JPH01115243U - - Google Patents
Info
- Publication number
- JPH01115243U JPH01115243U JP922988U JP922988U JPH01115243U JP H01115243 U JPH01115243 U JP H01115243U JP 922988 U JP922988 U JP 922988U JP 922988 U JP922988 U JP 922988U JP H01115243 U JPH01115243 U JP H01115243U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- tray
- storage section
- shock absorbing
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 230000035939 shock Effects 0.000 claims description 4
- 238000004806 packaging method and process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 8
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Pile Receivers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP922988U JPH01115243U (hu) | 1988-01-27 | 1988-01-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP922988U JPH01115243U (hu) | 1988-01-27 | 1988-01-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01115243U true JPH01115243U (hu) | 1989-08-03 |
Family
ID=31215792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP922988U Pending JPH01115243U (hu) | 1988-01-27 | 1988-01-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01115243U (hu) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002370744A (ja) * | 2001-06-15 | 2002-12-24 | Fujitsu Kasei Kk | 搬送トレー |
JP4728840B2 (ja) * | 2006-03-02 | 2011-07-20 | ミライアル株式会社 | 薄板保持容器 |
WO2011135639A1 (ja) * | 2010-04-28 | 2011-11-03 | パナソニック株式会社 | 半導体ウエハ収納容器および収納方法 |
-
1988
- 1988-01-27 JP JP922988U patent/JPH01115243U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002370744A (ja) * | 2001-06-15 | 2002-12-24 | Fujitsu Kasei Kk | 搬送トレー |
JP4728840B2 (ja) * | 2006-03-02 | 2011-07-20 | ミライアル株式会社 | 薄板保持容器 |
WO2011135639A1 (ja) * | 2010-04-28 | 2011-11-03 | パナソニック株式会社 | 半導体ウエハ収納容器および収納方法 |
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