JPH01112416U - - Google Patents

Info

Publication number
JPH01112416U
JPH01112416U JP658788U JP658788U JPH01112416U JP H01112416 U JPH01112416 U JP H01112416U JP 658788 U JP658788 U JP 658788U JP 658788 U JP658788 U JP 658788U JP H01112416 U JPH01112416 U JP H01112416U
Authority
JP
Japan
Prior art keywords
light
diffraction grating
optical element
grating
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP658788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0620969Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988006587U priority Critical patent/JPH0620969Y2/ja
Publication of JPH01112416U publication Critical patent/JPH01112416U/ja
Application granted granted Critical
Publication of JPH0620969Y2 publication Critical patent/JPH0620969Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP1988006587U 1988-01-21 1988-01-21 格子干渉型変位検出装置 Expired - Lifetime JPH0620969Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988006587U JPH0620969Y2 (ja) 1988-01-21 1988-01-21 格子干渉型変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988006587U JPH0620969Y2 (ja) 1988-01-21 1988-01-21 格子干渉型変位検出装置

Publications (2)

Publication Number Publication Date
JPH01112416U true JPH01112416U (OSRAM) 1989-07-28
JPH0620969Y2 JPH0620969Y2 (ja) 1994-06-01

Family

ID=31210894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988006587U Expired - Lifetime JPH0620969Y2 (ja) 1988-01-21 1988-01-21 格子干渉型変位検出装置

Country Status (1)

Country Link
JP (1) JPH0620969Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009252990A (ja) * 2008-04-04 2009-10-29 Nikon Corp 露光方法及びデバイス製造方法、並びに露光装置
JP2014102260A (ja) * 2014-03-12 2014-06-05 Taiyo Yuden Co Ltd 変位計測装置及び変位計測方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5939683A (ja) * 1982-08-27 1984-03-05 株式会社日立製作所 吊り具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5939683A (ja) * 1982-08-27 1984-03-05 株式会社日立製作所 吊り具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009252990A (ja) * 2008-04-04 2009-10-29 Nikon Corp 露光方法及びデバイス製造方法、並びに露光装置
JP2014102260A (ja) * 2014-03-12 2014-06-05 Taiyo Yuden Co Ltd 変位計測装置及び変位計測方法

Also Published As

Publication number Publication date
JPH0620969Y2 (ja) 1994-06-01

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