JPH01114264U - - Google Patents
Info
- Publication number
- JPH01114264U JPH01114264U JP1088288U JP1088288U JPH01114264U JP H01114264 U JPH01114264 U JP H01114264U JP 1088288 U JP1088288 U JP 1088288U JP 1088288 U JP1088288 U JP 1088288U JP H01114264 U JPH01114264 U JP H01114264U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- polishing
- carrier
- storage hole
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 5
- 239000003082 abrasive agent Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1088288U JPH01114264U (pt) | 1988-01-29 | 1988-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1088288U JPH01114264U (pt) | 1988-01-29 | 1988-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01114264U true JPH01114264U (pt) | 1989-08-01 |
Family
ID=31218937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1088288U Pending JPH01114264U (pt) | 1988-01-29 | 1988-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01114264U (pt) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007098543A (ja) * | 2005-10-07 | 2007-04-19 | Nikon Corp | ワークキャリア及び両面研磨装置 |
| JP2009012086A (ja) * | 2007-07-02 | 2009-01-22 | Speedfam Co Ltd | ワークキャリア |
| JP4605564B1 (ja) * | 2009-09-28 | 2011-01-05 | 株式会社白崎製作所 | 脆性薄板研磨装置用ホルダ、およびその製造方法 |
| JP2011235373A (ja) * | 2010-05-07 | 2011-11-24 | Fujibo Holdings Inc | 枠材および枠材を有する保持具 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61209877A (ja) * | 1985-03-14 | 1986-09-18 | Nitto Hatsujo:Kk | ラツピングキヤリア |
-
1988
- 1988-01-29 JP JP1088288U patent/JPH01114264U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61209877A (ja) * | 1985-03-14 | 1986-09-18 | Nitto Hatsujo:Kk | ラツピングキヤリア |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007098543A (ja) * | 2005-10-07 | 2007-04-19 | Nikon Corp | ワークキャリア及び両面研磨装置 |
| JP2009012086A (ja) * | 2007-07-02 | 2009-01-22 | Speedfam Co Ltd | ワークキャリア |
| JP4605564B1 (ja) * | 2009-09-28 | 2011-01-05 | 株式会社白崎製作所 | 脆性薄板研磨装置用ホルダ、およびその製造方法 |
| JP2011067918A (ja) * | 2009-09-28 | 2011-04-07 | Shirasaki Seisakusho:Kk | 脆性薄板研磨装置用ホルダ、およびその製造方法 |
| JP2011235373A (ja) * | 2010-05-07 | 2011-11-24 | Fujibo Holdings Inc | 枠材および枠材を有する保持具 |