JPH01118339U - - Google Patents
Info
- Publication number
- JPH01118339U JPH01118339U JP1119188U JP1119188U JPH01118339U JP H01118339 U JPH01118339 U JP H01118339U JP 1119188 U JP1119188 U JP 1119188U JP 1119188 U JP1119188 U JP 1119188U JP H01118339 U JPH01118339 U JP H01118339U
- Authority
- JP
- Japan
- Prior art keywords
- main pipe
- filtration system
- temperature chemical
- piping device
- circulation filtration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001914 filtration Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
- Pipeline Systems (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1119188U JPH01118339U (enExample) | 1988-02-01 | 1988-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1119188U JPH01118339U (enExample) | 1988-02-01 | 1988-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01118339U true JPH01118339U (enExample) | 1989-08-10 |
Family
ID=31219525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1119188U Pending JPH01118339U (enExample) | 1988-02-01 | 1988-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01118339U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08148458A (ja) * | 1994-04-15 | 1996-06-07 | Steag Micro Tech Gmbh Donaueschingen | 基板の化学処理のための方法及び装置 |
-
1988
- 1988-02-01 JP JP1119188U patent/JPH01118339U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08148458A (ja) * | 1994-04-15 | 1996-06-07 | Steag Micro Tech Gmbh Donaueschingen | 基板の化学処理のための方法及び装置 |