JPH01117552U - - Google Patents
Info
- Publication number
- JPH01117552U JPH01117552U JP1398388U JP1398388U JPH01117552U JP H01117552 U JPH01117552 U JP H01117552U JP 1398388 U JP1398388 U JP 1398388U JP 1398388 U JP1398388 U JP 1398388U JP H01117552 U JPH01117552 U JP H01117552U
- Authority
- JP
- Japan
- Prior art keywords
- manipulator
- substrate
- electron beam
- shielding plate
- rotation axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 2
- 238000002003 electron diffraction Methods 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1398388U JPH01117552U (cs) | 1988-02-03 | 1988-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1398388U JPH01117552U (cs) | 1988-02-03 | 1988-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01117552U true JPH01117552U (cs) | 1989-08-08 |
Family
ID=31224770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1398388U Pending JPH01117552U (cs) | 1988-02-03 | 1988-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01117552U (cs) |
-
1988
- 1988-02-03 JP JP1398388U patent/JPH01117552U/ja active Pending
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