JPH01115243U - - Google Patents

Info

Publication number
JPH01115243U
JPH01115243U JP922988U JP922988U JPH01115243U JP H01115243 U JPH01115243 U JP H01115243U JP 922988 U JP922988 U JP 922988U JP 922988 U JP922988 U JP 922988U JP H01115243 U JPH01115243 U JP H01115243U
Authority
JP
Japan
Prior art keywords
wafer
tray
storage section
shock absorbing
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP922988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP922988U priority Critical patent/JPH01115243U/ja
Publication of JPH01115243U publication Critical patent/JPH01115243U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Pile Receivers (AREA)
JP922988U 1988-01-27 1988-01-27 Pending JPH01115243U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP922988U JPH01115243U (US20020051482A1-20020502-M00012.png) 1988-01-27 1988-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP922988U JPH01115243U (US20020051482A1-20020502-M00012.png) 1988-01-27 1988-01-27

Publications (1)

Publication Number Publication Date
JPH01115243U true JPH01115243U (US20020051482A1-20020502-M00012.png) 1989-08-03

Family

ID=31215792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP922988U Pending JPH01115243U (US20020051482A1-20020502-M00012.png) 1988-01-27 1988-01-27

Country Status (1)

Country Link
JP (1) JPH01115243U (US20020051482A1-20020502-M00012.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002370744A (ja) * 2001-06-15 2002-12-24 Fujitsu Kasei Kk 搬送トレー
JP4728840B2 (ja) * 2006-03-02 2011-07-20 ミライアル株式会社 薄板保持容器
WO2011135639A1 (ja) * 2010-04-28 2011-11-03 パナソニック株式会社 半導体ウエハ収納容器および収納方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002370744A (ja) * 2001-06-15 2002-12-24 Fujitsu Kasei Kk 搬送トレー
JP4728840B2 (ja) * 2006-03-02 2011-07-20 ミライアル株式会社 薄板保持容器
WO2011135639A1 (ja) * 2010-04-28 2011-11-03 パナソニック株式会社 半導体ウエハ収納容器および収納方法

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