
に界面活性剤を混入したものを用いたことを特徴とする
。更に、前記超音波研摩に際し、前記研摩液を機械的に
撹拌することが望ましい。<Means for Solving the Problems> The structure of the present invention for achieving the above object is a method of performing ultrasonic polishing on a base material and then applying diamond coating to the base material by a CVD method. It is characterized in that a dispersion of diamond particles mixed with a surfactant is used as the polishing liquid for ultrasonic polishing. Furthermore, during the ultrasonic polishing, it is desirable to mechanically stir the polishing liquid.
く実 施 例〉 以下、本発明の実施例について詳細に説明する。Example of implementation Examples of the present invention will be described in detail below.
Ｓｉ基材（ｌＯｍｍＸ ｌＯｍｍＸ ０．４ｍｍ）にダ
イアモンドコーティングを行う前に以下の通りに超音波
研摩を行った。まず、実施例１ではダイアモンド粒子（
粒径：１μｍ）２ｇをテレピン油３０ｃｃに分散させ、
これに界面活性剤として酢酸イソブチル３０ｃｃを混入
した研摩液中にＳ、ｉ基材を浸し、超音波を加えた。次
に実施例２では更に研摩液を機械的に撹拌した。Before applying diamond coating to the Si substrate (lOmm x lOmm x 0.4 mm), ultrasonic polishing was performed as follows. First, in Example 1, diamond particles (
Particle size: 1 μm) 2g was dispersed in 30cc of turpentine oil,
The S and i substrates were immersed in a polishing solution containing 30 cc of isobutyl acetate as a surfactant, and ultrasonic waves were applied. Next, in Example 2, the polishing liquid was further mechanically stirred.
機械的撹拌は直径２５１０１のプロペラを回転数２４０
ｒｐｍで回転させて行った。また比較例１としてダイ
アキンドペースト（１μｍ）で手研摩を行い、比較例２
としてダイアモンド粒子（１μｍ）２ｇをエタノール６
０ｃｃに分散させた研摩液により超音波研摩を行った。Mechanical stirring uses a propeller with a diameter of 25101 at a rotation speed of 240
It was rotated at rpm. In addition, as Comparative Example 1, hand polishing was performed with Diakind paste (1 μm), and Comparative Example 2
Add 2 g of diamond particles (1 μm) to ethanol 6
Ultrasonic polishing was performed using a polishing liquid dispersed in 0 cc.
実施例１，２．比較例２での超音波研摩条件は４５ｋＨ
ｚ、６０ ｗであった。これらをまとめると下表の通り
となる。Examples 1 and 2. The ultrasonic polishing conditions in Comparative Example 2 were 45kHz.
z, 60 w. These are summarized in the table below.
表−１
その後、マイクロ波プラズマＣＶＤ法により３０分間ダ
イアモンドコーティングを行った。その条件は以下の通
りである。Table 1 After that, diamond coating was performed for 30 minutes by microwave plasma CVD method. The conditions are as follows.
コーテイング後７ ｍｍＸ ７ ｍｍ角の範囲内に生成
した粒子の数を走査型電子顕微鏡にて計数し、それぞれ
の核生成密度を算出した。After coating, the number of particles generated within a 7 mm x 7 mm square area was counted using a scanning electron microscope, and the nucleation density of each particle was calculated.
第１図に、その結果を、研摩時間の関係で示した。同図
に示す結果から明らかなように、界面活性剤を使用し、
機械的撹拌を行う実施例２の核生成密度が最も高く、他
と比べて短い研摩時間でよく、またバラツキが小さく再
現性に優れていることが確認された。また、実施例２に
は及ばないが界面活性剤を使用する実施例１でも従来法
（比較例１．２）に比べかなりの改善が認められた。ま
た、熱ＣＶＤ法、熱フイラメントＣＶＤ法、電子線照射
ＣＶＤ法など他のコーティング法によって、も同様の結
果を得られた。FIG. 1 shows the results in terms of polishing time. As is clear from the results shown in the figure, using a surfactant,
It was confirmed that Example 2, which uses mechanical stirring, had the highest nucleation density, required a shorter polishing time than the others, and had small variations and excellent reproducibility. In addition, although it was not as good as in Example 2, a considerable improvement was observed in Example 1 using a surfactant compared to the conventional method (Comparative Example 1.2). Similar results were also obtained by other coating methods such as thermal CVD, thermal filament CVD, and electron beam irradiation CVD.
