JPS61117247U - - Google Patents
Info
- Publication number
- JPS61117247U JPS61117247U JP1985000229U JP22985U JPS61117247U JP S61117247 U JPS61117247 U JP S61117247U JP 1985000229 U JP1985000229 U JP 1985000229U JP 22985 U JP22985 U JP 22985U JP S61117247 U JPS61117247 U JP S61117247U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- cleaning liquid
- valve
- outlet side
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985000229U JPS61117247U (enExample) | 1985-01-08 | 1985-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985000229U JPS61117247U (enExample) | 1985-01-08 | 1985-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61117247U true JPS61117247U (enExample) | 1986-07-24 |
Family
ID=30471900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985000229U Pending JPS61117247U (enExample) | 1985-01-08 | 1985-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61117247U (enExample) |
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1985
- 1985-01-08 JP JP1985000229U patent/JPS61117247U/ja active Pending