JPH01104034U - - Google Patents
Info
- Publication number
- JPH01104034U JPH01104034U JP19757387U JP19757387U JPH01104034U JP H01104034 U JPH01104034 U JP H01104034U JP 19757387 U JP19757387 U JP 19757387U JP 19757387 U JP19757387 U JP 19757387U JP H01104034 U JPH01104034 U JP H01104034U
- Authority
- JP
- Japan
- Prior art keywords
- pitch
- wafer
- holder
- groove
- explanatory diagrams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 4
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
Description
第１図は本考案によるウエーハ・ホールダの平
面図、第２図はその一部切断立面図、第３図、第
４図及び第５図はウエーハ・ホールダの動作説明
図、第６Ａ図、第６Ｂ図及び第６Ｃ図はピツチ切
替動作の説明図、第７図及び第８図は移載機の説
明図、第９図及び第１０図は移送ボートの説明図
である。
１……ウエーハ・ホールダ、２，３……挾持腕
、４……溝、５……支承突部、６，８……ロツド
、７，９……連結部材、１０……ウエーハ、１１
……ばね、１２……案内ロツド、１３，１４……
挿通孔、１５……軸、１６……モータ、１７……
カム、１８……カム・フオロア、３０……移載機
、３１……カセツト、３２……移載位置、３３…
…押上機、４０……ホールダ駆動装置、５０……
移送ボート、５１……横部材、５２……側杆、５
３……溝。
FIG. 1 is a plan view of the wafer holder according to the present invention, FIG. 2 is a partially cutaway elevational view thereof, FIGS. 3, 4, and 5 are explanatory diagrams of the operation of the wafer holder, and FIG. 6A. 6B and 6C are explanatory diagrams of the pitch switching operation, FIGS. 7 and 8 are explanatory diagrams of the transfer machine, and FIGS. 9 and 10 are explanatory diagrams of the transfer boat. DESCRIPTION OF SYMBOLS 1... Wafer holder, 2, 3... Clamping arm, 4... Groove, 5... Support protrusion, 6, 8... Rod, 7, 9... Connecting member, 10... Wafer, 11
... Spring, 12 ... Guide rod, 13, 14 ...
Insertion hole, 15... shaft, 16... motor, 17...
Cam, 18...Cam follower, 30...Transfer machine, 31...Cassette, 32...Transfer position, 33...
...Pushing machine, 40...Holder drive device, 50...
Transfer boat, 51... Horizontal member, 52... Side rod, 5
3...Groove.
Claims (1)
た直線状溝のうちピツチｎＰ（ｎは自然数）ごと
の溝の下端部分にウエーハが保持される支承突部
を設けてなるピツチ切替用ウエーハ・ホールダ。 A pitch switching wafer comprising a linear groove formed with a pitch P on the opposing surfaces of a pair of movable clamping arms, and a supporting protrusion for holding the wafer provided at the lower end of the groove for every pitch nP (n is a natural number).・Holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19757387U JPH0225236Y2 (en) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19757387U JPH0225236Y2 (en) | 1987-12-28 | 1987-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01104034U true JPH01104034U (en) | 1989-07-13 |
| JPH0225236Y2 JPH0225236Y2 (en) | 1990-07-11 |
Family
ID=31488119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19757387U Expired JPH0225236Y2 (en) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0225236Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06163500A (en) * | 1992-11-26 | 1994-06-10 | Sugai:Kk | Method and apparatus for cleaning wafer |
-
1987
- 1987-12-28 JP JP19757387U patent/JPH0225236Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06163500A (en) * | 1992-11-26 | 1994-06-10 | Sugai:Kk | Method and apparatus for cleaning wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0225236Y2 (en) | 1990-07-11 |
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