JPH01113332U - - Google Patents
Info
- Publication number
- JPH01113332U JPH01113332U JP936388U JP936388U JPH01113332U JP H01113332 U JPH01113332 U JP H01113332U JP 936388 U JP936388 U JP 936388U JP 936388 U JP936388 U JP 936388U JP H01113332 U JPH01113332 U JP H01113332U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- vacuum processing
- electrode
- cylindrical
- dry etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP936388U JPH01113332U (fr) | 1988-01-26 | 1988-01-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP936388U JPH01113332U (fr) | 1988-01-26 | 1988-01-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01113332U true JPH01113332U (fr) | 1989-07-31 |
Family
ID=31216048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP936388U Pending JPH01113332U (fr) | 1988-01-26 | 1988-01-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01113332U (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004082008A1 (fr) * | 2003-03-14 | 2004-09-23 | Research Institute Of Innovative Technology For The Earth | Appareil de depot chimique en phase vapeur et procede de nettoyage d'un tel appareil |
JP2009065171A (ja) * | 2003-03-14 | 2009-03-26 | Research Institute Of Innovative Technology For The Earth | Cvd装置を用いた成膜方法 |
-
1988
- 1988-01-26 JP JP936388U patent/JPH01113332U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004082008A1 (fr) * | 2003-03-14 | 2004-09-23 | Research Institute Of Innovative Technology For The Earth | Appareil de depot chimique en phase vapeur et procede de nettoyage d'un tel appareil |
JP2009065171A (ja) * | 2003-03-14 | 2009-03-26 | Research Institute Of Innovative Technology For The Earth | Cvd装置を用いた成膜方法 |