JPH01100510A - Optical element for scanning optical system - Google Patents
Optical element for scanning optical systemInfo
- Publication number
- JPH01100510A JPH01100510A JP25779787A JP25779787A JPH01100510A JP H01100510 A JPH01100510 A JP H01100510A JP 25779787 A JP25779787 A JP 25779787A JP 25779787 A JP25779787 A JP 25779787A JP H01100510 A JPH01100510 A JP H01100510A
- Authority
- JP
- Japan
- Prior art keywords
- optical element
- optical
- film
- scanning
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 70
- 239000010408 film Substances 0.000 claims abstract description 44
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000004033 plastic Substances 0.000 claims abstract description 15
- 229920003023 plastic Polymers 0.000 claims abstract description 15
- 239000010409 thin film Substances 0.000 claims abstract description 11
- 230000001681 protective effect Effects 0.000 claims description 18
- 238000006116 polymerization reaction Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 14
- 229910052731 fluorine Inorganic materials 0.000 claims description 5
- 239000011737 fluorine Substances 0.000 claims description 5
- 229920000642 polymer Polymers 0.000 claims description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 230000003449 preventive effect Effects 0.000 abstract 1
- 230000007613 environmental effect Effects 0.000 description 6
- 239000004793 Polystyrene Substances 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000004811 fluoropolymer Substances 0.000 description 2
- 229920002313 fluoropolymer Polymers 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229920001893 acrylonitrile styrene Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002221 fluorine Chemical class 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明はレーザプリンタ等の画像形成装置に用いられる
走査光学系の光学素子に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical element of a scanning optical system used in an image forming apparatus such as a laser printer.
[従来の技術〕
従来より、レーザプリンタ等の走査光学系の光学素子を
、安価に製造可能な、アクリルに代表されるプラスチッ
ク材で形成することが提案されている。かかるプラスチ
ック製の光学素子を用いることにより、光学部品加工を
低コストで、精度よく行なうことができ、比較的容易に
量産化を図ることが可能である。しかしながらアクリル
、ポリスチレン等のプラスチック材料は、ガラスに比べ
温度や湿度等の環境条件の変化によってその光学特性が
変動するといった問題があった。[Prior Art] Conventionally, it has been proposed to form optical elements of scanning optical systems such as laser printers from plastic materials, such as acrylic, which can be manufactured at low cost. By using such plastic optical elements, optical parts can be processed at low cost and with high precision, and mass production can be achieved relatively easily. However, compared to glass, plastic materials such as acrylic and polystyrene have a problem in that their optical properties fluctuate due to changes in environmental conditions such as temperature and humidity.
この課題に対し、例えば特開昭57−144501号公
報には、プラスチック材で形成されたレンズ素子の光線
不透過部に防湿処理を施すことにより、水分の吸収を遮
断するようにした技術が開示されている。To address this issue, for example, Japanese Patent Application Laid-Open No. 144501/1983 discloses a technique that blocks moisture absorption by applying moisture-proofing treatment to the light-opaque portion of a lens element made of a plastic material. has been done.
[発明が解決しようとする問題点コ
前述の特開昭57−144501@公報の場合には、レ
ンズ素子の光線不透過部のみに防湿処理を施したもので
あり、光線透過部の環境変化対策に関しては何も示唆さ
れていない。すなわち吸湿性で環境湿度の影響をじかに
うけやすいプラスチック材で形成されたレンズ素子につ
いての環境への対応において、単に防湿効果にとどまら
ず、光学性能も同時に向上させる技術の開発が要望され
ている。[Problems to be Solved by the Invention] In the case of the above-mentioned Japanese Patent Application Laid-Open No. 57-144501, moisture-proofing treatment is applied only to the light-opaque portion of the lens element, and this is a countermeasure against environmental changes in the light-transmitting portion. Nothing is suggested about it. In other words, in response to the environmental concerns of lens elements made of plastic materials that are hygroscopic and easily affected by environmental humidity, there is a need for the development of technology that not only improves moisture-proofing effects but also improves optical performance at the same time.
本発明は、かかる要望に対応すべく案出されたもので、
あり、防湿用保護膜としての機能と光学薄膜としての性
能を併せもつような防湿処理を施した走査光学系の光学
素子を提供することを目的とするものである。The present invention was devised to meet such demands, and
The object of the present invention is to provide an optical element of a scanning optical system that is subjected to a moisture-proof treatment that has both the function of a moisture-proof protective film and the performance of an optical thin film.
E問題点を解決するための手段]
本発明の走査光学系の光学素子は、プラスチック材で形
成された光学素子本体と、前記光学素子本体の全表面に
形成され、光線透過部では防湿膜と光学薄膜としての性
質を併せもつ保護膜とからなる事を併せ有するものであ
る。Means for Solving Problem E] The optical element of the scanning optical system of the present invention includes an optical element main body formed of a plastic material, and a moisture-proof film formed on the entire surface of the optical element main body, and a moisture-proof film in the light transmitting part. It also consists of a protective film that also has properties as an optical thin film.
[作用コ
本発明の走査光学系の光学素子では、該光学素子の本体
をアクリル等の吸湿性プラスチック材で形成し、コバ面
を含むその全表面に保護膜を施す。[Function] In the optical element of the scanning optical system of the present invention, the main body of the optical element is formed of a hygroscopic plastic material such as acrylic, and a protective film is applied to the entire surface including the edge surface.
該保護膜は、光学素子の光線不透過部では防湿膜として
機能し、光線透過部では防湿膜として、かつ光学薄膜(
主として反射防止1!J)としても機能する。The protective film functions as a moisture-proof film in the light-opaque part of the optical element, and functions as a moisture-proof film in the light-transmissive part, and also functions as an optical thin film (
Mainly anti-reflection 1! It also functions as J).
[実施例]
以下、本発明の走査光学系の光学素子の一実施例を図面
に基づいて説明する。[Example] Hereinafter, an example of the optical element of the scanning optical system of the present invention will be described based on the drawings.
本発明の走査光学系の光学素子を適用したレーザプリン
タの走査光学系の要部構成図を第1図に示す。本発明の
走査光学系の光学素子を短冊状の複数枚の走査レンズと
して具体化した外観斜視図を第2図に示す。短冊状の走
査レンズの光線の通過を説明する正面図を第3図に、短
冊状の走査レンズの光線の通過を説明する側面図を第4
図にそれぞれ示す。又プラズマ重合膜作製装置の一例を
第5図に示す。FIG. 1 shows a configuration diagram of the main parts of a scanning optical system of a laser printer to which the optical element of the scanning optical system of the present invention is applied. FIG. 2 shows an external perspective view of an embodiment of the optical element of the scanning optical system of the present invention as a plurality of strip-shaped scanning lenses. FIG. 3 is a front view illustrating the passage of light rays through the strip-shaped scanning lens, and FIG. 4 is a side view illustrating the passage of light rays through the strip-shaped scanning lens.
Each is shown in the figure. FIG. 5 shows an example of a plasma polymerized film manufacturing apparatus.
本実施例に係る走査光学系の光学素子は吸湿性のあるプ
ラスチック材でできた走査レンズユニット1の本体部分
を構成する走査レンズ本体10.20.30 (光学素
子本体〉と、この走査レンズ本体10,20,30の全
表面に形成された保護膜11.21.31とからなって
いる。走査レンズ本体10.20.30は第2図に示す
ように、具体的には3枚構成で、短冊状の形状を有し、
素材として光学特性の良いポリメチルメタアクリレート
(以下PMMAという)樹脂を用いて製作した。この素
材については、アクリル樹脂以外にポリカーボネイト(
以下PCという)、ポリスチレン(以下PSという)、
ポリスチレン・アクリロニトリル・スチレン樹脂(以下
PS−ASという)等の吸湿性をもつプラスチックを使
用することが出来る。The optical elements of the scanning optical system according to this embodiment include a scanning lens body 10, 20, 30 (optical element body) that constitutes the main body portion of the scanning lens unit 1 made of a hygroscopic plastic material, and the scanning lens body It consists of protective films 11, 21, and 31 formed on the entire surfaces of lenses 10, 20, and 30.The scanning lens body 10, 20, and 30 is specifically composed of three lenses as shown in FIG. , has a rectangular shape,
It was manufactured using polymethyl methacrylate (hereinafter referred to as PMMA) resin, which has good optical properties. In addition to acrylic resin, polycarbonate (
(hereinafter referred to as PC), polystyrene (hereinafter referred to as PS),
A hygroscopic plastic such as polystyrene-acrylonitrile-styrene resin (hereinafter referred to as PS-AS) can be used.
走査レンズ本体10,20.30(光学素子本体)は第
2図、第3図、及び第4図に示すように[レンズ表面1
2.22.32]は、[コバ面13.23.33」と、
「レンズサイド部の光線不透過部14.24.34」と
、[光線透過部15、25.35」とからなっている。The scanning lens bodies 10, 20, 30 (optical element bodies) are shown in FIGS. 2, 3, and 4.
2.22.32] is [Edge surface 13.23.33],
It consists of "light opaque parts 14, 24, and 34 of the lens side part" and "light transmitting parts 15, 25.35".
一般に短冊状走査レンズは、通常の円形レンズに比べF
コバ面13.23.33」が大きな面積を占め、この「
コバ面13.23.33」が環境湿度に対し大きな影響
をうけやすいことが知られている。In general, a strip-shaped scanning lens has an F
The edge surface 13.23.33" occupies a large area, and this "
It is known that the edge surface 13.23.33 is easily affected by environmental humidity.
なお、第2.3.4図に示す如く本明細書において、「
レンズ表面12.22.32」とはレンズ形状をなす物
体の全表面を意味し、[コバ面13.23.33」とは
前記「レンズ表面12.22.32」において実際に光
線が通過屈折し、面精度や面の平滑度に特に留意して研
磨あるいは成形がなされた面と、この面の延長であり、
同様の曲率を有するが光線は通過しない部分を除いた部
分を意味する。「光線不透過部14.24.34」とは
前記光線を通過しない部分と[コバ面13.23.33
」を合わせた面を意味する。「光線透過部15.25.
35」とは第3.4図で斜線で示された領域を意味し、
「レンズ表面12.22.32」において、実際に光線
が通過屈折する部分を意味する。In addition, as shown in FIG. 2.3.4, in this specification, "
"Lens surface 12.22.32" means the entire surface of a lens-shaped object, and "edge surface 13.23.33" means the area where light rays actually pass through and are refracted at the "lens surface 12.22.32". However, it is a surface that has been polished or formed with special attention to surface accuracy and surface smoothness, and an extension of this surface.
It means a part that has a similar curvature but excludes the part through which light rays do not pass. “Light opaque portion 14.24.34” refers to the portion that does not transmit the light rays and [edge surface 13.23.33
” means the combined side. “Light transmission section 15.25.
35" means the area indicated by diagonal lines in Figure 3.4,
"Lens surface 12.22.32" means the part through which light rays actually pass and are refracted.
保護膜11.21.31は、「レンズ表面12.22.
32」を環境湿度に対応することができるようにするた
め施された薄膜である。この薄膜形成にあたり、本実施
例では、プラズマ重合法を利用した。プラズマ重合法実
施のためM5図、第6図に模式的に示すプラズマ重合膜
作成装置40を用いた。この装置40は、放電用電極5
4を有する反応容器50、重合用ガス供給系51、排気
系52、放電用電源53から構成されている。第6図は
、第5図に示した装置40に組込まれる電極系60を拡
大して示すものである。The protective film 11.21.31 is applied to the "lens surface 12.22.
32" is a thin film applied to make it compatible with environmental humidity. In this example, a plasma polymerization method was used to form this thin film. To carry out the plasma polymerization method, a plasma polymerized film forming apparatus 40 schematically shown in Fig. M5 and Fig. 6 was used. This device 40 includes a discharge electrode 5
4, a polymerization gas supply system 51, an exhaust system 52, and a discharge power source 53. FIG. 6 shows an enlarged view of the electrode system 60 incorporated into the device 40 shown in FIG.
ここで、プラズマ重合法について説明することにする。Here, the plasma polymerization method will be explained.
プラズマ重合法の場合の放電形成は、非平衡プラズマと
なるグロー放電であるところから、グロー放電重合法と
も呼ばれている。このプラズマ重合法はモノマ(!11
量体)ガスまたは、その混合ガスをグロー放電によって
活性化し、その重合膜を基板上に生成させる。Since the discharge formation in the plasma polymerization method is a glow discharge resulting in non-equilibrium plasma, it is also called the glow discharge polymerization method. This plasma polymerization method uses monomers (!11
A polymeric gas or a mixture thereof is activated by glow discharge to form a polymer film on the substrate.
プラズマ重合法に用いる膜生成材料は種々のものがある
が、本実施例の光学素子においては、耐候性、耐湿性に
すぐれたフッ素系ポリマーを材料として使用した。但し
、使用する材料についてはこのフッ素系ポリマーに限る
ものではない。There are various film forming materials used in the plasma polymerization method, but in the optical element of this example, a fluoropolymer having excellent weather resistance and moisture resistance was used as the material. However, the material used is not limited to this fluorine-based polymer.
プラズマ重合法による保護膜11.21.31の生成過
程における放電周波数は最も広(使用されている13.
56MHzを使用した。The discharge frequency in the process of forming the protective film 11.21.31 by the plasma polymerization method is the widest (13.
56MHz was used.
プラズマ重合は、反応容器、放電方式が決められると、
ガス流量、ガス圧力、放電周波数および放電電力(又は
放電電流)をパラメータとして行われる。各パラメータ
は反応容器50(第5図参照)の容積や重合膜の特性に
適合するように決める。このように前記プラズマ重合膜
作成装@40内の反応容器50の中へ走査レンズ本体1
0.20.30を順次挿入し所定位置に設置した後、放
電周波数、ガス圧力、ガス流量を適宜設定した。For plasma polymerization, once the reaction vessel and discharge method are decided,
This is performed using the gas flow rate, gas pressure, discharge frequency, and discharge power (or discharge current) as parameters. Each parameter is determined to suit the volume of the reaction vessel 50 (see FIG. 5) and the characteristics of the polymer film. In this way, the scanning lens body 1 is inserted into the reaction container 50 in the plasma polymerized film forming apparatus @40.
0.20.30 were sequentially inserted and installed at predetermined positions, the discharge frequency, gas pressure, and gas flow rate were appropriately set.
フッ素ポリマーを材料として重合反応を発生させ、走査
レンズ本体10,20.30の各レンズの「レンズ表面
12.22.32」に膜厚1/4λ、屈折率1.38の
低屈折率の保護膜11.21、31を形成した。A polymerization reaction is generated using fluoropolymer as a material, and a low refractive index protection with a film thickness of 1/4λ and a refractive index of 1.38 is applied to the "lens surface 12, 22, 32" of each lens of the scanning lens body 10, 20, 30. Films 11.21 and 31 were formed.
以上のように短冊状の走査レンズ本体10.20.30
の「レンズ表面12.22.32」にプラズマ重合処理
によって付与された保護膜11.21.31は、全体と
して「レンズ表面12.22.32」に対して防湿膜と
して機能し、前記「光線透過部15.25.35Jでは
膜厚は使用波長(λ=780nm)の1/4λであり、
光の反射を防止し、透視性能を向上させることが出来、
こうして防湿膜としての作用に加えて反射防止膜として
の機能を併せもつ短冊状の走査レンズ本体10.20.
30が作製される。As mentioned above, the strip-shaped scanning lens body 10.20.30
The protective film 11.21.31 applied by plasma polymerization to the "lens surface 12.22.32" functions as a moisture-proof film for the "lens surface 12.22.32" as a whole, and In the transmission part 15.25.35J, the film thickness is 1/4λ of the wavelength used (λ=780nm),
It can prevent light reflection and improve see-through performance.
In this way, the strip-shaped scanning lens body 10.20. has the function of not only a moisture-proof film but also an anti-reflection film.
30 are produced.
なお、保護膜11.21.31の生成はプラズマ重合法
に限らず、例えばスピン塗布法、浸漬法等を利用しても
よい。Note that the generation of the protective film 11, 21, 31 is not limited to the plasma polymerization method, and for example, a spin coating method, a dipping method, or the like may be used.
上記のように走査レンズ本体10,20,3Qの全表面
に保護膜11.21.31を付与された走査レンズの集
合体である走査レンズユニット1は、第1図に示すよう
にレーザ光源2、ポリゴンミラ−601感光体4により
構成される走査光学系の光学素子として、組入れられ、
使用される。As shown in FIG. , incorporated as an optical element of a scanning optical system constituted by the polygon mirror 601 photoreceptor 4,
used.
更に、本発明による走査光学系の光学素子は、短冊状の
走査レンズ本体10,20,30に限定されず、面倒れ
補正用のトロイダルレンズやシリンドリカルレンズ、更
にはプラスチック材を本体とする偏向器60(ポリゴン
ミラー)等もその抱括範囲としている。Furthermore, the optical elements of the scanning optical system according to the present invention are not limited to the strip-shaped scanning lens bodies 10, 20, and 30, but also include toroidal lenses and cylindrical lenses for surface tilt correction, and furthermore, deflectors whose bodies are made of plastic material. 60 (polygon mirror), etc. are also included in the scope.
偏向器60(ポリゴンミラー)の場合、本体6Qa、反
射面60bに金属薄膜を形成し、その上に、更に保護膜
60Cを形成することになる。この保護膜60cについ
ては、短冊状の走査レンズ本体10,20,30と同様
フッ素系ポリマーを用いてプラズマ重合法によって生成
し、高い防湿性を得る。In the case of the deflector 60 (polygon mirror), a metal thin film is formed on the main body 6Qa and the reflective surface 60b, and a protective film 60C is further formed thereon. This protective film 60c is produced by plasma polymerization using a fluorine-based polymer, similar to the strip-shaped scanning lens bodies 10, 20, and 30, and has high moisture resistance.
フッ素系ポリマーを保護膜60cに使用することにより
偏向器60(ポリゴンミラー)の輸送中あるいは夜間、
急激な温度や湿度変化を受けても、フッ素系ポリマーが
プラスチック本体に充分追従し、クラックや亀裂の発生
を防止する。By using a fluorine-based polymer for the protective film 60c, the deflector 60 (polygon mirror) can be easily transported during transportation or at night.
The fluorine-based polymer sufficiently follows the plastic body even when subjected to sudden changes in temperature and humidity, preventing the occurrence of cracks and fissures.
[発明の効果J
本発明の走査光学系の光学素子によれば、吸湿性をもつ
プラスチック材からなる光学素子の本体の全表面に光学
薄膜としての特性と防湿膜としての特性とを併せ有する
保護膜が形成される。従って光学素子のうちの光線透過
部では、保護膜は防湿膜と光学薄膜との機能を併せもち
、光線不透過部では防湿膜として作用する。[Effect of the invention J] According to the optical element of the scanning optical system of the present invention, the entire surface of the main body of the optical element made of a hygroscopic plastic material is protected by having both the characteristics of an optical thin film and the characteristics of a moisture-proof film. A film is formed. Therefore, in the light-transmitting portion of the optical element, the protective film has both the functions of a moisture-proof film and an optical thin film, and in the light-impermeable portion, it acts as a moisture-proof film.
第1図は本発明の光学素子を含む走査光学系の要部構成
図である。第2図は本発明の光学素子を短冊状走査レン
ズとして具体化した外観斜視図である。第3図は同上走
査レンズの光線の通過を説明する正面図であり、第4図
は同上側面図である。
1・・・走査レンズユニット(光学素子)10.20.
30
・・・走査レンズ本体(光学素子本体)11.21.3
1・・・保護膜
12.22.32・・・レンズ表面
13,23,33・・・コバ面
14.24.34・・・光線不透過部
15.25.35・・・光線透過部
特許出願人 ミノルタカメラ株式会社代理人
弁理士 大川 宏
第2図FIG. 1 is a diagram showing the main part of a scanning optical system including the optical element of the present invention. FIG. 2 is an external perspective view of the optical element of the present invention embodied as a strip-shaped scanning lens. FIG. 3 is a front view for explaining the passage of light rays through the scanning lens, and FIG. 4 is a side view of the same. 1... Scanning lens unit (optical element) 10.20.
30... Scanning lens body (optical element body) 11.21.3
1...Protective film 12.22.32...Lens surface 13, 23, 33...Edge surface 14.24.34...Light opaque part 15.25.35...Light transparent part Patent Applicant Minolta Camera Co., Ltd. Agent
Patent Attorney Hiroshi OkawaFigure 2
Claims (4)
素子本体と、 前記光学素子本体の全表面に形成され、光線透過部では
防湿膜と光学薄膜としての性質を併せもつ保護膜とから
なる事を特徴とする走査光学系の光学素子。(1) Consisting of an optical element body made of a hygroscopic plastic material, and a protective film that is formed on the entire surface of the optical element body and has the properties of a moisture-proof film and an optical thin film in the light-transmitting part. An optical element for a scanning optical system characterized by:
の範囲第1項記載の走査光学系の光学素子。(2) The optical element of the scanning optical system according to claim 1, wherein the protective film is made of a fluorine-based polymer.
ある特許請求の範囲第1項記載の走査光学系の光学素子
。(3) The optical element of the scanning optical system according to claim 1, wherein the protective film is formed by a plasma polymerization method.
、反射防止効果を併せ有する特許請求の範囲第1項記載
の走査光学系の光学素子。(4) The optical element of the scanning optical system according to claim 1, wherein the thickness of the protective film is 1/4λ of the wavelength used, and also has an antireflection effect.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25779787A JPH01100510A (en) | 1987-10-13 | 1987-10-13 | Optical element for scanning optical system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25779787A JPH01100510A (en) | 1987-10-13 | 1987-10-13 | Optical element for scanning optical system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01100510A true JPH01100510A (en) | 1989-04-18 |
Family
ID=17311240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25779787A Pending JPH01100510A (en) | 1987-10-13 | 1987-10-13 | Optical element for scanning optical system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01100510A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0580155A2 (en) * | 1992-07-23 | 1994-01-26 | Kabushiki Kaisha TOPCON | A scanning optical apparatus |
JP2003021547A (en) * | 2001-07-09 | 2003-01-24 | Denso Corp | Thin film sensor and flow sensor and its manufacturing method |
JP2005173326A (en) * | 2003-12-12 | 2005-06-30 | Fuji Photo Film Co Ltd | Plastic optical component |
US7230769B2 (en) * | 2003-01-16 | 2007-06-12 | Lexmark International, Inc. | Humidity tolerant scan lens |
-
1987
- 1987-10-13 JP JP25779787A patent/JPH01100510A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0580155A2 (en) * | 1992-07-23 | 1994-01-26 | Kabushiki Kaisha TOPCON | A scanning optical apparatus |
EP0580155A3 (en) * | 1992-07-23 | 1994-04-06 | Topcon Corp | |
US5506718A (en) * | 1992-07-23 | 1996-04-09 | Kabushiki Kaisha Topcon | Scanning optical apparatus |
JP2003021547A (en) * | 2001-07-09 | 2003-01-24 | Denso Corp | Thin film sensor and flow sensor and its manufacturing method |
US7230769B2 (en) * | 2003-01-16 | 2007-06-12 | Lexmark International, Inc. | Humidity tolerant scan lens |
JP2005173326A (en) * | 2003-12-12 | 2005-06-30 | Fuji Photo Film Co Ltd | Plastic optical component |
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