JPH01112218A - Hydrophobic optical member - Google Patents
Hydrophobic optical memberInfo
- Publication number
- JPH01112218A JPH01112218A JP62270033A JP27003387A JPH01112218A JP H01112218 A JPH01112218 A JP H01112218A JP 62270033 A JP62270033 A JP 62270033A JP 27003387 A JP27003387 A JP 27003387A JP H01112218 A JPH01112218 A JP H01112218A
- Authority
- JP
- Japan
- Prior art keywords
- optical member
- oxide
- hydrophobic
- visible rays
- transmittivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002209 hydrophobic effect Effects 0.000 title claims abstract description 27
- 230000003287 optical effect Effects 0.000 title claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims abstract description 9
- 239000004810 polytetrafluoroethylene Substances 0.000 claims abstract description 9
- -1 polytetrafluoroethylene Polymers 0.000 claims abstract description 6
- 229920001577 copolymer Polymers 0.000 claims abstract description 5
- 239000002131 composite material Substances 0.000 claims description 25
- 239000002033 PVDF binder Substances 0.000 claims description 5
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 5
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 claims description 4
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 6
- 229910052681 coesite Inorganic materials 0.000 abstract description 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 3
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 3
- 229910052682 stishovite Inorganic materials 0.000 abstract description 3
- 229910052905 tridymite Inorganic materials 0.000 abstract description 3
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract description 2
- 150000001875 compounds Chemical class 0.000 abstract 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 abstract 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 26
- 238000000034 method Methods 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000005299 abrasion Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000004744 fabric Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 229920001477 hydrophilic polymer Polymers 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は自動車等の車両、船舶、航空機および建築物の
窓、ミラーなどに使用される疎水性光学部材に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a hydrophobic optical member used in windows, mirrors, etc. of vehicles such as automobiles, ships, aircraft, and buildings.
（従来技術） 従来、雨天の際や高湿度下において車両、船舶。(Conventional technology) Conventionally, vehicles and ships are used in rainy weather or under high humidity.
航空機、建築物の窓やミラーに使用されているガラスな
どに水滴が付着したり曇りが生じたり視認性が低下する
問題が発生していた。Problems have arisen in which water droplets adhere to the glass used in windows and mirrors of aircraft and buildings, causing fogging and reducing visibility.
その対策として、１）光学部材の加熱、２）表面の親水
化処理、３）表面の疎水化処理が実施されている。１）
の方法は付着した水を加熱により蒸発させ除去するもの
で加熱装置の組み込みおよびその使用においてコスト高
であるので、限られた場合にのみ使用されているだけで
ある。As countermeasures, 1) heating of the optical member, 2) surface hydrophilic treatment, and 3) surface hydrophobic treatment are implemented. 1)
This method involves evaporating and removing adhering water by heating, and it is expensive to install and use a heating device, so it is used only in limited cases.
２）の表面の親水化処理は、付着する水を水滴とせず一
様に濡らす方法であり、親水性の界面活性剤や多価アル
コールあるいは親水性重合体を部材表面に被覆する方法
（特開昭５３−５８４９２号）、ＭｇＦｚ 、ＳｉＯな
どの無機化合物を被覆する方法などがある。しかしなが
ら、−様に水で表面が濡れているため光学部材を通して
みた像が歪みを生じたり、親水性という性質上表面エネ
ルギーが高いため汚れが付着しやすいという欠点を有す
る。2) Surface hydrophilization treatment is a method of uniformly wetting adhering water without turning it into droplets, and is a method of coating the surface of the member with a hydrophilic surfactant, polyhydric alcohol, or hydrophilic polymer (Unexamined Japanese Patent Publication No. There are methods of coating with inorganic compounds such as MgFz, SiO, etc. However, since the surface is wet with water, the image seen through the optical member may be distorted, and because of its hydrophilic nature, the surface energy is high, so dirt tends to adhere to it.
３）の疎水化処理には、■有機シリコン系またはフッ素
系の疎水剤を塗布またはスプレー法によって表面に被覆
する方法、■フルオロカーボン系またはフッ素系の重合
膜をプラズマ重合法によって被覆する方法（特公昭６０
−１３０６５号）。3) Hydrophobization treatment includes: ■ coating the surface with an organic silicone-based or fluorine-based hydrophobic agent by coating or spraying, and ■ coating the surface with a fluorocarbon-based or fluorine-based polymer film using a plasma polymerization method (specifically). Kosho 60
-13065).
