JP7623738B2 - 液滴センサー、結露検出装置およびそれらの製造方法 - Google Patents
液滴センサー、結露検出装置およびそれらの製造方法 Download PDFInfo
- Publication number
- JP7623738B2 JP7623738B2 JP2023531962A JP2023531962A JP7623738B2 JP 7623738 B2 JP7623738 B2 JP 7623738B2 JP 2023531962 A JP2023531962 A JP 2023531962A JP 2023531962 A JP2023531962 A JP 2023531962A JP 7623738 B2 JP7623738 B2 JP 7623738B2
- Authority
- JP
- Japan
- Prior art keywords
- platinum
- metal
- thin wire
- electrode
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/4035—Combination of a single ion-sensing electrode and a single reference electrode
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/164—Coating processes; Apparatus therefor using electric, electrostatic or magnetic means; powder coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021108423 | 2021-06-30 | ||
| JP2021108423 | 2021-06-30 | ||
| PCT/JP2022/025639 WO2023276982A1 (ja) | 2021-06-30 | 2022-06-28 | 液滴センサー、結露検出装置およびそれらの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023276982A1 JPWO2023276982A1 (https=) | 2023-01-05 |
| JPWO2023276982A5 JPWO2023276982A5 (https=) | 2024-02-20 |
| JP7623738B2 true JP7623738B2 (ja) | 2025-01-29 |
Family
ID=84689910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023531962A Active JP7623738B2 (ja) | 2021-06-30 | 2022-06-28 | 液滴センサー、結露検出装置およびそれらの製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20240295515A1 (https=) |
| EP (1) | EP4365583A4 (https=) |
| JP (1) | JP7623738B2 (https=) |
| WO (1) | WO2023276982A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7624042B1 (ja) | 2023-09-08 | 2025-01-29 | 藤倉コンポジット株式会社 | センサ及び複数のセンサを同時に製造する製造方法 |
| WO2025063276A1 (ja) * | 2023-09-22 | 2025-03-27 | 国立研究開発法人物質・材料研究機構 | 酢酸ガス濃度測定装置、その使用方法、および酢酸ガス濃度の測定方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100134948A1 (en) | 2008-11-14 | 2010-06-03 | Postech Academy-Industry Foundation | Humidity sensor having anodic aluminum oxide layer, and fabricating method thereof |
| WO2016013544A1 (ja) | 2014-07-23 | 2016-01-28 | 国立研究開発法人物質・材料研究機構 | 高速応答・高感度乾湿応答センサー |
| US20190041349A1 (en) | 2016-02-18 | 2019-02-07 | Ams Ag | Sensor arrangement and method for generating measurement signals |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009002802A (ja) * | 2007-06-21 | 2009-01-08 | Denso Corp | 被水センサおよび結露センサ |
-
2022
- 2022-06-28 US US18/573,066 patent/US20240295515A1/en active Pending
- 2022-06-28 WO PCT/JP2022/025639 patent/WO2023276982A1/ja not_active Ceased
- 2022-06-28 EP EP22833129.4A patent/EP4365583A4/en active Pending
- 2022-06-28 JP JP2023531962A patent/JP7623738B2/ja active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100134948A1 (en) | 2008-11-14 | 2010-06-03 | Postech Academy-Industry Foundation | Humidity sensor having anodic aluminum oxide layer, and fabricating method thereof |
| WO2016013544A1 (ja) | 2014-07-23 | 2016-01-28 | 国立研究開発法人物質・材料研究機構 | 高速応答・高感度乾湿応答センサー |
| US20190041349A1 (en) | 2016-02-18 | 2019-02-07 | Ams Ag | Sensor arrangement and method for generating measurement signals |
Non-Patent Citations (1)
| Title |
|---|
| SHRESTHA Rekha Goswami et al.,Enhancement of Electrochemical Reaction Rate on Galvanic Arrays in Contact with Condensed Water Mole,Journal of The Electrochemical Society,The Electrochemical Society,2020年11月30日,Vol.167,167510 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20240295515A1 (en) | 2024-09-05 |
| WO2023276982A1 (ja) | 2023-01-05 |
| EP4365583A4 (en) | 2025-06-11 |
| JPWO2023276982A1 (https=) | 2023-01-05 |
| EP4365583A1 (en) | 2024-05-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7623738B2 (ja) | 液滴センサー、結露検出装置およびそれらの製造方法 | |
| EP3173778B1 (en) | Dryness/wetness response sensor having high-speed response and high sensitivity | |
| US8052854B1 (en) | Carbon dioxide gas sensors and method of manufacturing and using same | |
| US8702962B1 (en) | Carbon dioxide gas sensors and method of manufacturing and using same | |
| US20170131252A1 (en) | Micro heater, micro sensor and micro sensor manufacturing method | |
| EP1434048A1 (en) | CAPACITIVE HUMIDITY−SENSOR AND CAPACITIVE HUMIDITY−SENSOR MANUFACTURING METHOD | |
| EP3677904B1 (en) | Hygroscopic sensor | |
| JP4452244B2 (ja) | ガスセンサ素子およびガスセンサ素子の製造方法 | |
| EP1953539B1 (en) | Gas sensor | |
| US7208327B2 (en) | Metal oxide sensors and method of forming | |
| EP3584571A1 (en) | Method and system for preventing dew formation and light scattering associated with dew formation | |
| KR102616701B1 (ko) | 가스센서 및 이의 제조 방법 | |
| WO2000074082A1 (en) | Resistive hydrogen sensing element | |
| US11788901B2 (en) | High-sensitivity temperature sensor and method of manufacturing the same | |
| CN107132497B (zh) | 用于无损检测半导体薄膜霍尔效应的基片及其制备方法 | |
| JP2001004579A (ja) | 容量式感湿素子 | |
| CN223377247U (zh) | 一种基于微加工技术的半导体气体传感器 | |
| TW202605352A (zh) | 氣體濃度測定裝置及被測定氣體中之被檢測對象氣體濃度之測定方法 | |
| JPH04250353A (ja) | pH値測定装置 | |
| JP2009002802A (ja) | 被水センサおよび結露センサ | |
| WO2025239394A1 (ja) | ガス濃度測定デバイス及び被測定ガス中の被検出対象ガス濃度の測定方法 | |
| CN100412517C (zh) | 感测氢气的方法和装置 | |
| KR100773025B1 (ko) | 반도체식 가스센서, 그 구동방법 및 제조방법 | |
| TW202605353A (zh) | 氣體濃度測定裝置及被測定氣體中之被檢測對象氣體濃度之測定方法 | |
| JP2024002478A (ja) | 半導体式のガスセンサ |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20231117 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20231117 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20241224 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20250109 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7623738 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |