JPH01113191U - - Google Patents
Info
- Publication number
- JPH01113191U JPH01113191U JP764788U JP764788U JPH01113191U JP H01113191 U JPH01113191 U JP H01113191U JP 764788 U JP764788 U JP 764788U JP 764788 U JP764788 U JP 764788U JP H01113191 U JPH01113191 U JP H01113191U
- Authority
- JP
- Japan
- Prior art keywords
- stator
- rotor
- housing
- circumferential surface
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP764788U JPH0640954Y2 (ja) | 1988-01-26 | 1988-01-26 | ねじ溝真空ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP764788U JPH0640954Y2 (ja) | 1988-01-26 | 1988-01-26 | ねじ溝真空ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01113191U true JPH01113191U (de) | 1989-07-31 |
| JPH0640954Y2 JPH0640954Y2 (ja) | 1994-10-26 |
Family
ID=31212835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP764788U Expired - Lifetime JPH0640954Y2 (ja) | 1988-01-26 | 1988-01-26 | ねじ溝真空ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0640954Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022075228A1 (ja) * | 2020-10-09 | 2022-04-14 | エドワーズ株式会社 | 真空ポンプ、および真空ポンプに備わる回転円筒体 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4218765B2 (ja) * | 1997-06-27 | 2009-02-04 | 株式会社荏原製作所 | ターボ分子ポンプ |
| US6926493B1 (en) * | 1997-06-27 | 2005-08-09 | Ebara Corporation | Turbo-molecular pump |
-
1988
- 1988-01-26 JP JP764788U patent/JPH0640954Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022075228A1 (ja) * | 2020-10-09 | 2022-04-14 | エドワーズ株式会社 | 真空ポンプ、および真空ポンプに備わる回転円筒体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0640954Y2 (ja) | 1994-10-26 |