■Ｃｅ○２．Ｔｉｅ□などの薄膜をＰＶＤ、ＣＶＤによ
って被覆する方法がある。■Ce○2. There is a method of coating a thin film such as Tie□ by PVD or CVD.
疎水性は水の接触角で判断され、実用」−９０度以上が
必要とされる。■、■の方法によって形成された物質は
９０度以上の水の接触角を有し疎水性に優れているが１
時間と共に劣化したり、摩耗によって脱落し疎水効果が
減退し、耐久性がない。Hydrophobicity is determined by the contact angle of water, which is required to be -90 degrees or more for practical purposes. The substances formed by methods ① and ② have a water contact angle of 90 degrees or more and are excellent in hydrophobicity;
It deteriorates over time, falls off due to wear, reduces its hydrophobic effect, and is not durable.
特に車両、船舶、航空機などにおいて耐摩耗性などが要
求される所では疎水効果の耐久性が殆どない。また、■
の方法によって形成された薄膜は耐久性及びガラス等と
の密着性に優れているが疎水性能が接触角にして約８０
度と、■、■の方法の９０度以上に比較して劣っている
。In particular, where wear resistance is required in vehicles, ships, aircraft, etc., the durability of the hydrophobic effect is almost non-existent. Also,■
The thin film formed by this method has excellent durability and adhesion to glass, etc., but its hydrophobicity is approximately 80% in terms of contact angle.
degree, which is inferior to 90 degrees or more in methods (■) and (■).
本発明は従来技術における上記問題点を解決するために
なされたものであり、可視光透過性基板上に複合層を形
成し、疎水性と耐久性を兼ね備えた視認性に優れた光学
部材を提供することを目的とする。The present invention was made to solve the above-mentioned problems in the prior art, and provides an optical member with excellent visibility that has both hydrophobicity and durability by forming a composite layer on a visible light-transmitting substrate. The purpose is to
（発明の説明）
本発明は可視光透過性基板上に水の接触角が９０度以上
、厚さが５μｍ以下で可視光透過性を有するフッ素樹脂
と可視光透過性を有する酸化物とからなる複合層を有す
ることを特徴とする疎水性光学部材に関するものである
。(Description of the invention) The present invention consists of a fluororesin that has a visible light transmittance and an oxide that has a visible light transmittance, and has a water contact angle of 90 degrees or more and a thickness of 5 μm or less on a visible light transmittable substrate. The present invention relates to a hydrophobic optical member characterized by having a composite layer.
可視光透過性基板上に形成される複合層の内部において
、フッ素樹脂と酸化物がどのような状態になっているか
明確でないが、該複合層は個々の物質が有する優れた性
質を複合化した性質を有する。すなわち、フッ素樹脂は
水の接触角が９０度以上のものを用いているので、水の
接触角が８０度と劣っている酸化物が含まれていても該
複合層はフッ素樹脂に近い優れた疎水性を示す。また。Although it is not clear what state the fluororesin and oxide are in inside the composite layer formed on the visible light transparent substrate, the composite layer combines the excellent properties of the individual substances. have a property. In other words, since the fluororesin used has a water contact angle of 90 degrees or more, even if it contains an oxide with an inferior water contact angle of 80 degrees, the composite layer has an excellent property close to that of the fluororesin. Shows hydrophobicity. Also.
本発明で用いた酸化物は耐摩耗性と上記基板との密着性
に優れているため、複合層の耐摩耗性および基板との密
着性がフッ素樹脂単一層の場合に比し著しく向上し、疎
水性能の耐久性が半永久的に持続する。また、フッ素樹
脂、酸化物ともに可視光透過性を有するので本発明品は
光学部材として可視光に対し透過・反射が必要とされる
場所に広く利用できる。Since the oxide used in the present invention has excellent abrasion resistance and adhesion to the substrate, the abrasion resistance and adhesion to the substrate of the composite layer are significantly improved compared to a single layer of fluororesin. The durability of hydrophobic performance lasts semi-permanently. Furthermore, since both the fluororesin and the oxide have visible light transmittance, the product of the present invention can be widely used as an optical member in places where transmission and reflection of visible light is required.
（実施態様の説明）
複合層を構成するフッ素樹脂として、ポリテトラフルオ
ロエチレン（ＰＴＦＥ）、テトラフルオ＝ ５−
ロエチレンーへキサフルオロプロピレン共重合体（ＦＥ
Ｐ）、テトラフルオロエチレン−パーフルオロアルキル
ビニルエーテル共重合体（ｐＦＡ）。(Description of embodiments) As the fluororesin constituting the composite layer, polytetrafluoroethylene (PTFE), tetrafluoro-5-roethylene-hexafluoropropylene copolymer (FE
P), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (pFA).
ポリフッ化ビニリデン（ＰＶＤＦ）およびポリクロロト
リフルオロエチレン（ＰＣＴＦＥ）などがある。これら
のフッ素樹脂は他の有機材料に比し。Examples include polyvinylidene fluoride (PVDF) and polychlorotrifluoroethylene (PCTFE). These fluororesins are compared to other organic materials.
耐熱性に優れている。しかしながら、硬度が低く。Excellent heat resistance. However, the hardness is low.
耐摩耗性に劣るのが欠点である。The disadvantage is that it has poor abrasion resistance.
一方、酸化物としては、Ｓ ｉｏｚ 、Ｔａ２０５およ
びＩｎｚＯｓを用いる。これらの酸化物はフッ素樹脂と
比較すると表面張力が大きいため水の接触角が４０〜６
０度と小さく疎水性能は良くないが、可視光に対し透明
で、かつ、高硬度で耐摩耗性に優れている。また、ガラ
スなどとの密着性にも優れている。可視光透過性基板は
窓やミラーなど可視光の透過および反射を利用する所に
使用されるソーダ石灰ガラスなどの無機ガラスや有機樹
脂を用いる。すべての可視光に対して透過性を有する材
料に限定されず、可視光の一領域に透過性を有するもの
でもよい。On the other hand, Sioz, Ta205, and InzOs are used as the oxides. These oxides have a higher surface tension than fluororesins, so the contact angle of water is 40 to 6.
Although it has a small hydrophobic property of 0 degrees, it is transparent to visible light, has high hardness, and has excellent abrasion resistance. It also has excellent adhesion to glass and the like. The visible light transmitting substrate is made of inorganic glass such as soda lime glass or organic resin, which is used in windows, mirrors, and other places that utilize the transmission and reflection of visible light. The material is not limited to a material that is transparent to all visible light, but may be a material that is transparent to one region of visible light.
本実施態様は上記の材料を組合せそれらの優れた特性を
発現させたものであり、可視光に対し透明であり、かつ
疎水性、耐久性を有する。５ｉ０２ 、Ｔ ａ ２０ｓ
、 Ｉ ｎｚ ０３は、１種または２種以上をフッ
素樹脂に混合させて用いる。This embodiment combines the above-mentioned materials to exhibit their excellent properties, and is transparent to visible light, hydrophobic, and durable. 5i02, T a 20s
, Inz 03 is used alone or in combination of two or more in a fluororesin.
複合層中の酸化物の組成は１体積％（以下１体積％をｖ
ｏ１％と表記する）で２５〜７５％の範囲内が望ましい
。７５％以上の場合は耐久性に優れるが疎水性能が落ち
、水の接触角にして９０°以下になる。これに対し、２
５％より酸化物が少ないと耐久性が低下するため疎水性
を長期にわたって維持するのが困難になる。The composition of the oxide in the composite layer is 1% by volume (hereinafter 1% by volume is v)
o1%) is preferably within the range of 25 to 75%. When it is 75% or more, the durability is excellent, but the hydrophobic performance deteriorates, and the contact angle of water becomes 90° or less. On the other hand, 2
When the oxide content is less than 5%, durability decreases and it becomes difficult to maintain hydrophobicity over a long period of time.
複合層の厚さは０，０５〜２μｍの範囲が好ましく、２
μｍを越えると引っ張り応力により剥離を生じやすい。The thickness of the composite layer is preferably in the range of 0.05 to 2 μm;
If it exceeds μm, peeling is likely to occur due to tensile stress.
逆に０．０５μｍより薄いと耐久性が悪くなる。On the other hand, if it is thinner than 0.05 μm, durability will deteriorate.
本実施態様における複合層は物理的蒸着法（ＰＶＤ）に
よって形成する。The composite layer in this embodiment is formed by physical vapor deposition (PVD).
ＰＶＤにはスパッタ法、蒸着法、イオンブレーティング
法などがある。このうちスパッタ法が２００°Ｃ以下で
処理でき１層中の組成の制御が容易でかつ形成された層
が緻密であるので最も望ましい。まず、被処理材である
可視光透過性基板をアルコールなどで脱脂した後、真空
処理室内にセラ）Ｌ３Ｘ１０−５Ｔｏ ｒ ｒ以下まで
真空排気する。PVD includes a sputtering method, a vapor deposition method, an ion blating method, and the like. Among these, the sputtering method is the most preferred because it can be processed at 200° C. or lower, the composition in one layer can be easily controlled, and the formed layer is dense. First, a visible light transmitting substrate, which is a material to be processed, is degreased with alcohol or the like, and then the vacuum processing chamber is evacuated to a temperature below L3X10-5 Torr.
次にＡｒを導入し、３〜５Ｘ１０−３Ｔｏ ｒ ｒの雰
囲気中で基板表面にＲＦイオンエツチングを施す。Next, Ar is introduced and RF ion etching is performed on the substrate surface in an atmosphere of 3 to 5×10 −3 Torr.
エツチング条件は投入電力３０〜１００Ｗ、５〜３０分
程度程度えば十分である。この工程は重要であり、基板
表面を活性化し、複合層の密着性を向上させる。イオン
エツチング後、ＲＦ同時スパッタ法によりフッ素樹脂と
酸化物を部材表面に被覆する。この時使用するフッ素樹
脂および酸化物のターゲットは純度９９．９％程度の市
販品でよい。As for the etching conditions, an input power of 30 to 100 W for about 5 to 30 minutes is sufficient. This step is important because it activates the substrate surface and improves the adhesion of the composite layer. After ion etching, the surface of the member is coated with fluororesin and oxide by RF simultaneous sputtering. The fluororesin and oxide targets used at this time may be commercially available products with a purity of about 99.9%.
スパッタリング条件は２通常の表面処理で用いられる条
件、マグネトロンタイプでは３〜５×１０−’Ｔ ｏ
ｒ ｒ台のＡｒ雰囲気中で両ターゲットとも２００Ｗま
での投入電力、二極タイプでは２〜４Ｘ １０−２Ｔｏ
ｒ ｒ台のＡｒ中で同様の投入電力で行う。The sputtering conditions are 2 conditions used in normal surface treatment, and 3 to 5 x 10-'T o for magnetron type.
Input power up to 200W for both targets in an Ar atmosphere of r r, 2 to 4X 10-2To for bipolar type
The test was carried out in Ar of the order of r with the same input power.
（実施例）
実施例１
ソーダ石灰ガラス基板上にＲＦマグネトロンスパッタに
よって５ｉＯ７とＰＴＦＥからなる複合層を形成し、そ
の疎水性能を調べた。(Examples) Example 1 A composite layer consisting of 5iO7 and PTFE was formed on a soda lime glass substrate by RF magnetron sputtering, and its hydrophobic performance was investigated.
まず基板表面をアルコールで脱脂し、真空処理室内に配
置した。該室内をｌＸｌ０−５Ｔｏｒｒまで排気した後
、Ａｒを導入して５Ｘ１０−３Ｔｏｒｒとし、５０Ｗの
電力を５分間投入しマツチングを行った。基板表面はＡ
ｒイオンの衝撃によって。First, the surface of the substrate was degreased with alcohol and placed in a vacuum processing chamber. After the chamber was evacuated to 1X10-5 Torr, Ar was introduced to bring the temperature to 5X10-3 Torr, and a power of 50 W was applied for 5 minutes to perform matching. The substrate surface is A
by r-ion bombardment.
