JPH01114669U - - Google Patents
Info
- Publication number
- JPH01114669U JPH01114669U JP888288U JP888288U JPH01114669U JP H01114669 U JPH01114669 U JP H01114669U JP 888288 U JP888288 U JP 888288U JP 888288 U JP888288 U JP 888288U JP H01114669 U JPH01114669 U JP H01114669U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate support
- vacuum
- vacuum container
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP888288U JPH01114669U (de) | 1988-01-28 | 1988-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP888288U JPH01114669U (de) | 1988-01-28 | 1988-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01114669U true JPH01114669U (de) | 1989-08-02 |
Family
ID=31215136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP888288U Pending JPH01114669U (de) | 1988-01-28 | 1988-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01114669U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06260543A (ja) * | 1991-11-26 | 1994-09-16 | Applied Materials Inc | 表面揮発性物質検知装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5939927B2 (ja) * | 1978-07-13 | 1984-09-27 | 沖電気工業株式会社 | Ｍｏｓ駆動回路 |
-
1988
- 1988-01-28 JP JP888288U patent/JPH01114669U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5939927B2 (ja) * | 1978-07-13 | 1984-09-27 | 沖電気工業株式会社 | Ｍｏｓ駆動回路 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06260543A (ja) * | 1991-11-26 | 1994-09-16 | Applied Materials Inc | 表面揮発性物質検知装置 |