JPH01116449U - - Google Patents

Info

Publication number

JPH01116449U

JPH01116449U JP1153288U JP1153288U JPH01116449U JP H01116449 U JPH01116449 U JP H01116449U JP 1153288 U JP1153288 U JP 1153288U JP 1153288 U JP1153288 U JP 1153288U JP H01116449 U JPH01116449 U JP H01116449U

Authority

JP

Japan

Prior art keywords

electrode

silicon substrate

hole

integrated circuit

semiconductor integrated

Prior art date

1988-01-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
• 229910052710 silicon Inorganic materials 0.000 claims description 3
• 239000010703 silicon Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 239000012212 insulator Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 239000011229 interlayer Substances 0.000 claims 1
• 239000010410 layer Substances 0.000 claims 1