JPH01119670A - Substrate-holding mechanism - Google Patents

Abstract

PURPOSE:To prevent the dropping of a disk substrate from a rotational and revolutional jig and to improve yield by providing a jig having a diameter smaller than the outside diameter of a disk on the opposite side of the film- formation plane side of a rotational and revolutional jig for attaching disk substrate of a side sputtering device. CONSTITUTION:A disk substrate is attached to a rotational and revolutional jig 2, and sputtering is carried out while providing rotational and revolutional motions to the disk substrate 2 opposite to a target. In the above side sputtering device, a jig 1 for disk dropping prevention having a diameter (r) smaller than the outside diameter (d) of the above disk substrate is provided on the opposite side of the film-formation plane side of the above jig 2. By this method, the disk substrate can be prevented from being forced out from the groove 3 of the jig 2 and dropping down or being stranded on a projecting part during rotation and revolution.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a mechanism for holding a substrate in a sputtering apparatus for producing thin films.

[Conventional technology]

In order to create a film with a uniform composition and no thickness distribution over the entire interior of the substrate holder using conventional sputtering equipment, it was necessary to rotate the substrate attached to the substrate holder. When the substrate is a disk substrate, a rotation/revolution jig shown in FIG. 2 is used. 10 is a rotation/revolution jig, and 11 is a disk substrate. Since the opening of this jig into which the disk substrate is inserted is larger than the diameter d of the disk substrate, the disk substrate rotates around its axis while the substrate holder rotates during side sputtering.

This method has made it possible to produce a good thin film with no composition distribution over the entire area within the disk substrate.

[Problem that the invention seeks to solve]

However, as can be seen from Fig. 2, the 11th disk substrate is inserted from the side opposite to the film forming surface of the revolving jig, so the diameter R of the inserted portion is thicker than the disk outer diameter d (if not In other words, R>d.Therefore, while the disk is rotating, it rides on the convex part 12 of the rotation jig, making it difficult to rotate.Furthermore, the disk rides on the - degree convex part. This causes a film to be formed all the way to the outer periphery of the disk, causing problems during lamination.Or, in the worst case scenario, the disk buzzes from the jig and falls off. The state is shown in Figure 3.

The present invention is intended to solve these problems, and its purpose is to provide a substrate holding mechanism in which the disk substrate does not ride on the convex portion of the self-common jig.

[Means for solving problems]

In a side sputtering apparatus in which a disk substrate and a target face each other, mounting of the substrate for rotating and revolving the disk substrate is characterized by providing a jig smaller than the outer diameter of the disk on the side opposite to the film forming surface of the jig.

〔Example〕

FIG. 1 shows a cross-sectional view of a revolving jig according to the present invention.

2 is the same as the conventional revolving jig shown in Fig. 2,
1 is a feature of the present invention. The jig is smaller than the outer diameter of the disk. In other words, it is a jig for preventing disks from falling. Since this radius r is smaller than the outer diameter d of the disk, the disk does not protrude from the groove 3 and there is no need to worry about riding on the convex portion.

The rotation/revolution jig 2 and the disk drop prevention jig 1 can be fixed in various ways, such as by screwing, spring fixing, etc., and any method may be used.

In order to examine the effects of the present invention, a magneto-optical recording medium was produced using a jig of the present invention and a conventional jig. The film composition is IN type Al5i
1000 N protective film, 2nd layer NdDyFeC.

Magneto-optical recording film 800, third layer Al5iN protective film 8゜0
It is the medium of people. 1 batch 6 pieces (90φ disk)
Using a rotation-revolution jig that can set 2 o batches, 120 disk media were created, and it was determined how many disks fell off the jig, or how many disks ran onto the protrusions and the film adhered to the outer circumference of the disk. Ta. The robe is the result.

From the results shown in Table 1, the jig of the present invention did not fall or run over the protrusions, and the yield was 100%.

On the other hand, it can be seen that the yield with the conventional jig is only 40%.

The fall prevention jig of the present invention is not limited to the one shown in FIG. 1, and similar jigs can be considered. These are shown in FIGS. 4 and 5. FIG. 4 shows the hollow part of the disk fall prevention jig shown in FIG. 1 filled in. FIG. 5 shows a miniaturized version of the disk fall prevention jig shown in FIG. The jigs according to the embodiments of the present invention shown in FIGS. 1, 4, and 5 all have d>r, and are smaller than the outer diameter of the disk.

〔Effect of the invention〕

As described above, according to the present invention, in a thin film manufacturing apparatus that forms single-layer and multi-layer films on a substrate, the substrate is mounted to rotate the disk substrate on the opposite side from the film forming surface of the jig, and the outer diameter of the disk is By providing a smaller jig, the disk substrate does not fall from the jig or ride on the protrusions, and the yield is significantly improved compared to the conventional method, which has a great effect on improving mass productivity.

Although a PC board was used as the disk substrate in this embodiment, it is effective for all substrates such as PMMA, epoxy resin, glass, etc., and is particularly effective against scratched surfaces of plastic substrates.

Furthermore, in addition to the production of magneto-optical recording media shown in the examples,
Needless to say, this method is effective for all types of thin film production.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a revolving jig according to the present invention. Figure 2 is a cross-sectional view of a conventional revolving jig. FIG. 3 is a cross-sectional view of the state in which the vehicle is placed on the convex portion. FIG. 4 is a cross-sectional view of the fall prevention jig according to the present invention, with the hollow space filled in. FIG. 5 is a cross-sectional view of a miniaturized disk fall prevention jig according to the present invention. 1...Jig for preventing disk fall 2...Conventional rotation/revolution jig 3...Groove 4...Jig for preventing disk fall 5...Jig for preventing disk fall 10...Automatic Revolution jig 11...Disc substrate 12...Convex portion Applicant: Seiko Epson Corporation 1...te) Sufu fall p';h stop jig direction 1st prisoner 501. 5 devices to prevent desks from falling

Claims (1)

[Claims] A substrate holding mechanism in a side sputtering apparatus in which a disk substrate and a target face each other, characterized in that a jig smaller than the outer diameter of the disk is provided on the side opposite to the film forming surface of a substrate mounting jig that rotates the disk substrate.