〈発明の効果〉
以上、実施例に基づいて具体的に説明したように本発明
ではダイアモンドコーティングの前処理研摩法として界
面活性剤を使用した超音波研摩を行うので、再現性、均
一性が改羨することとなる。更に、機揮的撹拌を併用す
ると一層効果的である。<Effects of the Invention> As specifically explained above based on the examples, in the present invention, ultrasonic polishing using a surfactant is performed as a pretreatment polishing method for diamond coating, so reproducibility and uniformity are improved. It's something to be envied. Furthermore, it is even more effective to use mechanical stirring in combination.
第１図はダイアモンドコーテイング後の核生成密度を測
定した結果を示すグラフである。FIG. 1 is a graph showing the results of measuring the nucleation density after diamond coating.
Claims (2)
記基材にダイアモンドコーティングを行う方法において
、前記超音波研摩の研摩液としてダイアモンド粒子を分
散した分散液に界面活性剤を混入したものを用いたこと
を 特徴とするダイアモンドコーティング部材の製造方法。(1) In a method in which a substrate is subjected to ultrasonic polishing and then diamond coating is applied to the substrate by a CVD method, a surfactant is mixed into a dispersion in which diamond particles are dispersed as a polishing liquid for the ultrasonic polishing. 1. A method for producing a diamond-coated member, characterized by using a diamond-coated member.
に際し、前記研摩液を機械的に撹拌することを特徴とす
るダイアモンドコーティング部材の製造方法。(2) The method for manufacturing a diamond-coated member according to claim 1, wherein the polishing liquid is mechanically stirred during the ultrasonic polishing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62273537A JP2587431B2 (en) | 1987-10-30 | 1987-10-30 | Manufacturing method of diamond coated member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62273537A JP2587431B2 (en) | 1987-10-30 | 1987-10-30 | Manufacturing method of diamond coated member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01119671A true JPH01119671A (en) | 1989-05-11 |
| JP2587431B2 JP2587431B2 (en) | 1997-03-05 |
Family
ID=17529218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62273537A Expired - Fee Related JP2587431B2 (en) | 1987-10-30 | 1987-10-30 | Manufacturing method of diamond coated member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2587431B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991004353A1 (en) * | 1989-09-22 | 1991-04-04 | Showa Denko Kabushiki Kaisha | Vapor deposited diamond synthesizing method on electrochemically treated substrate |
| JPH05271942A (en) * | 1992-03-24 | 1993-10-19 | Semiconductor Energy Lab Co Ltd | Thin diamond film and its formation |
| US5660881A (en) * | 1991-02-21 | 1997-08-26 | Mitsubishi Materials Corporation | Method of manufacturing CVD diamond coated cutting tools |
| US6660329B2 (en) | 2001-09-05 | 2003-12-09 | Kennametal Inc. | Method for making diamond coated cutting tool |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61121859A (en) * | 1984-11-15 | 1986-06-09 | Showa Denko Kk | Method of processing substrate for use in diamond synthesis by vapor phase method |
-
1987
- 1987-10-30 JP JP62273537A patent/JP2587431B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61121859A (en) * | 1984-11-15 | 1986-06-09 | Showa Denko Kk | Method of processing substrate for use in diamond synthesis by vapor phase method |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991004353A1 (en) * | 1989-09-22 | 1991-04-04 | Showa Denko Kabushiki Kaisha | Vapor deposited diamond synthesizing method on electrochemically treated substrate |
| US5164051A (en) * | 1989-09-22 | 1992-11-17 | Showa Denko K. K. | Method for vapor phase synthesis of diamond on electrochemically treated substrate |
| US5660881A (en) * | 1991-02-21 | 1997-08-26 | Mitsubishi Materials Corporation | Method of manufacturing CVD diamond coated cutting tools |
| JPH05271942A (en) * | 1992-03-24 | 1993-10-19 | Semiconductor Energy Lab Co Ltd | Thin diamond film and its formation |
| US6660329B2 (en) | 2001-09-05 | 2003-12-09 | Kennametal Inc. | Method for making diamond coated cutting tool |
| US6890655B2 (en) | 2001-09-05 | 2005-05-10 | Kennametal Inc. | Diamond coated cutting tool and method for making the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2587431B2 (en) | 1997-03-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |