JPH01102736U - - Google Patents

Info

Publication number
JPH01102736U
JPH01102736U JP19840687U JP19840687U JPH01102736U JP H01102736 U JPH01102736 U JP H01102736U JP 19840687 U JP19840687 U JP 19840687U JP 19840687 U JP19840687 U JP 19840687U JP H01102736 U JPH01102736 U JP H01102736U
Authority
JP
Japan
Prior art keywords
diaphragm
piezoelectric resonator
pressure sensor
strain
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19840687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19840687U priority Critical patent/JPH01102736U/ja
Publication of JPH01102736U publication Critical patent/JPH01102736U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP19840687U 1987-12-25 1987-12-25 Pending JPH01102736U (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19840687U JPH01102736U (US06272168-20010807-M00014.png) 1987-12-25 1987-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19840687U JPH01102736U (US06272168-20010807-M00014.png) 1987-12-25 1987-12-25

Publications (1)

Publication Number Publication Date
JPH01102736U true JPH01102736U (US06272168-20010807-M00014.png) 1989-07-11

Family

ID=31488918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19840687U Pending JPH01102736U (US06272168-20010807-M00014.png) 1987-12-25 1987-12-25

Country Status (1)

Country Link
JP (1) JPH01102736U (US06272168-20010807-M00014.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007327922A (ja) * 2006-06-09 2007-12-20 Epson Toyocom Corp 圧力センサ用ダイヤフラム、及び圧力センサ
JP2008070241A (ja) * 2006-09-14 2008-03-27 Epson Toyocom Corp 圧力センサ、及びその製造方法
JP2010019826A (ja) * 2008-03-25 2010-01-28 Epson Toyocom Corp 圧力センサ
CN101819079A (zh) * 2009-02-26 2010-09-01 爱普生拓优科梦株式会社 压力传感器元件以及压力传感器
WO2012063477A1 (ja) * 2010-11-10 2012-05-18 パナソニック株式会社 圧力センサ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007327922A (ja) * 2006-06-09 2007-12-20 Epson Toyocom Corp 圧力センサ用ダイヤフラム、及び圧力センサ
JP2008070241A (ja) * 2006-09-14 2008-03-27 Epson Toyocom Corp 圧力センサ、及びその製造方法
JP2010019826A (ja) * 2008-03-25 2010-01-28 Epson Toyocom Corp 圧力センサ
CN101819079A (zh) * 2009-02-26 2010-09-01 爱普生拓优科梦株式会社 压力传感器元件以及压力传感器
JP2010197298A (ja) * 2009-02-26 2010-09-09 Epson Toyocom Corp 圧力センサー素子、圧力センサー
WO2012063477A1 (ja) * 2010-11-10 2012-05-18 パナソニック株式会社 圧力センサ

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