JPH01113341U - - Google Patents
Info
- Publication number
- JPH01113341U JPH01113341U JP839188U JP839188U JPH01113341U JP H01113341 U JPH01113341 U JP H01113341U JP 839188 U JP839188 U JP 839188U JP 839188 U JP839188 U JP 839188U JP H01113341 U JPH01113341 U JP H01113341U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic chuck
- insulating film
- conductor
- attracted
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 4
- 239000000498 cooling water Substances 0.000 claims description 3
- 239000012212 insulator Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP839188U JPH01113341U (ko) | 1988-01-26 | 1988-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP839188U JPH01113341U (ko) | 1988-01-26 | 1988-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01113341U true JPH01113341U (ko) | 1989-07-31 |
Family
ID=31214226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP839188U Pending JPH01113341U (ko) | 1988-01-26 | 1988-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01113341U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010084650A1 (ja) * | 2009-01-26 | 2010-07-29 | 三菱重工業株式会社 | プラズマ処理装置の基板支持台 |
-
1988
- 1988-01-26 JP JP839188U patent/JPH01113341U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010084650A1 (ja) * | 2009-01-26 | 2010-07-29 | 三菱重工業株式会社 | プラズマ処理装置の基板支持台 |
| KR101310414B1 (ko) * | 2009-01-26 | 2013-09-24 | 미츠비시 쥬고교 가부시키가이샤 | 플라즈마 처리 장치의 기판 지지대 |