JP7718606B2 - 圧電振動素子 - Google Patents

圧電振動素子

Info

Publication number
JP7718606B2
JP7718606B2 JP2024555027A JP2024555027A JP7718606B2 JP 7718606 B2 JP7718606 B2 JP 7718606B2 JP 2024555027 A JP2024555027 A JP 2024555027A JP 2024555027 A JP2024555027 A JP 2024555027A JP 7718606 B2 JP7718606 B2 JP 7718606B2
Authority
JP
Japan
Prior art keywords
excitation electrode
outer edge
edge portion
velocity region
acoustic velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024555027A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2025017976A5 (https=
JPWO2025017976A1 (https=
Inventor
大樹 村内
俊雄 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2025017976A1 publication Critical patent/JPWO2025017976A1/ja
Publication of JPWO2025017976A5 publication Critical patent/JPWO2025017976A5/ja
Application granted granted Critical
Publication of JP7718606B2 publication Critical patent/JP7718606B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2024555027A 2023-07-19 2024-04-01 圧電振動素子 Active JP7718606B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023117392 2023-07-19
JP2023117392 2023-07-19
PCT/JP2024/013407 WO2025017976A1 (ja) 2023-07-19 2024-04-01 圧電振動素子

Publications (3)

Publication Number Publication Date
JPWO2025017976A1 JPWO2025017976A1 (https=) 2025-01-23
JPWO2025017976A5 JPWO2025017976A5 (https=) 2025-06-24
JP7718606B2 true JP7718606B2 (ja) 2025-08-05

Family

ID=94282028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024555027A Active JP7718606B2 (ja) 2023-07-19 2024-04-01 圧電振動素子

Country Status (4)

Country Link
US (1) US20250183873A1 (https=)
JP (1) JP7718606B2 (https=)
CN (1) CN119836747A (https=)
WO (1) WO2025017976A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021112214A1 (ja) 2019-12-06 2021-06-10 株式会社村田製作所 弾性波装置
WO2022080426A1 (ja) 2020-10-13 2022-04-21 株式会社村田製作所 水晶振動素子および水晶振動子
JP2022153702A (ja) 2021-03-30 2022-10-13 株式会社大真空 圧電フィルタ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH031710A (ja) * 1989-05-30 1991-01-08 Kinseki Ltd 圧電振動子
WO1998038736A1 (en) * 1997-02-26 1998-09-03 Toyo Communication Equipment Co., Ltd. Piezoelectric vibrator and method for manufacturing the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021112214A1 (ja) 2019-12-06 2021-06-10 株式会社村田製作所 弾性波装置
WO2022080426A1 (ja) 2020-10-13 2022-04-21 株式会社村田製作所 水晶振動素子および水晶振動子
JP2022153702A (ja) 2021-03-30 2022-10-13 株式会社大真空 圧電フィルタ

Also Published As

Publication number Publication date
US20250183873A1 (en) 2025-06-05
WO2025017976A1 (ja) 2025-01-23
CN119836747A (zh) 2025-04-15
JPWO2025017976A1 (https=) 2025-01-23

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