JP7852632B2 - 分解洗浄組成物及びその製造方法、並びに接着性ポリマーの洗浄方法 - Google Patents

分解洗浄組成物及びその製造方法、並びに接着性ポリマーの洗浄方法

Info

Publication number
JP7852632B2
JP7852632B2 JP2023522582A JP2023522582A JP7852632B2 JP 7852632 B2 JP7852632 B2 JP 7852632B2 JP 2023522582 A JP2023522582 A JP 2023522582A JP 2023522582 A JP2023522582 A JP 2023522582A JP 7852632 B2 JP7852632 B2 JP 7852632B2
Authority
JP
Japan
Prior art keywords
cleaning composition
decomposition
compound
mass
formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023522582A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022244593A1 (https=
Inventor
晋 中崎
邦明 宮原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
Resonac Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Showa Denko Materials Co Ltd, Resonac Corp filed Critical Hitachi Chemical Co Ltd
Publication of JPWO2022244593A1 publication Critical patent/JPWO2022244593A1/ja
Application granted granted Critical
Publication of JP7852632B2 publication Critical patent/JP7852632B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5036—Azeotropic mixtures containing halogenated solvents
    • C11D7/5068—Mixtures of halogenated and non-halogenated solvents
    • C11D7/5095—Mixtures including solvents containing other heteroatoms than oxygen, e.g. nitriles, amides, nitroalkanes, siloxanes or thioethers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/28—Organic compounds containing halogen
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5013—Organic solvents containing nitrogen
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5036—Azeotropic mixtures containing halogenated solvents
    • C11D7/5068—Mixtures of halogenated and non-halogenated solvents
    • C11D7/5077—Mixtures of only oxygen-containing solvents
    • C11D7/5086—Mixtures of only oxygen-containing solvents the oxygen-containing solvents being different from alcohols, e.g. mixtures of water and ethers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/20—Cleaning during device manufacture

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • Detergent Compositions (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP2023522582A 2021-05-21 2022-04-21 分解洗浄組成物及びその製造方法、並びに接着性ポリマーの洗浄方法 Active JP7852632B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021086082 2021-05-21
JP2021086082 2021-05-21
PCT/JP2022/018477 WO2022244593A1 (ja) 2021-05-21 2022-04-21 分解洗浄組成物及びその製造方法、並びに接着性ポリマーの洗浄方法

Publications (2)

Publication Number Publication Date
JPWO2022244593A1 JPWO2022244593A1 (https=) 2022-11-24
JP7852632B2 true JP7852632B2 (ja) 2026-04-28

Family

ID=84141319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023522582A Active JP7852632B2 (ja) 2021-05-21 2022-04-21 分解洗浄組成物及びその製造方法、並びに接着性ポリマーの洗浄方法

Country Status (4)

Country Link
JP (1) JP7852632B2 (https=)
KR (1) KR20230129500A (https=)
TW (1) TWI824513B (https=)
WO (1) WO2022244593A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020080060A1 (ja) 2018-10-16 2020-04-23 昭和電工株式会社 組成物、接着性ポリマーの洗浄方法、デバイスウェハの製造方法、及び支持ウェハの再生方法
WO2020148968A1 (ja) 2019-01-15 2020-07-23 昭和電工株式会社 分解洗浄組成物、接着性ポリマーの洗浄方法、及びデバイスウェハの製造方法
WO2020166702A1 (ja) 2019-02-15 2020-08-20 日産化学株式会社 洗浄剤組成物及び洗浄方法
WO2021039274A1 (ja) 2019-08-27 2021-03-04 昭和電工株式会社 組成物、及び接着性ポリマーの洗浄方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020080060A1 (ja) 2018-10-16 2020-04-23 昭和電工株式会社 組成物、接着性ポリマーの洗浄方法、デバイスウェハの製造方法、及び支持ウェハの再生方法
WO2020148968A1 (ja) 2019-01-15 2020-07-23 昭和電工株式会社 分解洗浄組成物、接着性ポリマーの洗浄方法、及びデバイスウェハの製造方法
WO2020166702A1 (ja) 2019-02-15 2020-08-20 日産化学株式会社 洗浄剤組成物及び洗浄方法
WO2021039274A1 (ja) 2019-08-27 2021-03-04 昭和電工株式会社 組成物、及び接着性ポリマーの洗浄方法

Also Published As

Publication number Publication date
TWI824513B (zh) 2023-12-01
JPWO2022244593A1 (https=) 2022-11-24
WO2022244593A1 (ja) 2022-11-24
KR20230129500A (ko) 2023-09-08
TW202313947A (zh) 2023-04-01

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