JPH01118224U - - Google Patents
Info
- Publication number
- JPH01118224U JPH01118224U JP1332288U JP1332288U JPH01118224U JP H01118224 U JPH01118224 U JP H01118224U JP 1332288 U JP1332288 U JP 1332288U JP 1332288 U JP1332288 U JP 1332288U JP H01118224 U JPH01118224 U JP H01118224U
- Authority
- JP
- Japan
- Prior art keywords
- movable body
- air bearing
- hydrostatic air
- stationary base
- magnets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002706 hydrostatic effect Effects 0.000 claims description 7
- 230000005291 magnetic effect Effects 0.000 claims description 3
- 230000003068 static effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1332288U JPH01118224U (en, 2012) | 1988-02-02 | 1988-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1332288U JPH01118224U (en, 2012) | 1988-02-02 | 1988-02-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01118224U true JPH01118224U (en, 2012) | 1989-08-10 |
Family
ID=31223529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1332288U Pending JPH01118224U (en, 2012) | 1988-02-02 | 1988-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01118224U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11294456A (ja) * | 1998-04-09 | 1999-10-26 | Nippon Seiko Kk | 静圧空気軸受直線案内装置 |
| JP2003111352A (ja) * | 2001-09-26 | 2003-04-11 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
-
1988
- 1988-02-02 JP JP1332288U patent/JPH01118224U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11294456A (ja) * | 1998-04-09 | 1999-10-26 | Nippon Seiko Kk | 静圧空気軸受直線案内装置 |
| JP2003111352A (ja) * | 2001-09-26 | 2003-04-11 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |