JPH01107343A - Magneto-optical recording medium - Google Patents
Magneto-optical recording mediumInfo
- Publication number
- JPH01107343A JPH01107343A JP26378287A JP26378287A JPH01107343A JP H01107343 A JPH01107343 A JP H01107343A JP 26378287 A JP26378287 A JP 26378287A JP 26378287 A JP26378287 A JP 26378287A JP H01107343 A JPH01107343 A JP H01107343A
- Authority
- JP
- Japan
- Prior art keywords
- film
- recording
- thickness
- magneto
- recording film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 230000001681 protective effect Effects 0.000 claims description 8
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 8
- 229910052723 transition metal Inorganic materials 0.000 claims description 4
- 150000003624 transition metals Chemical class 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 2
- 150000002910 rare earth metals Chemical class 0.000 claims description 2
- 230000005291 magnetic effect Effects 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 6
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 230000007547 defect Effects 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 239000011347 resin Substances 0.000 abstract description 2
- 229920005989 resin Polymers 0.000 abstract description 2
- 229910017061 Fe Co Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910002546 FeCo Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
【産業上の利用分野〕
本発明はレーザ光の照射により記録、再生、消去を行う
光磁気記録媒体に係り、特に良好な記録再生特性を得る
のに好適な光磁気記録媒体に関する。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a magneto-optical recording medium that performs recording, reproduction, and erasing by irradiation with laser light, and particularly relates to a magneto-optical recording medium suitable for obtaining particularly good recording and reproduction characteristics. Regarding recording media.
光磁気記録媒体の記録膜として、
G d T b F e Co 、 G d T b
F e 。As a recording film of a magneto-optical recording medium, G d T b Fe Co , G d T b
Fe.
DyTbFeCo、NdTbFeCo。DyTbFeCo, NdTbFeCo.
N d D y F e Co等の2種類以上の希土類
元素を含む希土類・遷移金属非晶質膜を用いる例は、特
開昭58−196639号や特開昭60−83305号
に記載がある。これらの記録膜の特徴は、従来のTbF
eやTbFsCo、DyFeCoに第二の希土類元素を
添加して、再生信号の大きさを決定するカー回転角を大
きくしたことである。Examples of using rare earth/transition metal amorphous films containing two or more types of rare earth elements such as NdDyFeCo are described in JP-A-58-196639 and JP-A-60-83305. The characteristics of these recording films are that of conventional TbF
The second rare earth element is added to e, TbFsCo, and DyFeCo to increase the Kerr rotation angle that determines the magnitude of the reproduced signal.
実用に用いられている光磁気ディスクの構成は、ディス
ク基板上に誘電体膜、記録膜および保護膜をこの順で積
層した構成である。この場合、記録膜の膜厚は、約10
00人に設定されている。これは、記録膜の膜厚が10
00Å以上であれば、記録膜の磁気特性に膜厚依存性が
小さく、磁気特性の制御が容易であるからである。また
、記録膜の膜厚を必要以上に厚くすると、著しい記録感
度の低下が生じるからである。The structure of a magneto-optical disk used in practice is such that a dielectric film, a recording film, and a protective film are laminated in this order on a disk substrate. In this case, the thickness of the recording film is approximately 10
It is set to 00 people. This means that the thickness of the recording film is 10
This is because when the thickness is 00 Å or more, the magnetic properties of the recording film have little dependence on the film thickness, and the magnetic properties can be easily controlled. Furthermore, if the thickness of the recording film is made thicker than necessary, the recording sensitivity will be significantly reduced.
一方、光磁気ディスクのもう一つの構成は、ディスク基
板上に、第一の誘電体膜、記録膜、第二の誘電体膜およ
び反射膜をこの順で積層した構成である。この構成にお
いては、再生用レーザ光が記録膜を透過する必要がある
ため、記録膜の膜厚を250Å以上にできない、第二の
構成の例は、日本応用磁気学会誌、第11巻、213ペ
ージ(1987年)に記載がある。On the other hand, another structure of the magneto-optical disk is a structure in which a first dielectric film, a recording film, a second dielectric film, and a reflective film are laminated in this order on a disk substrate. In this configuration, since the reproduction laser beam needs to pass through the recording film, the thickness of the recording film cannot be made more than 250 Å.An example of the second configuration is the Journal of the Japan Society of Applied Magnetics, Vol. It is described in Page (1987).
上記従来技術は、第2の希土類元素を添加することによ
って記録ドメインに形状不良が生じる点について配慮が
されておらず、高いC/N比(信号対雑音比)が得られ
ないという問題があった。The above-mentioned conventional technology does not take into consideration the fact that the addition of the second rare earth element causes shape defects in the recording domain, and there is a problem that a high C/N ratio (signal-to-noise ratio) cannot be obtained. Ta.
すなわち、T b F eやTbFeCo*DyFaC
o記録膜にレーザ光を照射して書き込みを行った記録ド
メインの形状は円形や長円形であるのに対し、G d
T b F e CoやG @ T b F e vD
y T b F e Co 、 G d D y F
e Co 。That is, T b Fe and TbFeCo*DyFaC
o The shape of the recording domain written by irradiating the recording film with laser light is circular or oval, whereas G d
T b F e Co and G @ T b F e vD
y T b F e Co , G d D y F
eCo.
NdTbFeCo、NdDyFeCo等の記録膜上への
記録ドメインはドメインの輪郭に乱れを生じたり、ドメ
インの大きさが不揃いとなる。このような記録ドメイン
の形状不良はノイズレベルの上昇を招き、C/N比低下
の原因となる。When domains are recorded on a recording film such as NdTbFeCo or NdDyFeCo, the contours of the domains are disturbed or the sizes of the domains are irregular. Such a defective shape of the recording domain causes an increase in the noise level and causes a decrease in the C/N ratio.
また、反射膜を有する構造の光磁気ディスクにおいては
、積層する層が増えるため、製造工程が複雑になり経費
がかかるという問題があった。Further, in a magneto-optical disk having a structure having a reflective film, there is a problem that the number of laminated layers increases, which complicates the manufacturing process and increases costs.
本発明の目的は、高カー回転角記録膜において、記録ド
メインの形状不良の発生を防止し、高いC/N比を得る
のに好適でかつ積層構造の簡単な光磁気記録媒体を提供
することにある。An object of the present invention is to provide a magneto-optical recording medium with a simple laminated structure that is suitable for preventing the occurrence of defective shapes of recording domains and obtaining a high C/N ratio in a high Kerr rotation angle recording film. It is in.
上記目的は、透明基板上に誘電体膜、記録膜および保護
膜をこの順に積層して構成した光磁気記録媒体において
、記録膜の膜厚を400Å以上かつ600Å以下とする
ことにより、達成される。The above object is achieved in a magneto-optical recording medium constructed by laminating a dielectric film, a recording film, and a protective film in this order on a transparent substrate, by setting the thickness of the recording film to 400 Å or more and 600 Å or less. .
記録膜の膜厚を600Å以下にすることにより。 By reducing the thickness of the recording film to 600 Å or less.
G d T b F e CoやG d T b F
e 。G d T b F e Co or G d T b F
e.
D y T b F e Co 、 N d T b
F e Co 。D y T b F e Co , N d T b
F e Co .
NdDyFeCo、GdDyFeCo等においても、室
温で6 k Oe以上の大きな保磁力が容易に得られる
。したがってレーザ光の照射による昇温で書き込まれた
記録ドメインの保磁力は室温まで急冷される過程で急激
に増大し、磁壁の移動を防げる。また記録膜の膜厚が6
00Å以下の薄さになると、レーザ光の照射によって記
録膜はまずます急熱、急冷されることなる。この保磁力
の急激な増大と記録膜の急熱、急冷により、記録ドメイ
ンの形状はレーザ光の照射により昇温された領域の温度
分布を反映して円形または長円形となり、輪郭の乱れや
大きさの不揃を生じない。Even in NdDyFeCo, GdDyFeCo, etc., a large coercive force of 6 k Oe or more can be easily obtained at room temperature. Therefore, the coercive force of the recording domain written by temperature rise due to laser beam irradiation increases rapidly during the process of rapid cooling to room temperature, and movement of the domain wall can be prevented. Also, the thickness of the recording film is 6
When the thickness is less than 00 Å, the recording film is rapidly heated and cooled by laser beam irradiation. Due to this rapid increase in coercive force and rapid heating and cooling of the recording film, the shape of the recording domain becomes circular or oval, reflecting the temperature distribution of the area heated by laser beam irradiation, resulting in irregular contours and large Does not cause unevenness.
一方、記録膜の膜厚を400人より小さくすると、記録
膜を透過するレーザ光量が増え、再生信号レベルの低下
が起こり、高いC/N比が得られない。On the other hand, if the thickness of the recording film is made smaller than 400, the amount of laser light transmitted through the recording film will increase, the reproduction signal level will drop, and a high C/N ratio cannot be obtained.
以下、本発明の実施例について詳述する。 Examples of the present invention will be described in detail below.
第1図に示す構成の光磁気ディスクを作製した。A magneto-optical disk having the configuration shown in FIG. 1 was manufactured.
直径13cmの透明樹脂基板1上にマグネトロン高周波
スパッタ法により窒化シリコン膜(誘電体膜)2を85
0人積解した1次に記##膜として同じくマグネトロン
高周波スパッタ法によりG d T b F e Co
膜(記録膜)3を積層した。スパッタガスは純Arガス
、高周波出力は1.5kWである。GdTbFeCo膜
の膜厚はスパッタ時間を調節することにより200人か
ら1200人まで変化させた。さらに保護膜として窒化
シリコン膜(保護膜)4を1500人積層した。85 silicon nitride films (dielectric films) 2 are formed on a transparent resin substrate 1 with a diameter of 13 cm by magnetron high frequency sputtering.
G d T b Fe Co
A film (recording film) 3 was laminated. The sputtering gas was pure Ar gas, and the high frequency output was 1.5 kW. The thickness of the GdTbFeCo film was varied from 200 to 1200 by adjusting the sputtering time. Further, 1,500 silicon nitride films (protective films) 4 were laminated as a protective film.
第2図に記録膜の膜厚を変えて作製した上述のディスク
の記録再生特性を記録膜の膜厚に対して示す。記録膜の
組成はいずれも
gdisTtz+Feseco7CfM子%)であった
。記録再生条件は、記録レーザ出カフmW、記録磁界4
000 e 、記録周波数I M Hz 、ディスク回
転数180 Or p m +再生レーザ出力1.5m
Wである。FIG. 2 shows the recording and reproducing characteristics of the above-mentioned disks manufactured by changing the thickness of the recording film with respect to the thickness of the recording film. The composition of each recording film was gdisTtz+Feseco7CfM%). The recording and reproducing conditions are: recording laser output cuff mW, recording magnetic field 4
000 e, recording frequency I MHz, disk rotation speed 180 Or p m + reproduction laser output 1.5 m
It is W.
第2図に示すように、ノイズレベルは記録膜の膜厚を6
00Å以下にすることにより一60dBmまで下がった
。一方、キャリアレベルは、記録膜の膜厚を薄くすると
、ディスクの記録感度が上がるため上昇するが、400
人より小さくすると、急激に減少する。これは主に、レ
ーザ光の透過成分が増加し、反射光量が減少するための
である。As shown in Figure 2, the noise level is determined by increasing the thickness of the recording film by 6
By lowering it to 00 Å or less, it was reduced to -60 dBm. On the other hand, when the thickness of the recording film is reduced, the carrier level increases because the recording sensitivity of the disc increases, but at 400
If you make it smaller than a person, it will decrease rapidly. This is mainly because the transmitted component of the laser beam increases and the amount of reflected light decreases.
記録膜の膜厚が400Å以上、600Å以下の範囲で6
0dB以上の高いC/N比が得られた。6 when the thickness of the recording film is in the range of 400 Å or more and 600 Å or less
A high C/N ratio of 0 dB or more was obtained.
第3図に上述のディスクの保磁力と反射率を記録膜の膜
厚に対して示す、保磁力は、記録膜の膜厚が薄いほど大
きくし、600Å以下では、10k Oe以上であった
。反射率は膜厚が400人より小さくなると急激に減少
した。FIG. 3 shows the coercive force and reflectance of the above-mentioned disk with respect to the thickness of the recording film. The coercive force increases as the thickness of the recording film becomes thinner, and was 10 k Oe or more at 600 Å or less. The reflectance decreased rapidly when the film thickness became less than 400 mm.
第4図に記録膜の膜厚が600人のディスクと1000
人のディスクについて、記録ドメインの形状を示す、6
00人のディスクでは円形の記録ドメインであったが、
1000人のディスクでは。Figure 4 shows that the thickness of the recording film is 600mm and 1000mm.
Showing the shape of the recording domain for a human disk, 6
00 people's disc had a circular recording domain, but
In the disk of 1000 people.
記録ドメインの輪郭に凹凸が生じた。また1000人の
ディスクでは記録ドメインの大きさが一定でなく、0.
6μmから0.9μIn の幅でばらつきがあった。こ
のような記録ドメインの輪郭の乱れや大きさの不揃いが
ノイズレベルの上昇の原因であると考えられる。一方、
T b F e Co膜を記録膜に用いた光磁気ディス
クでは、膜厚が1000Å以上であっても、記録ドメイ
ンは円形または長円形であり、輪郭の乱れはなく、大き
さも一定であった。また第2図に示すような膜厚の増加
によるノイズレベルの上昇もほとんど観察されなかった
。Unevenness occurred in the contour of the recording domain. Also, in a disk with 1000 people, the size of the recording domain is not constant, and 0.
The width varied from 6 μm to 0.9 μIn. It is thought that such disturbances in the contours and irregularities in size of the recording domains are the cause of the increase in the noise level. on the other hand,
In a magneto-optical disk using a T b Fe Co film as a recording film, even when the film thickness was 1000 Å or more, the recording domain was circular or oval, had no disturbance in outline, and had a constant size. Further, almost no increase in noise level due to increase in film thickness as shown in FIG. 2 was observed.
第5図に記録膜としてG d T b F e Co
。In FIG. 5, G d T b Fe Co is used as a recording film.
.
G d T b F e 、 D y T b F e
Co 。G d T b F e , D y T b F e
Co.
N d T b F e Coを用いた光磁気ディスク
において得られたC/N比を記録膜の膜厚に対して示す
。The C/N ratio obtained in a magneto-optical disk using N d T b Fe Co is shown with respect to the film thickness of the recording film.
記録再生条件は前述の条件と同じである。記録膜の組成
はそれぞれ、Cdz8TbeFeaeCo7tGdzo
TbzISF8711.DyzaTbaFeeacog
。The recording and reproducing conditions are the same as those described above. The composition of each recording film is Cdz8TbeFeaeCo7tGdzo.
TbzISF8711. DyzaTbaFeeacog
.
NdeTbzaFeesco7(原子%)であった。い
ずれの記録膜の場合も、記録膜の膜厚が400Å以上、
600Å以下の範囲で高いC/N比が得られた。NdeTbzaFeesco7 (atomic %). In any case, the thickness of the recording film is 400 Å or more,
A high C/N ratio was obtained in the range of 600 Å or less.
本実施例では希土類と遷移金属を組み合せた記 ・録膜
の場合についてだけ述べたが、耐食性を向上させる等の
目的で、これにAQやTi1Pt*Nb、P、B等の他
の元素を添加した記録膜についても同様の効果がある。In this example, we have only described the case of a recording film that combines rare earth elements and transition metals, but other elements such as AQ, Ti1Pt*Nb, P, and B are added to this for the purpose of improving corrosion resistance. A similar effect can be obtained with a recording film made by using the same method.
また誘電体膜や保護膜は窒化シリコン膜に必らず、酸化
シリコン膜や硫化亜鉛膜のような他の透電体膜を用いて
も同様である。さらに、例えば金属膜と誘電体膜を組み
合せたような、多層構造の保護膜も用いることが可能で
ある。Further, the dielectric film or the protective film is not necessarily a silicon nitride film, and other conductive films such as a silicon oxide film or a zinc sulfide film may also be used. Furthermore, it is also possible to use a protective film with a multilayer structure, such as a combination of a metal film and a dielectric film.
また、以上の実施例では光変調方式の光磁気記録を行っ
た場合の記録再生特性について述べたが、磁界変調方式
の光磁気記録においても全く同様であった。すなわち、
記録膜に6mWの連続レーザ光を照射しながら±300
0 eの高周波磁界を印加したところ、第5図と同様の
C/Nが得られた。Furthermore, in the above embodiments, the recording and reproducing characteristics were described when magneto-optical recording was performed using an optical modulation method, but the same was true for magneto-optical recording using a magnetic field modulation method. That is,
±300 while irradiating the recording film with 6 mW continuous laser light.
When a high frequency magnetic field of 0 e was applied, a C/N similar to that shown in FIG. 5 was obtained.
本発明によれば、光磁気ディスクのノイズレベルの上昇
を防ぐことができるので、高いC/N比が得られるとい
う効果がある。According to the present invention, it is possible to prevent an increase in the noise level of the magneto-optical disk, so there is an effect that a high C/N ratio can be obtained.
第1図は本発明の一実施例の光磁気ディスクの一部分を
示す断面図、第2図はG d T b F’ e C。
記録膜の膜厚と再生出力の関係を示す図、第3図はG
d T b F e Co記録膜の膜厚と保磁力および
反射率の関係を示す図、第4図はGdTbFeCo記録
膜の記録ドメインの形状を示す図、第5図は本発明の一
実施例になる光磁気ディスクの記録膜の膜厚とC/N比
の関係を示す図である。
l・・・透明基板、2・・・誘電体膜、3・・・記録膜
、4・・・保護膜。
第 l 圀
第 2 口
3°゛紀銖喚
4・・イ未虐11繰
Gct Tb Fe Co R14−(、# )記偵U
阪の嗅4(ぺ)FIG. 1 is a sectional view showing a part of a magneto-optical disk according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view showing a part of a magneto-optical disk according to an embodiment of the present invention. A diagram showing the relationship between recording film thickness and reproduction output, Figure 3 is G.
d T b A diagram showing the relationship between the film thickness, coercive force, and reflectance of the FeCo recording film, FIG. 4 is a diagram showing the shape of the recording domain of the GdTbFeCo recording film, and FIG. FIG. 3 is a diagram showing the relationship between the film thickness of a recording film and the C/N ratio of a magneto-optical disk. 1... Transparent substrate, 2... Dielectric film, 3... Recording film, 4... Protective film. No. 1, No. 2, 3°゛Discipline 4...I brutality 11 times Gct Tb Fe Co R14-(, #) Reporter U
Han's smell 4 (pe)
Claims (1)
順に積層して構成した光磁気記録媒体において、記録膜
の膜厚を400Å以上かつ600Å以下にしたことを特
徴とする光磁気記録媒体。 2、特許請求の範囲第1項記載において、前記記録膜と
して少なくとも2種類以上の希土類元素を含む希土類・
遷移金属を主体とした非晶質膜を用いたことを特徴とす
る光磁気記録媒体。 3、特許請求の範囲第2項記載において、前記希土類・
遷移金属を主体とした非晶質膜が、 GdTbFeCo、GdTbFe、 DyTbFeCo、GdDyFeCo、 NdTbFeCo、NdDyFeCoのいずれかを主体
とした膜であることを特徴とする光磁気記録媒体。[Claims] 1. In a magneto-optical recording medium constructed by laminating a dielectric film, a recording film, and a protective film in this order on a transparent substrate, the thickness of the recording film is set to be 400 Å or more and 600 Å or less. Features of magneto-optical recording media. 2. In claim 1, the recording film includes a rare earth element containing at least two or more kinds of rare earth elements.
A magneto-optical recording medium characterized by using an amorphous film mainly composed of transition metals. 3. In claim 2, the rare earth
A magneto-optical recording medium characterized in that the amorphous film mainly composed of a transition metal is a film mainly composed of any one of GdTbFeCo, GdTbFe, DyTbFeCo, GdDyFeCo, NdTbFeCo, and NdDyFeCo.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26378287A JPH01107343A (en) | 1987-10-21 | 1987-10-21 | Magneto-optical recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26378287A JPH01107343A (en) | 1987-10-21 | 1987-10-21 | Magneto-optical recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01107343A true JPH01107343A (en) | 1989-04-25 |
Family
ID=17394195
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26378287A Pending JPH01107343A (en) | 1987-10-21 | 1987-10-21 | Magneto-optical recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01107343A (en) |
-
1987
- 1987-10-21 JP JP26378287A patent/JPH01107343A/en active Pending
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