清浄化された。次に、酸化物としてＳｉＯ□、フッ素樹
脂としてＰＴＦＥをそれぞれターゲットに用いて、該タ
ーゲットをＡｒイオンによってスパッタし、基板上に複
合層を形成した。スパッタは４、ｌＸ１０−３Ｔｏ ｒ
ｒのＡｒ雰囲気中で各ターゲットに０〜１８０Ｗの電
力を投入して３０〜３００分行った。各ターゲットに印
加する電力を変えることにより複合層中のＳｉＯ□の量
を３０〜７０ｖｏ１％と変化させ、またスパッタ時間を
変えて複合層の厚さを変えた。このように作製した複合
層の疎水性能を水の接触角を測定することにより評価し
た。Cleaned. Next, using SiO□ as the oxide and PTFE as the fluororesin as targets, the targets were sputtered with Ar ions to form a composite layer on the substrate. Sputtering is 4,1X10-3 Tor
Power of 0 to 180 W was applied to each target in an Ar atmosphere of 30 to 300 minutes. The amount of SiO□ in the composite layer was varied from 30 to 70 vol% by changing the power applied to each target, and the thickness of the composite layer was varied by varying the sputtering time. The hydrophobic performance of the composite layer thus prepared was evaluated by measuring the contact angle of water.
また、疎水性能の耐久性を調べるために耐熱試験および
布ふきテストを実施した。In addition, a heat resistance test and a cloth wiping test were conducted to examine the durability of hydrophobic performance.
耐熱試験は１００°Ｃの大気雰囲気炉中に１時間放置す
ることにより、また、布ふきテストは複合層表面に５０
０ｇの荷重で布を押しつけ１０００回繰り返し摺動する
ことにより評価した。第１表に本実施例で評価した複合
層の組成、Ｎの厚さならびに初期の接触角および耐久性
試験後の接触角を示す。また、同時に比較例として複合
層中のＳｉＯ２の量を２０ｖｏ１％以下および８０ｖｏ
１％以上とした場合も付記しである。The heat resistance test was carried out by leaving it in an atmospheric oven at 100°C for 1 hour, and the cloth wiping test was carried out by applying 50% to the surface of the composite layer.
The evaluation was made by pressing the cloth with a load of 0 g and sliding it repeatedly 1000 times. Table 1 shows the composition, N thickness, initial contact angle, and contact angle after the durability test of the composite layer evaluated in this example. At the same time, as a comparative example, the amount of SiO2 in the composite layer was set to 20vo 1% or less and 80vo
An additional note is also provided when the amount is 1% or more.
第１表から明らかなごとく本実施例に係る複合層は、初
期および耐熱試験後において優れた疎水性能を示し、布
ふき試験後においても良好な疎水性能を有する。一方、
比較例として示したＳｉＯ２の体積％が７５％より多い
場合には、耐久性は良いが疎水性能抱く悪（，５ｉｎ２
が２５体積％より少ない場合には、初期疎水性能は良い
が耐久性が劣っていることが確かめられた。As is clear from Table 1, the composite layer according to this example exhibits excellent hydrophobic performance both initially and after the heat resistance test, and also has good hydrophobic performance after the cloth wiping test. on the other hand,
When the volume % of SiO2 shown as a comparative example is more than 75%, the durability is good but the hydrophobic performance is poor (5in2
It was confirmed that when the amount was less than 25% by volume, the initial hydrophobic performance was good but the durability was poor.
実施例２
透明アクリル基板上に酸化物としてＴａｔＯｓまたはＩ
ｎ、 Ｏｚ 、フッ素樹脂としてＰＴＦＥ。Example 2 TatOs or I as an oxide on a transparent acrylic substrate
n, Oz, PTFE as fluororesin.
ＰＶＤＦまたはＰＦＡを用いた複合層をＲＦマグネトロ
ンスパッタによって実施例１とほぼ同様の条件で形成し
、その疎水性能を調べた。疎水性能および耐久性は実施
例１と同様に評価した。また比較例として酸化物にＴｉ
０２ 、Ａｎｔ ＯｓまたはＺｎＯを用いた場合につ
いても評価した。第２表に複合層の組成２層の厚さなら
びに初期の接触角および耐久試験後の接触角を示した。A composite layer using PVDF or PFA was formed by RF magnetron sputtering under substantially the same conditions as in Example 1, and its hydrophobic performance was examined. Hydrophobic performance and durability were evaluated in the same manner as in Example 1. In addition, as a comparative example, Ti
02, Ant Os or ZnO were also evaluated. Table 2 shows the composition of the composite layer, the thickness of the two layers, the initial contact angle, and the contact angle after the durability test.
第２表から明らかなごとく１本実施例に係る複合層は優
れた疎水性およびその耐久性を有する。As is clear from Table 2, the composite layer according to this example has excellent hydrophobicity and durability.
一方、比較例において用いた酸化物は特に耐久試験後の
疎水性が劣っていた。On the other hand, the oxide used in the comparative example had poor hydrophobicity especially after the durability test.
Claims (4)
、厚さが５μｍ以下で可視光透過性を有するフッ素樹脂
と可視光透過性を有する酸化物とからなる複合層を有す
ることを特徴とする疎水性光学部材。(1) On a visible light transparent substrate, there is a composite layer with a water contact angle of 90 degrees or more and a thickness of 5 μm or less, consisting of a fluororesin that is transparent to visible light and an oxide that is transparent to visible light. A hydrophobic optical member characterized by:
Ｅ）、テトラフルオロチレン−ヘキサフルオロプロピレ
ン共重合体（ＦＥＰ）、テトラフルオロエチレン−パー
フルオロアルキルビニルエーテル共重合体（ＰＦＡ）、
ポリフッ化ビニリデン（ＰＶＤＦ）またはポリクロロト
リフルオロエチレン（ＰＣＴＦＥ）の１種または２種以
上である特許請求の範囲第（１）項記載の疎水性光学部
材。(2) Fluororesin is polytetrafluoroethylene (PTF)
E), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA),
The hydrophobic optical member according to claim (1), which is one or more of polyvinylidene fluoride (PVDF) and polychlorotrifluoroethylene (PCTFE).
＿２Ｏ＿３の１種または２種以上である特許請求の範囲
第（１）項記載の疎水性光学部材。(3) The oxide is SiO_2, Ta_2O_5 or In
The hydrophobic optical member according to claim (1), which is one or more of _2O_3.
る特許請求の範囲第（１）項記載の疎水性光学部材。(4) The hydrophobic optical member according to claim (1), wherein the volume proportion of the oxide in the composite layer is 25 to 75%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62270033A JP2628319B2 (en) | 1987-10-26 | 1987-10-26 | Hydrophobic optical member and method for manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62270033A JP2628319B2 (en) | 1987-10-26 | 1987-10-26 | Hydrophobic optical member and method for manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01112218A true JPH01112218A (en) | 1989-04-28 |
| JP2628319B2 JP2628319B2 (en) | 1997-07-09 |
Family
ID=17480596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62270033A Expired - Lifetime JP2628319B2 (en) | 1987-10-26 | 1987-10-26 | Hydrophobic optical member and method for manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2628319B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07333404A (en) * | 1994-02-15 | 1995-12-22 | Dainippon Printing Co Ltd | Optical functional membrane, optical functional film, antidazzle antireflection film, its production, polarizing plate and liquid crystal display device |
| DE102005021087A1 (en) * | 2005-05-06 | 2006-11-09 | Rehau Ag + Co. | Coating, useful for light sources, preferably fluorescent tubes, comprises at least one part-crystalline fluorine polymer and at least one component of an organic- and inorganic UV absorber, where the coat has a specific thickness |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5687001A (en) * | 1979-12-17 | 1981-07-15 | Nippon Kogaku Kk <Nikon> | Formation of fog resistant film |
| JPS6242242A (en) * | 1985-08-20 | 1987-02-24 | Matsushita Electric Ind Co Ltd | Supervisory unit for cpu abnormality |
-
1987
- 1987-10-26 JP JP62270033A patent/JP2628319B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5687001A (en) * | 1979-12-17 | 1981-07-15 | Nippon Kogaku Kk <Nikon> | Formation of fog resistant film |
| JPS6242242A (en) * | 1985-08-20 | 1987-02-24 | Matsushita Electric Ind Co Ltd | Supervisory unit for cpu abnormality |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07333404A (en) * | 1994-02-15 | 1995-12-22 | Dainippon Printing Co Ltd | Optical functional membrane, optical functional film, antidazzle antireflection film, its production, polarizing plate and liquid crystal display device |
| DE102005021087A1 (en) * | 2005-05-06 | 2006-11-09 | Rehau Ag + Co. | Coating, useful for light sources, preferably fluorescent tubes, comprises at least one part-crystalline fluorine polymer and at least one component of an organic- and inorganic UV absorber, where the coat has a specific thickness |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2628319B2 (en) | 1997-07-09 |
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