JPH01112420U - - Google Patents
Info
- Publication number
- JPH01112420U JPH01112420U JP669088U JP669088U JPH01112420U JP H01112420 U JPH01112420 U JP H01112420U JP 669088 U JP669088 U JP 669088U JP 669088 U JP669088 U JP 669088U JP H01112420 U JPH01112420 U JP H01112420U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- orifice
- fluid
- differential pressure
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 13
- 239000012530 fluid Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988006690U JPH0645209Y2 (ja) | 1988-01-22 | 1988-01-22 | 半導体差圧流量計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988006690U JPH0645209Y2 (ja) | 1988-01-22 | 1988-01-22 | 半導体差圧流量計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01112420U true JPH01112420U (fr) | 1989-07-28 |
| JPH0645209Y2 JPH0645209Y2 (ja) | 1994-11-16 |
Family
ID=31211067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988006690U Expired - Lifetime JPH0645209Y2 (ja) | 1988-01-22 | 1988-01-22 | 半導体差圧流量計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645209Y2 (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000035821A (ja) * | 1998-07-17 | 2000-02-02 | Horiba Ltd | 気体流量制御装置 |
| JP2012145356A (ja) * | 2011-01-07 | 2012-08-02 | Univ Of Tokyo | 流速センサ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59120425U (ja) * | 1983-01-31 | 1984-08-14 | 三洋電機株式会社 | 流量計 |
-
1988
- 1988-01-22 JP JP1988006690U patent/JPH0645209Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59120425U (ja) * | 1983-01-31 | 1984-08-14 | 三洋電機株式会社 | 流量計 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000035821A (ja) * | 1998-07-17 | 2000-02-02 | Horiba Ltd | 気体流量制御装置 |
| JP2012145356A (ja) * | 2011-01-07 | 2012-08-02 | Univ Of Tokyo | 流速センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0645209Y2 (ja) | 1994-11-16 |
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