JPH01102841U - - Google Patents
Info
- Publication number
- JPH01102841U JPH01102841U JP19751287U JP19751287U JPH01102841U JP H01102841 U JPH01102841 U JP H01102841U JP 19751287 U JP19751287 U JP 19751287U JP 19751287 U JP19751287 U JP 19751287U JP H01102841 U JPH01102841 U JP H01102841U
- Authority
- JP
- Japan
- Prior art keywords
- bottom plate
- fixed
- movable electrode
- metal
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987197512U JPH064305Y2 (ja) | 1987-12-28 | 1987-12-28 | 小型水圧センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987197512U JPH064305Y2 (ja) | 1987-12-28 | 1987-12-28 | 小型水圧センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01102841U true JPH01102841U (US06589383-20030708-C00041.png) | 1989-07-11 |
JPH064305Y2 JPH064305Y2 (ja) | 1994-02-02 |
Family
ID=31488059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987197512U Expired - Lifetime JPH064305Y2 (ja) | 1987-12-28 | 1987-12-28 | 小型水圧センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH064305Y2 (US06589383-20030708-C00041.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000321161A (ja) * | 1999-05-14 | 2000-11-24 | Anelva Corp | 静電容量型真空センサ |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4921077U (US06589383-20030708-C00041.png) * | 1972-05-27 | 1974-02-22 | ||
JPS52150887A (en) * | 1976-06-09 | 1977-12-14 | Toshiba Mach Co Ltd | Indexing device for tooth cutting machine |
JPS56148870A (en) * | 1980-04-21 | 1981-11-18 | Toshiba Corp | Semiconductor presssure converter |
JPS59171826A (ja) * | 1983-03-22 | 1984-09-28 | Copal Takeda Medical Kenkyusho:Kk | 静電容量型圧力センサ−の温度補償装置 |
JPS61128138A (ja) * | 1984-11-27 | 1986-06-16 | Matsushita Electric Ind Co Ltd | 湿度センサ |
-
1987
- 1987-12-28 JP JP1987197512U patent/JPH064305Y2/ja not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4921077U (US06589383-20030708-C00041.png) * | 1972-05-27 | 1974-02-22 | ||
JPS52150887A (en) * | 1976-06-09 | 1977-12-14 | Toshiba Mach Co Ltd | Indexing device for tooth cutting machine |
JPS56148870A (en) * | 1980-04-21 | 1981-11-18 | Toshiba Corp | Semiconductor presssure converter |
JPS59171826A (ja) * | 1983-03-22 | 1984-09-28 | Copal Takeda Medical Kenkyusho:Kk | 静電容量型圧力センサ−の温度補償装置 |
JPS61128138A (ja) * | 1984-11-27 | 1986-06-16 | Matsushita Electric Ind Co Ltd | 湿度センサ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000321161A (ja) * | 1999-05-14 | 2000-11-24 | Anelva Corp | 静電容量型真空センサ |
Also Published As
Publication number | Publication date |
---|---|
JPH064305Y2 (ja) | 1994-02-02 |