JP7491637B1 - Dust removal equipment - Google Patents

Abstract

A dust removal device and an adhesive tape renewal method capable of detecting an end of an adhesive tape to be renewed with high accuracy. The dust removal device (10) includes a tape end detection mechanism (80), which has a holding frame (84), an end detection sensor (88) for detecting an end of the outermost adhesive tape (T1), a motor (85), an end detection roller (87) to which a driving force is applied from the motor (85), and a lifting cylinder (82) for moving the end detection roller (87) toward and away from the outermost adhesive tape (T1), and when a control unit (90) determines that it is time to renew the outermost adhesive tape (T1), it operates the lifting cylinder (82) to press the end detection roller (87) against the outermost adhesive tape (T1), and in this pressed state, it operates the motor (85) to rotate the adhesive tape roll (T1R) via the end detection roller (87), and in this rotating state, the end detection sensor (88) detects the end of the outermost adhesive tape (T1).

Description

The present invention relates to a dust removal device for removing dust adhering to a workpiece and a method for renewing adhesive tape.

Dust removal devices are used to remove dust that has adhered to various workpieces such as printed circuit boards and semiconductor substrates. This dust removal device is equipped with an adhesive roll that contacts the workpiece and an adhesive tape roll that contacts the adhesive roll, and the dust that has adhered to the adhesive roll is transferred to the adhesive tape.

However, when the adhesive tape is peeled off manually by an operator, there is a risk that dust from the operator may get in and adhere to the workpiece. For this reason, for example, Patent Document 1 discloses a dust removal device (10) equipped with a take-up cartridge (100) that stores an adhesive tape roll (T1R). In this dust removal device (10), a peeling tape (T2) wound around a peeling roller (222) is pressed against the outermost adhesive tape (T1) of the adhesive tape roll (T1R) by the biasing force of a spring member (232).

JP 2022-015968 A

Incidentally, Patent Document 1 discloses a method for setting up the dust removal device (10), such as holding the peeling tape roll (T2R) (holding process) and attaching the tip side of the peeling tape (T2) to the winding tube 200 (attaching process). However, Patent Document 1 does not disclose anything about how to accurately detect the end (step) of the outermost adhesive tape (T1).

Furthermore, Patent Document 1 does not disclose, including the mechanism, how each part of the peeling tape (T2) is specifically driven and controlled relative to the adhesive tape (T1) to be replaced (peeled off).

The present invention has been made in consideration of the above circumstances, and aims to provide a dust removal device and an adhesive tape renewal method that can accurately detect the end of an adhesive tape to be renewed. Preferably, the present invention aims to provide a dust removal device and an adhesive tape renewal method that can perform an operation to satisfactorily peel off the adhesive tape to be renewed from the adhesive tape roll.

[1] In order to solve the above problems, according to a first aspect of the present invention, there is provided a dust removal device for removing dust from a workpiece, comprising a dust removal roller for adsorbing dust adhering to the surface of the workpiece, an adhesive tape holder for transferring the dust adhering to the dust removal roller and for holding an adhesive tape roll on which an adhesive tape having slits at predetermined intervals is wound, a tape end detection mechanism for detecting the end of the outermost adhesive tape on the adhesive tape roll, and a control unit for controlling the operation of the tape end detection mechanism, the tape end detection mechanism comprising a holding frame, an end detection sensor attached to the holding frame and ... attached to the holding frame. the control unit, when determining that it is time to update the outermost adhesive tape, operates the roller lifting cylinder to press the end detection roller against the outermost adhesive tape, and while in this pressed state, operates the detection motor to rotate the adhesive tape roll via the end detection roller, and while in this rotating state, the end detection sensor detects the end of the outermost adhesive tape.

[2] Another aspect of the present invention is that in the invention [1] above, the detection motor may be a stepping motor.

[3] Another aspect of the present invention is a winding cartridge including, in the invention of [2] above, a winding tube for winding up used adhesive tape, a peeling tape holding tube for holding a peeling tape roll around which a peeling tape is wound for peeling the outermost adhesive tape from the adhesive tape roll, and a peeling roller for pressing the peeling tape pulled out from the peeling tape roll against the adhesive tape roll, a winding motor for providing a driving force for rotating the winding tube, and a cartridge elevating mechanism for raising and lowering the winding cartridge, and when an end of the outermost adhesive tape is detected by the end detection sensor, the control unit stops driving the detection motor after positioning the end at a standby position a predetermined distance away from the end, and after the peeling tape is stopped, the cartridge lifting mechanism is operated to press the peeling tape against the outermost adhesive tape via the peeling roller, and after the peeling tape is pressed, the roller lifting cylinder is operated to move the end detection roller pressed against the outermost adhesive tape in a direction away from the adhesive tape, and after this movement, the take-up motor is driven to rotate the adhesive tape roll to an excess position where the peeling tape pressed against the peeling roller exceeds the end of the outermost adhesive tape, and after the peeling tape has passed the excess position, while continuing to operate the take-up motor, the cartridge lifting mechanism is operated to move the take-up cartridge towards a position away from the adhesive tape roll, thereby performing a renewal operation to peel off the adhesive tape.

[4] Another aspect of the present invention is that in the invention of [3] above, when the peeling tape is pressed against the outermost adhesive tape by operation of the cartridge lifting mechanism to peel the outermost adhesive tape from the adhesive tape roll, the invention further includes a peeling start detection sensor that detects the leading edge of the feed of the adhesive tape, and a peeling end detection sensor that detects the end of the feed direction of the adhesive tape being fed together with the peeling tape towards the winding tube, and when the take-up cartridge is being moved towards a position away from the adhesive tape roll, the control unit determines that a normal peeling operation is being performed when the peeling start detection sensor detects the leading edge of the adhesive tape in the feed direction, and controls the take-up motor to continue driving, and stops rotation of the take-up motor after the peeling end detection sensor detects the trailing end of the feed of the adhesive tape.

[5] Furthermore, another aspect of the present invention is that in the above-mentioned invention [3] or [4], when the dust removal roller, the adhesive tape holder, and the tape end detection mechanism constitute one clean unit, a plurality of clean units may be provided, and the control unit may control the renewal operation of any one of the plurality of clean units to be performed at a different timing relative to the renewal operation of the other clean units.

[6] In order to solve the above problem, according to a second aspect of the present invention, there is provided a method for renewing an adhesive tape to which dust transferred from a dust removal roller that adsorbs dust on the surface of a workpiece is transferred and which is wound with a gap at every predetermined length, the end of the outermost adhesive tape being detected by a tape end detection mechanism, the tape end detection mechanism including a holding frame, an end detection sensor attached to the holding frame and for detecting the end of the outermost adhesive tape in the adhesive tape roll around which the adhesive tape is wound, a detection motor attached to the holding frame, and a tape end detection mechanism rotatably held by the holding frame, which is provided with a driving force from the detection motor and detects the outermost adhesive tape end of the tape roll. The adhesive tape renewal method includes an end detection roller that rotates while in contact with the end of the adhesive tape, and a roller lifting cylinder that moves the end detection roller toward and away from the outermost adhesive tape, and when the time to renew the outermost adhesive tape arrives, the method executes the following steps: a roller pressing step of operating the roller lifting cylinder to press the end detection roller against the outermost adhesive tape; a rotation step of operating a detection motor while the end detection roller is pressed against the outermost adhesive tape, to rotate the adhesive tape roll around which the adhesive tape is wound, via the end detection roller; and a detection step of an end detection sensor that detects the end of the outermost adhesive tape while the adhesive tape roll is rotating.

The present invention provides a dust removal device and an adhesive tape renewal method that can accurately detect the end of the adhesive tape to be renewed.

1 is a side view showing in a transparent manner a partial configuration of a dust removal device according to a first embodiment of the present invention; FIG. 2 is a diagram showing a schematic configuration of the dust removal device shown in FIG. 1 . 2 is a perspective view showing a configuration of a take-up cartridge housed in the dust removal device shown in FIG. 1 and an upper cartridge lifting mechanism that lifts and lowers the take-up cartridge. 2 is a perspective view showing a tape end detection mechanism and an adhesive tape roll provided in the dust removal device shown in FIG. 1 . FIG. 4 is a perspective view showing the configuration of the take-up cartridge shown in FIG. 3, as viewed from the opening side. 4 is a cross-sectional view showing the configuration of the take-up cartridge shown in FIG. 3. 4 is a perspective view showing a state in which a rear cover panel and a take-up holding mechanism of the take-up cartridge shown in FIG. 3 are cut away. 4 is a perspective view showing a configuration of a take-up tube included in the take-up cartridge shown in FIG. 3. 4A to 4C are diagrams for explaining the operation when updating an adhesive tape in the dust removal device shown in FIG. 1, in which (A) is a diagram showing step S01, (B) is a diagram showing step S02, and (C) is a diagram showing steps S03 and S04. 4A and 4B are diagrams for explaining the operation when updating an adhesive tape in the dust removal device shown in FIG. 1, in which (A) is a diagram showing steps S05 and S06, (B) is a diagram showing step S07, and (C) is a diagram showing step S08. 4A to 4C are diagrams illustrating the operation of the dust removal device shown in FIG. 1 when updating an adhesive tape, in which (A) is a diagram illustrating step S09, (B) is a diagram illustrating step S10, and (C) is a diagram illustrating step S11. FIG. 5 is a diagram illustrating a schematic configuration of a main part of a dust removal device according to a second embodiment of the present invention.

(First embodiment)
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A dust remover 10 according to a first embodiment of the present invention and an adhesive tape renewal method in the dust remover 10 will be described below with reference to the drawings.

<Overall Configuration of Dust Removal Device 10>
Fig. 1 is a side view showing a partial configuration of a dust removal device 10 according to a first embodiment of the present invention in a transparent manner. Fig. 2 is a diagram showing a schematic configuration of the dust removal device 10. The dust removal device 10 according to this embodiment is a device for removing dust adhering to the surface of a workpiece W. Note that, examples of the workpiece W include a printed circuit board on which electronic components are mounted, a substrate such as a liquid crystal panel, or a sheet-like member that is a raw material for a substrate, but the workpiece W may be a planar member other than these.

The dust removal device 10 of this embodiment removes dust adhering to the surface of the workpiece W while transporting the workpiece W, for example, from left to right in FIG. 1. However, conversely, dust adhering to the surface of the workpiece W may be removed while transporting the workpiece W from right to left in FIG. 1. The main components of this dust removal device 10 are a housing 20, a transport mechanism 25, a clean unit 30, a winding motor 60, an upper cartridge lifting mechanism 70T, a lower cartridge lifting mechanism 70B, a tape end detection mechanism 80, a peeling start detection sensor S1, a peeling end detection sensor S2, a control unit 90, and a take-up cartridge 100 stored in a take-up cartridge storage unit 21.

<Housing unit 20>
The housing 20 is configured by combining structural members such as metal supports and attaching an outer wall between the supports as necessary. The housing 20 supports various components such as the transport mechanism 25, the clean unit 30, and the control unit 90.

The housing 20 is also provided with a take-up cartridge storage section 21. The take-up cartridge storage section 21 is a section that stores the take-up cartridge 100. As shown in FIG. 1, the take-up cartridge storage sections 21 are provided above and below the work W in the housing 20. Specifically, the take-up cartridge storage section 21 located above the work W is provided above the tape unit 50 in the housing 20. The take-up cartridge storage section 21 located below the work W is provided below the tape unit 50 in the housing 20.

<Transport mechanism 25>
The transport mechanism 25 is a part that provides a driving force for transporting the workpiece W. The transport mechanism 25 includes a motor 26 that is shown in FIG. 1 , a transmission mechanism (not shown) that transmits the driving force from the motor 26, and transport rollers 27 that transport the workpiece W transported from the outside by the transmission of the driving force from the transmission mechanism.

The motor 26 is a part that is rotated by commands from the control unit 90. In this embodiment, the transmission mechanism includes a magnetic coupling unit, a magnetic gear, and a gear train. However, the transmission mechanism is not limited to these, and a gear-type gear or a belt may be used instead of the magnetic coupling unit or magnetic gear.

2, multiple conveying rollers 27 are provided, but the motor 26 may provide driving force to any of the conveying rollers 27. The motor 26 may also transmit driving force to the dust removal roller 41.

<Clean unit 30>
The clean unit 30 is a part for removing dust from the workpiece W, and its main components are a dust removal roll unit 40, a tape unit 50, and a tape end detection mechanism 80, which will be described later. The dust removal roll unit 40 has a plurality of dust removal rollers 41. In the configuration shown in FIG. 2, the dust removal rollers 41 are arranged at positions symmetrical in the vertical direction (Z direction) with the workpiece W sandwiched therebetween. Therefore, both the upper and lower surfaces of the workpiece W can be dust removed by the dust removal rollers 41. In the configuration shown in FIG. 1 and FIG. 2, two dust removal rollers 41 are arranged on each of the upper surface side and the lower surface side of the workpiece W. However, one dust removal roller 41 may be arranged on each of the upper surface side and the lower surface side of the workpiece W, or three or more dust removal rollers 41 may be arranged.

As shown in FIG. 2, the dust removal roller 41 has a rotating shaft 41a and an adhesive rubber layer 41b. The adhesive rubber layer 41b is provided on the outside of the rotating shaft 41a so as to extend over a predetermined length range in the axial direction. This adhesive rubber layer 41b is formed of an adhesive rubber capable of adsorbing dust. The adhesive rubber layer 41b has an adsorption layer (not shown) on its surface side, which is made of a material with excellent dust adsorption properties, such as silicone rubber. The lower layer of the adsorption layer may be configured to have a conductive layer, such as nitrile rubber or carbon rubber.

The tape unit 50 also includes an adhesive tape holder 51. The adhesive tape holder 51 is a portion that rotatably holds both ends of the adhesive tape roll T1R. The adhesive tape holder 51 can be raised and lowered in the vertical direction by a tape lift cylinder 52. An air cylinder, for example, is used as the tape lift cylinder 52, and the adhesive tape roll T1R can be moved in a direction toward and away from the dust removal roller 41 by driving the tape lift cylinder 52. The tape lift cylinder 52 can also move the dust removal roller 41 toward the workpiece W via the adhesive tape T1.

The adhesive tape holder 51 may only hold the adhesive tape roll T1R (i.e., the adhesive tape roll T1R may be rotated passively by the feed of the workpiece W). However, a configuration may also be adopted in which a driving force for rotating the adhesive tape roll T1R is provided by a driving source such as a drive motor. Also, instead of a drive motor for driving the adhesive tape roll T1R, a configuration may also be adopted in which a dust removal roller 41, which can maintain a constant diameter, is rotated by the drive motor.

Here, the surface of the adhesive tape T1 is an adhesive surface. The adhesive surface is capable of holding the dust adsorbed to the dust removal roller 41 described above. Therefore, the adhesive force of the adhesive surface of the adhesive tape T1 against the dust is greater than the adhesive force of the dust removal roller 41 against the dust. This allows the dust to be transferred well from the dust removal roller 41 to the adhesive surface of the adhesive tape T1. The sheet-shaped adhesive tape T1 has slits that allow it to be cut into sheets, and the adhesive tape T1 is wound into a roll to form the adhesive tape roll T1R. Therefore, by pulling out the adhesive tape T1 from the adhesive tape roll T1R and then cutting it at the slits, the dirty adhesive tape T1 can be easily replaced with an unsoiled adhesive tape T1.

The cuts in the adhesive tape T1 are not parallel to the axial direction but are inclined. Therefore, in the adhesive tape roll T1R, the end (step) of the adhesive tape T1 located at the outermost periphery is also inclined with respect to the axial direction. However, the cuts in the adhesive tape T1 may also be parallel to the axial direction.

<Winding motor 60>
The winding motor 60 is a motor for applying a driving force to the winding tube 200, which will be described later. A connecting member (not shown) is connected to the rotating shaft of the winding motor 60. The connecting member is inserted into the insertion hole 121d and fits into the connecting recess 202a of the joint cover 202, so that the driving force of the winding motor 60 can be transmitted to the winding tube 200.

<Upper Cartridge Lifting Mechanism 70T and Lower Cartridge Lifting Mechanism 70B>
3 is a perspective view showing the configuration of the take-up cartridge 100 and the upper cartridge lifting mechanism 70T that lifts and lowers the take-up cartridge 100. The upper cartridge lifting mechanism 70T is a part that moves the take-up cartridge 100, which is located above the upper adhesive tape roll T1R, in the up-down direction, and is disposed at a predetermined portion of the housing 20. The upper cartridge lifting mechanism 70T includes a lifting cylinder 71 and a connecting plate 72. The lifting cylinder 71 corresponds to the cartridge lifting cylinder.

The lift cylinder 71 is an actuator that drives a piston (reference number omitted) by air introduced into the cylinder (reference number omitted). A connecting plate 72 is attached to the upper end of the piston of the lift cylinder 71. The connecting plate 72 is a member for connecting the take-up cartridge 100 and the lift cylinder 71 to raise and lower the take-up cartridge 100. In this embodiment, the connecting plate 72 is connected to the flange portion 130c of the take-up cartridge 100. This allows the connecting plate 72 to be positioned below the upper end of the take-up cartridge 100, reducing the upward protrusion dimension of the upper cartridge lift mechanism 70T.

The lower cartridge lifting mechanism 70B is a part that moves the take-up cartridge 100, which is located below the lower adhesive tape roll T1R, in the vertical direction, and is disposed in a predetermined portion of the housing 20. The lower cartridge lifting mechanism 70B includes a lifting cylinder 71 and a connecting plate 72, but since the configuration of these is similar to that of the upper cartridge lifting mechanism 70T described above, drawings and explanations showing the detailed configuration will be omitted.

In addition, the upper cartridge lifting mechanism 70T and the lower cartridge lifting mechanism 70B correspond to the cartridge lifting mechanism.

In addition, in this embodiment, the connecting plate 72 of the lower cartridge lifting mechanism 70B is connected to the flange portion 130c of the take-up cartridge 100. This allows the connecting plate 72 to be positioned above the upper end of the take-up cartridge 100, reducing the downward protrusion dimension of the lower cartridge lifting mechanism 70B.

<Tape end detection mechanism 80>
Next, the tape end detection mechanism 80 will be described. Fig. 4 is a perspective view showing the tape end detection mechanism 80 and the adhesive tape roll T1R. Note that Fig. 4 shows only a portion of the adhesive tape roll T1R. As shown in Fig. 4, the dust removal device 10 of this embodiment is equipped with a tape end detection mechanism 80. This tape end detection mechanism 80 includes a fixed plate 81, a lifting cylinder 82, a connecting plate 83, a holding frame 84, a motor 85, a drive shaft 86, an end detection roller 87, and an end detection sensor 88.

The fixed plate 81 is a member for mounting the tape end detection mechanism 80 at a predetermined position on the housing 20. Similarly to the above-mentioned lift cylinder 71, the lift cylinder 82 is an actuator that drives a piston (reference number omitted) by air introduced into a cylinder (reference number omitted). The lift cylinder 82 corresponds to a roller lift cylinder.

A connecting plate 83 is attached to the protruding end of the piston of this lifting cylinder 82. The connecting plate 83 is a member for connecting the holding frame 84 and the lifting cylinder 82 to raise and lower the tape end detection mechanism 80.

The holding frame 84 is a frame member for holding the motor 85, drive shaft 86, end detection roller 87, and end detection sensor 88. That is, the motor 85 and end detection sensor 88 are attached to the holding frame 84 via mounting brackets (reference numerals omitted). The holding frame 84 also supports the other end of the drive shaft 86 via a support member (reference numerals omitted). The support member is provided with a hole through which the drive shaft 86 is inserted, and a bearing is disposed in this hole.

The motor 85 is a motor that provides a driving force to rotate the end detection roller 87, and in this embodiment, a stepping motor is used. Therefore, it is possible to accurately control the number of rotations of the end detection roller 87 according to the number of input pulses. Also, because the motor 85 is a stepping motor, the end detection roller 87 can be held in a stopped state by its self-holding force when stopped in a powered state. This makes it possible to prevent positional deviation due to rotation of the adhesive tape roll T1R when the end detection roller 87 is in contact with the outermost adhesive tape T1. The motor 85 corresponds to a detection motor.

The drive shaft 86 is connected to the output shaft of the motor 85, and is a shaft on whose end the end detection roller 87 is attached. The end detection roller 87 is a roller member that contacts the outermost adhesive tape T1. This contact enables the end detection roller 87 to apply a driving force to rotate the adhesive tape roll T1R when the motor 85 is driven. This contact also enables the end detection roller 87 to hold a position where the adhesive tape roll T1R does not rotate, due to its own holding force when the motor 85 is stopped.

The end detection sensor 88 is a sensor for detecting the edge of the outermost adhesive tape T1. For example, an optical sensor of the light projection and reception type is used for this end detection sensor 88. By projecting and receiving light, the end detection sensor 88 measures the distance between the outermost adhesive tape T1. That is, when the end detection sensor 88 passes the end (step) between the edge of the outermost adhesive tape T1 and the adhesive tape T1 on the inner side while the adhesive tape roll T1R is rotating driven by the motor 85, the detected distance fluctuates. From the fluctuation in distance, it is possible to detect whether the end detection sensor 88 has passed the edge of the outermost adhesive tape T1.

In the tape end detection mechanism 80 as described above, the drive shaft 86, end detection roller 87, end detection sensor 88, etc. are supported on the holding frame 84. Therefore, when the end detection roller 87 moves up and down to follow the unevenness present in the outermost adhesive tape T1, the end detection sensor 88 also moves up and down at the same time. Therefore, it is possible to reduce detection errors compared to when the end detection sensor 88 is attached separately to the end detection roller 87.

<Regarding peeling start detection sensor S1 and peeling end detection sensor S2>
Next, the peeling start detection sensor S1 and the peeling end detection sensor S2 will be described. The peeling start detection sensor S1 is a sensor for detecting the leading end of the feeding of the adhesive tape T1 when the upper cartridge lifting mechanism 70T and the lower cartridge lifting mechanism 70B are driven to press the peeling tape T2 against the outermost adhesive tape T1 and peel the outermost adhesive tape T1 from the adhesive tape roll T1R.

The peel start detection sensor S1 is attached to a predetermined portion of the housing 20 between the take-up cartridge 100 and the adhesive tape roll T1R via a mounting bracket (reference number omitted). Like the end detection sensor 88, the peel start detection sensor S1 is also, for example, an optical sensor of the light-emitting/light-receiving type.

When the peeling tape T2 is pressed against the outermost adhesive tape T1, the outermost adhesive tape T1 is peeled off from the adhesive tape roll T1R. Then, when the peeled adhesive tape T1 is sent together with the peeling tape T2 toward the winding tube 200 described below, the leading edge of the adhesive tape T1 passes the detection site of the peeling start detection sensor S1. At that time, the peeling start detection sensor S1 is capable of detecting that the adhesive tape T1 has been peeled off from the adhesive tape roll T1R.

The peeling end detection sensor S2 is a sensor for detecting the end in the feed direction of the adhesive tape T1 being fed together with the peeling tape T2 toward the winding tube 200. This peeling end detection sensor S2 is attached via a mounting bracket (reference number omitted) to a predetermined portion of the housing 20 above the peeling start detection sensor S1.

In this embodiment, the predetermined portion is a portion facing the slit in the outer wall panel 130 of the take-up cartridge 100. Similarly to the end detection sensor 88, the peeling end detection sensor S2 is also, for example, a light-emitting/receiving optical sensor. Therefore, by being able to emit and receive light from the peeling end detection sensor S2 through the slit in the outer wall panel 130, it is possible to detect whether the adhesive tape T1 has been wound around the take-up tube 200 inside the take-up cartridge 100.

In addition, the dust removal device 10 of this embodiment is also provided with an empty detection sensor S3 for detecting whether the adhesive tape roll T1R is empty (whether or not adhesive tape T1 remains) (see Figure 9, etc.).

<Regarding the control unit 90>
The control unit 90 can control the driving of the motor 26, the winding motor 60, or the motor 85 based on the detection signals from the respective detection sensors or based on a predetermined control program. Furthermore, the control unit 90 can operate the upper cartridge lifting mechanism 70T and/or the lower cartridge lifting mechanism 70B when a predetermined movement timing arrives, thereby pressing the peeling tape T2 against the outermost adhesive tape T1, or lifting the peeling tape T2 from the pressed state, thereby peeling the outermost adhesive tape T1 from the adhesive tape roll T1R. Furthermore, the control unit 90 can operate the tape lifting cylinder 52 when a predetermined movement timing arrives, thereby pressing the adhesive tape T1 against the workpiece W, or retracting the adhesive tape T1 from the workpiece W.

<Regarding the take-up cartridge 100>
Fig. 5 is a perspective view showing the configuration of the take-up cartridge 100, and shows the state seen from the opening 160 side. Fig. 6 is a cross-sectional view showing the configuration of the take-up cartridge 100. Note that Figs. 5 and 6 show the take-up cartridge 100 in a state in which the take-up cartridge 100 has been removed from the take-up cartridge storage section 21.

As shown in Figures 3, 5 and 6, the main components of the take-up cartridge 100 are a housing 110, a take-up tube 200, a peel-off tape holding tube 210, an application mechanism 220, and a take-up hold-down mechanism 240.

The housing 110 is a member that supports the entire take-up cartridge 100, stores the adhesive tape T1 wound around the take-up tube 200, and stores the peeling tape T2 held in the peeling tape holding tube 210. Therefore, the housing 110 isolates the adhesive tape T1 wound around the take-up tube 200 from the outside, thereby preventing dust from accidentally falling off the adhesive tape T1 and scattering into the external environment. The housing 110 also prevents dust from adhering to the peeling tape T2.

The housing 110 has as its main components a side panel member 120, an outer wall panel 130, a front cover panel 140, and a rear cover panel 150.

The side plate members 120 are members arranged on both ends in the longitudinal direction (Y direction) of the take-up cartridge 100. The side plate members 120 are formed from a material that has excellent impact resistance, a small coefficient of friction, and excellent self-lubrication, such as POM (polyacetal resin), but the side plate members 120 may be formed from a material other than POM (such as fluororesin) as long as the material has such characteristics.

The side plate member 120 has a winding shaft support portion 121, a peeling shaft support portion 122, and an attaching shaft support portion 123. The winding shaft support portion 121 is a portion for supporting the end of the winding tube 200, and corresponds to the second shaft support portion. This winding shaft support portion 121 is a groove-shaped portion in which a thick portion (a portion that is thicker than other portions) of the side plate member 120 is recessed into an approximately U-shape. Therefore, one end side of the winding shaft support portion 121 is in an open state, and the end of the winding tube 200 can be inserted through this opening.

The winding shaft support 121 is provided with a stopper protrusion (not shown) that protrudes from the inner wall of the approximately U-shaped groove toward the inside of the approximately U-shaped groove to prevent the end of the winding tube 200 from falling out. It is preferable that a bearing or the like is disposed in the winding shaft support 121 to reduce the rotational resistance of the winding tube 200.

5, the side plate member 120 is provided with an insertion hole 121d penetrating the side plate member 120. A connecting member of the winding motor 60 can be inserted into this insertion hole 121d. This makes it possible to transmit the driving force of the winding motor 60 to the winding tube 200 via the connecting member inserted into the insertion hole 121d.

The peeling shaft support portion 122 is a portion for supporting the end of the peeling tape holding tube 210. This peeling shaft support portion 122 is also a groove-shaped portion formed by recessing a thick portion 124 (a portion that is thicker than other portions) of the side plate member 120 into a substantially U-shape. Therefore, one end side of the peeling shaft support portion 122 is also in an open state, and the end of the peeling tape holding tube 210 can be inserted through this opening.

This peeling shaft support part 122 is provided with a stopper protrusion (not shown) that protrudes from the inner wall of the approximately U-shaped groove toward the inside of the approximately U-shaped groove, preventing the end of the peeling tape holding tube 210 from falling out. Note that the peeling shaft support part 122 does not have an insertion hole corresponding to the above-mentioned insertion hole 121d, but an insertion hole may be provided.

In addition, the side plate member 120 is provided with an attachment shaft support portion 123. The attachment shaft support portion 123 is a portion that supports the peeling support shaft 221 of the attachment mechanism 220, but supports the peeling support shaft 221 in an unrotatable state rather than allowing it to rotate freely.

The attachment shaft support portion 123 is a groove-shaped portion formed by recessing a thick portion of the side plate member 120 into an approximately U-shape, and one end side of the attachment shaft support portion 123 is open. However, unlike the winding shaft support portion 121 and the peeling shaft support portion 122 described above, no protruding portion corresponding to a slip-out prevention protrusion is provided. Also, the groove width of the attachment shaft support portion 123 is set smaller than the groove width of the winding shaft support portion 121 and the groove width of the peeling shaft support portion 122 described above, but the groove width of the attachment shaft support portion 123 may be approximately the same as the groove width of the winding shaft support portion 121 and the groove width of the peeling shaft support portion 122.

The pressing mechanism 230 of the pasting mechanism 220, which will be described later, is disposed in the pasting shaft support portion 123. Specifically, the pasting shaft support portion 123 is provided with a sliding groove 123a and a shaft hole 123b. A spring member 232 constituting the pressing mechanism 230 is disposed in the sliding groove 123a, and one end of the spring member 232 can be received at the bottom of the sliding groove 123a. A spring shaft 231 is inserted in the shaft hole 123b in a freely slidable state, and the spring shaft 231 protrudes into the sliding groove 123a, but the head 231a of the spring shaft 231 is received on the wall surface opposite the sliding groove 123a.

In addition, the side plate member 120 is provided with a handle 125. The handle 125 is a long hole-shaped portion into which an operator can insert his or her fingers, and is provided so as to penetrate the side plate member 120.

3, 5 and 6, the exterior wall panel 130 constituting the housing 110 is a member formed by bending a metal plate, and both ends of the exterior wall panel 130 in the longitudinal direction are fixed to the side plate members 120. The exterior wall panel 130 is bent to have an upper surface portion 130a, a side surface portion 130b and a flange portion 130c. The upper surface portion 130a is a wall surface located on the opposite side of the housing 110 from an opening described below. The side surface portion 130b is a wall surface bent at approximately 90 degrees from the upper surface portion 130a.

Flange portion 130c is bent at approximately 90 degrees from side portion 130b so as to be approximately parallel to top portion 130a, but its width is set smaller than that of top portion 130a and side portion 130b. As a result of the bending, flange portion 130c protrudes further forward in the conveying direction than side portion 130b. The presence of side portion 130b and flange portion 130c creates a recess in housing 110 that allows an operator to easily insert his or her hand from handle 125.

In addition, the flange portion 130c is connected to the connecting plate 72 of the upper cartridge lifting mechanism 70T or the connecting plate 72 of the lower cartridge lifting mechanism 70B. This connection makes it possible to raise and lower the take-up cartridge 100 in the vertical direction when the upper cartridge lifting mechanism 70T or the lower cartridge lifting mechanism 70B is operated.

In addition, the front cover panel 140 (corresponding to the cover member) is a panel-like member rotatably attached to the flange portion 130c via a plurality of hinges H1. In other words, the front cover panel 140 is an openable and closable cover-like member located on the front side (X1 side) of the housing 110. In addition, the front cover panel 140 is attached to the side plate member 120 via a lock member R1 so that the closed state can be locked.

The front cover panel 140 has a side portion 140a and a guide slope portion 140b as shown in Figures 3 and 5. The side portion 140a is a wall surface that is not flush with the above-mentioned side portion 130b but is parallel to it. The guide slope portion 140b is a wall surface that is gradually inclined so as to approach the workpiece W gradually from the front side (X1 side) to the rear side (X2 side) in the conveying direction (X direction) of the workpiece W, but is arranged so as not to protrude downward (Z2 side) from the peeling roller 222 described later.

Figure 7 is an oblique view showing the rear cover panel 150 and the winding hold-down mechanism 240 in a cut-away state. As shown in Figure 5, the rear cover panel 150 (corresponding to the cover member) is a panel-like member rotatably attached to the rear side (X2 side) of the upper surface portion 130a of the outer wall panel 130 via a plurality of hinges H2. In other words, the rear cover panel 150 is a cover-like member that is located on the rear side (X2 side) of the housing 110 and can be opened and closed. The rear cover panel 150 is also attached to the side plate member 120 via a lock member R2 so that it can be locked in a closed state.

The rear cover panel 150, like the front cover panel 140, has a side surface 150a shown in Figures 3, 5, and 7, which is perpendicular to the top surface 130a. The rear cover panel 150 also has a steep slope 150b. The steep slope 150b is a wall surface that forms a larger angle with respect to the horizontal direction than the guide slope 140b. The presence of the steep slope 150b makes it possible to distinguish between the front and rear in the transport direction (X direction) of the take-up cartridge 100, and reduces the dimension (width dimension) along the transport direction (X direction) of the take-up cartridge 100.

A roll support member 241 is attached to the side portion 150a of the rear cover panel 150. The roll support member 241 is a member that constitutes the winding hold-down mechanism 240 described below, and is a member that supports the hold-down roller 242. Similarly to the front cover panel 140, the rear cover panel 150 is also attached to the side plate member 120 via a lock member R2 so that the closed state can be locked.

In addition, an opening 160 is provided between the end of the guide slope portion 140b of the front cover panel 140 and the end of the rear cover panel 150. The opening 160 is an opening portion through which the peeling roller 222 and the peeling tape T2 wound around the peeling roller 222, which will be described later, protrude from the housing 110, and is also an opening portion through which the adhesive tape T1 is stored in the housing 110.

<Regarding the winding tube 200>
Next, the winding tube 200 will be described. Fig. 8 is a perspective view showing the configuration of the winding tube 200. The winding tube 200 is a cylindrical member for winding up the above-mentioned adhesive tape T1 and the peeling tape T2 described later, and is supported in a freely rotatable state by the bearing portion 121c of the winding shaft support portion 121 described above. The winding tube 200 includes a pipe-shaped portion 201, which is made of a resin such as polyvinyl chloride resin. However, the pipe-shaped portion 201 may also be made of a metal such as an aluminum-based metal.

As shown in Figure 8, joint covers 202 are attached to both ends of the pipe-shaped section 201. The joint covers 202 are lid-like members that are attached to transmit the driving force from the drive motor to the winding tube 200, and are engaged with the pipe-shaped section 201 so as to rotate integrally therewith.

The joint cover 202 is provided with a connecting recess 202a and a guide protrusion 202b. The connecting recess 202a is a recessed or hole-shaped portion into which the connecting member of the winding motor 60 described above is inserted. In the configuration shown in FIG. 8, two connecting recesses 202a are provided, but three or more may be provided.

The guide protrusion 202b is a protruding member located between adjacent connecting recesses 202a, and is provided in a shape having a slope such as a triangular pyramid. Therefore, when the connecting member of the winding motor 60 passes through the insertion hole 121d and proceeds toward the connecting recess 202a, if it proceeds to a position shifted in the rotation direction from the connecting recess 202a and collides with the guide protrusion 202b, the connecting member or the winding tube 200 will rotate due to the progression of the connecting member. Therefore, it is possible to insert the connecting member into the connecting recess 202a without providing a sensor to prevent positional deviation.

6, the peeling tape holding tube 210 is a portion that holds the peeling tape roll T2R in which the peeling tape T2 is wound in a roll shape. The material of this peeling tape holding tube 210 is the same as that of the pipe-shaped portion 201 of the winding tube 200 described above.

The application mechanism 220 is a mechanism for elastically pressing the peeling tape T2 fed from the peeling tape holding tube 210 against the adhesive tape roll T1R. The application mechanism 220 includes a peeling support shaft 221, a peeling roller 222, and a pressing mechanism 230. The peeling support shaft 221 is an elongated member that rotates along the longitudinal direction (Y direction) of the take-up cartridge 100, but is not rotatable. Screw holes (not shown) are formed on both ends of the peeling support shaft 221 for screwing in the threads of the spring shaft 231 described later.

The peeling roller 222 is a roller that is rotatably provided on the peeling support shaft 221 via a bearing B1. The peeling roller 222 is a roller for peeling off the outermost adhesive tape T1 of the adhesive tape roll T1R from the adhesive tape roll T1R by pressing the peeling tape T2 against the adhesive tape roll T1R in a state in which the peeling tape T2 is wound. Since the peeling rollers 222 have a width corresponding to the width of the peeling tape T2, multiple peeling rollers 222 (three in the configuration shown in FIG. 5) are arranged along the longitudinal direction of the peeling support shaft 221. The peeling rollers 222 are provided so as to protrude from the opening 160 by being pressed by the pressing mechanism 230.

A pressing mechanism 230 is provided on each of the pair of side plate members 120. This pressing mechanism 230 has a spring shaft 231 and a spring member 232. The spring shaft 231 is an axial member that is inserted into the axial hole 123b described above, and in the configuration shown in FIG. 6, a screw thread (reference number omitted) is formed on the tip side of the spring shaft 231. Therefore, by screwing the tip side of the spring shaft 231 into the screw hole of the peeling support shaft 221, the spring shaft 231 and the peeling support shaft 221 are configured to move together.

A spring member 232 is provided on the outer periphery of the spring shaft 231, and this spring member 232 is disposed inside the sliding groove 123a. The spring member 232 is, for example, a coil spring, one end of which is received on the bottom of the sliding groove 123a and the other end of which is received on the peeling support shaft 221. Then, with the head 231a of the spring shaft 231 received on the wall surface opposite the sliding groove 123a, the spring member 232 exerts a biasing force on both the bottom of the sliding groove 123a and the peeling support shaft 221. Therefore, when the peeling roller 222 is strongly pressed against the adhesive tape roll T1R side, the spring member 232 contracts in response to the pressing force, and the peeling roller 222 can move toward the inside of the housing 110. Therefore, the peeling roller 222 can follow the outer circumferential surface of the peeling tape roll T2R well while exerting a biasing force on the outer circumferential surface of the peeling tape roll T2R.

Next, the winding hold-down mechanism 240 will be described. As shown in Figures 6 and 7, the winding hold-down mechanism 240 is attached to the rear cover panel 150. This winding hold-down mechanism 240 has a roll support member 241, a hold-down roller 242, and a biasing spring 243. The roll support member 241 is fixed to the side portion 150a, for example, with a screw or the like, and is made of a resin or metal. When the material is resin, it may be a resin such as POM (polyacetal resin) that has excellent impact resistance, a small coefficient of friction, and excellent self-lubrication, as in the case of the side plate member 120.

The roll support member 241 is provided with a shaft support slit 241a, a spring mounting shaft 241b, and a spring locking portion 241c. The shaft support slit 241a is a groove portion that allows the rotation of the pressing roller 242 while inserting the shaft portion (reference numeral omitted) of the pressing roller 242. The shaft support slit 241a is formed, for example, to draw an arc, and the center of the arc is located on the side close to the side portion 150a. Moreover, the winding tube 200 is provided close to the upper side (Z1 side) of the end of the shaft support slit 241a. Therefore, the pressing roller 242 can move close to or away from the winding tube 200 by moving along the shaft support slit 241a.

The spring mounting shaft 241b is a shaft portion for attaching the wound portion of the biasing spring 243 (described later) to the roll support member 241. The spring locking portion 241c is a portion for locking the other end side of the biasing spring 243 (described later), and is provided in a convex shape so that the other end can be easily locked.

The pressing roller 242 is provided at its end with a shaft portion (reference number omitted) and a roller portion 242a. The shaft portion is provided with a smaller diameter than the roller portion 242a, and this shaft portion is inserted into the shaft support slit 241a. The roller portion 242a is a roller for preventing the adhesive tape T1 from expanding toward the outer diameter side when the adhesive tape T1 is wound onto the winding tube 200 together with the peeling tape T2.

A biasing spring 243 is provided to apply a biasing force to the pressure roller 242 to prevent the adhesive tape T1 from expanding outward as described above. The biasing spring 243 is, for example, a torsion spring, one end of which is engaged with the shaft portion. The other end of the biasing spring 243 is engaged with the spring engaging portion 241c described above. The biasing spring 243 biases the pressure roller 242 toward the winding tube 200. Therefore, when the rear cover panel 150 is closed, the pressure roller 242 is biased toward the winding tube 200.

In the dust removal device 10 configured as described above, the take-up cartridge 100 is removable from the take-up cartridge storage section 21 of the housing section 20. This makes it easy to set up the removed take-up cartridge 100.

<Operation of the dust removal device 10 when replacing the adhesive tape T1>
The operation of the dust removing device 10 configured as above when replacing the adhesive tape T1 will be described below with reference to Figs.

9(A), when the workpiece W is being dust-removed, the control unit 90 drives the motor 26 to feed the workpiece W to the dust-removal roller 41 via the transport mechanism 25. At this time, the control unit 90 operates the tape lifting cylinder 52 to press the adhesive tape roll T1R against the dust-removal roller 41 (step S01).

In this state, dust removal from the workpiece W continues for a predetermined period of time, and if it is determined that the outermost adhesive tape T1 has become soiled and it is time to peel it off (renew it), the control unit 90 operates the tape lifting cylinder 52 to move the adhesive tape roll T1R away from the dust removal roller 41, as shown in Figure 9 (B) (step S02).

In this state, the control unit 90 continues to drive the motor 26 to continue removing dust from the workpiece W using the dust removal roller 41. This is because it is believed that no particular problem will arise if dust is not transferred from the dust removal roller 41 to the adhesive tape T1 for a relatively short period of time. However, the control unit 90 may stop driving the motor 26 so as not to remove dust from the workpiece W.

9(C), the control unit 90 operates the lift cylinder 82 of the tape end detection mechanism 80 to press the end detection roller 87 against the outermost adhesive tape T1 (step S03; corresponding to the roller pressing step). After this pressing operation, the control unit 90 operates the motor 85 (step S04; corresponding to the rotation step). At this time, the end detection sensor 88 detects a step in the outermost adhesive tape T1 (corresponding to the detection step).

In this state, when the end detection sensor 88 detects a step, as shown in Fig. 10 (A), the control unit 90 drives the motor 85 for a further predetermined number of pulses, and then stops the motor 85 in a powered state (step S05). That is, the motor 85 applies a driving force to rotate the adhesive tape roll T1R via the end detection roller 87, and then the motor 85 stops, so that the adhesive tape roll T1R does not rotate and is in a stopped state. This stopping position is not a position approaching the step that is inclined with respect to the axial direction, but a position a predetermined distance away from the diagonal step without approaching it.

In this embodiment, the motor 85 is a stepping motor. Therefore, when the motor 85 stops while being energized, the adhesive tape roll T1R is prevented from rotating and can be held in position.

Next, the control unit 90 operates the lifting cylinder 71 to move the take-up cartridge 100 toward the adhesive tape roll T1R. Then, the peeling tape T2 is pressed against the outermost adhesive tape T1 via the peeling roller 222 (step S06).

10B, the control unit 90 operates the lift cylinder 82 to move the end detection roller 87, which is pressed against the outermost adhesive tape T1, in a direction away from the adhesive tape T1 (step S07). Therefore, the position holding state by the motor 85 is released, and thereafter, the end detection roller 87 follows the rotation of the peeling roller 222 driven by the winding motor 60.

10(C), the control unit 90 rotates the winding motor 60 a predetermined distance. At this time, the control unit 90 rotates the adhesive tape roll T1R to an excess position where the peeling tape T2 pressed against the peeling roller 222 exceeds the step of the outermost adhesive tape T1 (step S08).

Here, the adhesive force of the peeling tape T2 is set to be stronger than the adhesive force of the adhesive tape T1 in the adhesive tape roll T1R. Therefore, when the peeling tape T2 reaches the step of the outermost adhesive tape T1 and climbs over the step, the outermost adhesive tape T1 can be peeled off from the climbed-over point. Therefore, after the above-mentioned climbing over (i.e., after reaching the step), the winding motor 60 is driven further to an excess position where the step is completely exceeded, and the outermost adhesive tape T1 begins to be peeled off from the adhesive tape roll T1R by the adhesive force of the peeling tape T2.

In this embodiment, multiple peeling rollers 222 (three in the configuration shown in FIG. 5) are arranged along the longitudinal direction of the peeling support shaft 221. Therefore, the adhesive tape roll T1R is rotated until all of the peeling tape T2 pressed by the three peeling rollers 222 exceeds the step of the outermost adhesive tape T1.

11(A), while continuing to operate the winding motor 60, the control unit 90 operates the lift cylinder 71 to move the winding cartridge 100 toward a position away from the adhesive tape roll T1R (i.e., the original position) (step S09). Then, the outermost adhesive tape T1 adhered to the peeling tape T2 is peeled off from the adhesive tape roll T1R as the peeling tape T2 moves and is wound around the winding tube 200.

As described above, when the adhesive tape T1 peeled off from the adhesive tape roll T1R heads toward the take-up tube 200, the leading edge of the adhesive tape T1 is detected by the peel start detection sensor S1. At this time, the control unit 90 determines that the peeling operation has been performed normally, and controls the lift cylinder 71 and the take-up motor 60 to continue operating. If the take-up cartridge 100 has already returned to its original position away from the adhesive tape roll T1R and the lift cylinder 71 has stopped, the control unit 90 controls the take-up motor 60 to continue operating while keeping the lift cylinder 71 stopped.

Next, the control unit 90 judges whether the peeling end detection sensor S2 has detected the rear end of the adhesive tape T1 being peeled and fed to the winding tube 200. Then, as shown in FIG. 11B, when it is judged that the peeling end detection sensor S2 has detected the rear end of the adhesive tape T1, the peeling operation of the adhesive tape T1 is approaching completion. At this time, the control unit 90 stops the rotation of the winding motor 60 after the detection (step S10). At this time, since there is a slit in the adhesive tape roll T1R for dividing (cutting) the adhesive tape T1 into sheets, the adhesive tape T1 to be updated is separated from the adhesive tape roll T1R.

After the above-described adhesive tape T1 renewal work is completed, the control unit 90 determines whether or not adhesive tape T1 remains on the adhesive tape roll T1R using the empty detection sensor S3, as shown in FIG. 11 (C) (step S11).

In this judgment, if the control unit 90 judges that the adhesive tape T1 remains on the adhesive tape roll T1R, the dust removal operation of the workpiece W can be performed again by pressing the adhesive tape T1 against the dust removal roller 41. In this case, the control unit 90 performs the operation of pressing the adhesive tape roll T1R against the dust removal roller 41 as described in step S01, and further drives the motor 26 to send the workpiece W to the dust removal roller 41 via the transport mechanism 25 (see FIG. 9 (A)). This causes the dust removal of the workpiece W to be performed.

Second Embodiment
A dust remover 10B according to a second embodiment of the present invention will be described below with reference to the drawings. Fig. 12 is a diagram showing a schematic configuration of a main part of a dust remover 10B according to the second embodiment of the present invention.

In the configuration shown in FIG. 12, three parts are provided for removing dust from the cleaning unit 30, the take-up cartridge 100, etc. In other words, the workpiece W is configured to be removed from dust by three cleaning units 30, which further improves the performance of removing dust from the workpiece W.

That is, the dust removal device 10B includes a clean unit 30 having a dust removal roll unit 40 and a tape unit 50, a tape end detection mechanism 80, and other associated components such as an upper cartridge lifting mechanism 70T and a lower cartridge lifting mechanism 70B (not shown).

In the dust removal device 10B configured in this manner, when it is determined that the time has come to renew (peel off) the outermost adhesive tape T1, the outermost adhesive tape T1 in a particular clean unit 30 can be renewed (peel off).

For example, of the three clean units 30 shown in FIG. 12, the outermost adhesive tape T1 of the clean unit 30 located upstream in the transport direction of the workpiece W is renewed (peeled off). After the renewal is completed, the outermost adhesive tape T1 of the downstream (e.g., the next upstream) clean unit 30 is renewed. Furthermore, after the renewal is completed, the outermost adhesive tape T1 of the most downstream clean unit 30 is renewed. The order of the clean units 30 in which the outermost adhesive tape T1 is renewed may be set in any order. In addition, the outermost adhesive tape T1 may be renewed simultaneously in both the upper clean unit 30 and the lower clean unit 30, or the outermost adhesive tape T1 of one of the upper clean unit 30 and the lower clean unit 30 may be renewed.

In this way, instead of updating (peeling off) the outermost adhesive tape T1 of all clean units 30 at once, the outermost adhesive tape T1 of one of the clean units 30 is updated, and dust removal from the workpieces W can be continued in the clean units 30 other than the clean unit 30 being updated. Therefore, it is no longer necessary to stop the line that removes dust from the workpieces W in order to update the outermost adhesive tape T1, and the number of workpieces W that can be removed per hour can be increased.

<About the effects>
The dust removal devices 10, 10B according to the first and second embodiments as described above comprise a dust removal roller 41 that adsorbs dust adhering to the surface of the workpiece W, an adhesive tape holder 51 that transfers the dust adhering to the dust removal roller 41 and holds an adhesive tape roll T1R on which is wound an adhesive tape T1 having slits every predetermined length, a tape end detection mechanism 80 that detects the end of the outermost adhesive tape T1 on the adhesive tape roll T1R, and a control unit 90 that controls the operation of the tape end detection mechanism 80.

The tape end detection mechanism 80 includes a holding frame 84, an end detection sensor 88 attached to the holding frame 84 and detecting the end of the outermost adhesive tape T1 in the adhesive tape roll T1R, a motor 85 (detection motor) attached to the holding frame 84, an end detection roller 87 that is rotatably held on the holding frame 84 and is provided with driving force from the motor 85 (detection motor) and rotates in contact with the end of the outermost adhesive tape T1 during detection, and a lifting cylinder 82 (roller lifting cylinder) that moves the end detection roller 87 towards and away from the outermost adhesive tape T1.

In addition, when the control unit 90 determines that it is time to update the outermost adhesive tape T1, it operates the lifting cylinder 82 (roller lifting cylinder) to press the end detection roller 87 against the outermost adhesive tape T1, and while in this pressed state, it operates the motor 85 (detection motor) to rotate the adhesive tape roll T1R via the end detection roller 87, and while in this rotating state, the end detection sensor 88 detects the end of the outermost adhesive tape T1.

In this configuration, the motor 85 (detection motor), end detection roller 87, end detection sensor 88, etc. are supported on the same holding frame 84. Therefore, when the end detection roller 87 moves up and down to follow the unevenness present in the outermost adhesive tape T1, the end detection sensor 88 also moves up and down at the same time. Therefore, compared to a case where the end detection sensor 88 is attached separately to the end detection roller 87, the uneven state of the outermost adhesive tape T1 can be detected with high accuracy. As a result, the end (step) of the adhesive tape T1 to be updated can be detected with high accuracy.

In addition, in each embodiment of the present invention, a stepping motor can be used as the motor 85 (detection motor). In this way, when a stepping motor is used as the motor 85 (detection motor), the end detection roller 87 can be held in a stopped state by its self-holding force when stopped in an energized state. This makes it possible to prevent the detected end (step) of the outermost adhesive tape T1 from shifting position, which would cause problems in the subsequent updating work of the adhesive tape T1.

In addition, in each embodiment of the present invention, the dust removal device 10, 10B comprises a take-up cartridge 100 including a take-up tube 200 that takes up used adhesive tape T1, a peeling tape holding tube 210 that holds a peeling tape roll T2R wound with peeling tape T2 for peeling the outermost adhesive tape T1 from the adhesive tape roll T1R, and a peeling roller 222 that presses the peeling tape T2 pulled out from the peeling tape roll T2R against the adhesive tape roll T1R, a take-up motor 60 that provides a driving force to rotate the take-up tube 200, and a cartridge lifting mechanism (upper cartridge lifting mechanism 70T and/or lower cartridge lifting mechanism 70B) that raises and lowers the take-up cartridge 100.

When the end (step) of the outermost adhesive tape T1 is detected by the end detection sensor 88, the control unit 90 stops driving the motor 85 (detection motor) after positioning the end at a standby position a predetermined distance away from the end (step) (step S05), and after stopping the motor 85 (detection motor), operates the cartridge lift mechanism (upper cartridge lift mechanism 70T and/or lower cartridge lift mechanism 70B) to press the peeling tape T2 against the outermost adhesive tape T1 via the peeling roller 222 (step S06). Then, after pressing the peeling tape T2, the lift cylinder 82 (roller lift cylinder) is operated to move the end detection roller 87 pressed against the outermost adhesive tape T1 in a direction away from the adhesive tape T1 (step S07). After this movement, the take-up motor 60 is driven to rotate the adhesive tape roll T1R to an excess position where the peeling tape T2 pressed against the peeling roller 222 exceeds the end of the outermost adhesive tape T1 (step S08). After the excess position is exceeded, the cartridge lifting mechanism (upper cartridge lifting mechanism 70T and/or lower cartridge lifting mechanism 70B) is operated while continuing to operate the take-up motor 60 to move the take-up cartridge 100 toward a position away from the adhesive tape roll T1R, thereby performing a renewal operation to peel off the adhesive tape T1 (step S09).

In this way, when the end detection sensor 88 detects the end (step) of the outermost adhesive tape T1, the end is positioned at a waiting position a predetermined distance away from the end (step) and then the driving of the motor 85 (detection motor) is stopped, thereby preventing the end (step) of the adhesive tape T1 from shifting out of position.

In addition, in this stopped state, the cartridge lifting mechanism (upper cartridge lifting mechanism 70T and/or lower cartridge lifting mechanism 70B) is operated to press the peeling tape T2 against the outermost adhesive tape T1 via the peeling roller 222, so that the peeling tape T2 can be pressed against the desired position on the outermost adhesive tape T1 without misalignment.

After this, the lift cylinder 82 (roller lift cylinder) is operated to move the end detection roller 87, which is pressed against the outermost adhesive tape T1, in a direction away from the adhesive tape T1. At this time, as described above, the peeling tape T2 is pressed against the desired position of the outermost adhesive tape T1, so by moving the end detection roller 87 away from the adhesive tape T1, the subsequent operation of peeling off the outermost adhesive tape T1 can be performed smoothly. In addition, the operation of rotating the adhesive tape roll T1R can be handed over from the motor 85 (detection motor) to the winding motor 60.

After this, the winding motor 60 is driven to rotate the adhesive tape roll T1R to an excess position where the peeling tape T2 pressed against the peeling roller 222 exceeds the end of the outermost adhesive tape T1, thereby starting to peel off the outermost adhesive tape T1 to be updated from the adhesive tape roll T1R.

Then, after passing the excess position, the take-up motor 60 continues to operate while the cartridge lifting mechanism (upper cartridge lifting mechanism 70T and/or lower cartridge lifting mechanism 70B) is operated to move the take-up cartridge 100 toward a position away from the adhesive tape roll T1R, thereby reliably performing the renewal operation of peeling off the adhesive tape T1.

In addition, in each embodiment of the present invention, when the peeling tape T2 is pressed against the outermost adhesive tape T1 by operation of the cartridge lifting mechanism (upper cartridge lifting mechanism 70T and/or lower cartridge lifting mechanism 70B) and the outermost adhesive tape T1 is peeled off from the adhesive tape roll T1R, a peeling start detection sensor S1 is provided which detects the leading end of the feed of the adhesive tape T1, and a peeling end detection sensor S2 is provided which detects the end in the feed direction of the adhesive tape T1 being fed together with the peeling tape T2 towards the take-up tube 200.

When the control unit 90 is moving the take-up cartridge 100 toward a position away from the adhesive tape roll T1R, and the leading end of the adhesive tape T1 in the feed direction is detected by the peeling start detection sensor S1, the control unit 90 determines that a normal peeling operation is being performed and continues driving the take-up motor 60. In addition, after the peeling end detection sensor S2 detects the trailing end of the feed of the adhesive tape T1, the control unit 90 stops the rotation of the take-up motor 60.

When controlled in this manner, peeling of the adhesive tape T1 to be renewed can be reliably detected by detection by the peeling start detection sensor S1. Also, by detecting the trailing end of the feed of the adhesive tape T1 to be renewed by detection by the peeling end detection sensor S2, the end of the adhesive tape T1 renewal operation can be detected, and the take-up motor 60 can be stopped from rotating.

In addition, in the dust removal device 10B according to the second embodiment, when the dust removal roller 41, the adhesive tape holder 51, and the tape end detection mechanism 80 constitute one clean unit 30, a plurality of clean units 30 are provided. The control unit 90 controls the update operation of any one of the plurality of clean units 30 to be performed at a different timing relative to the update operation of the other clean units 30.

When configured in this manner, the workpiece W is cleaned by multiple clean units 30, thereby improving the performance of removing dust from the workpiece W.

In addition, by updating the outermost adhesive tape T1 of one of the clean units 30, rather than updating (peeling off) the outermost adhesive tape T1 of all the clean units 30, dust removal from the workpieces W can be continued in the clean units 30 other than the clean unit 30 being updated. Therefore, it is no longer necessary to stop the line for removing dust from the workpieces W in order to update the outermost adhesive tape T1, and the number of workpieces W that can be removed per hour can be increased.

<Modification>
Although the embodiments of the present invention have been described above, the present invention can be modified in various ways, which will be described below.

In the second embodiment described above, a configuration is described in which three parts are provided for removing dust from the clean unit 30, the take-up cartridge 100, etc. However, the number of parts for removing dust is not limited to three, and may be two, or may be four or more.

10...dust removal device, 20...housing section, 21...take-up cartridge storage section, 25...transport mechanism, 26...motor, 27...transport roller, 30...clean unit, 40...dust removal roll unit, 41...dust removal roller, 41a...rotating shaft, 41b...adhesive rubber layer, 50...tape unit, 51...adhesive tape holder, 52...tape lift cylinder, 60...take-up motor, 70T...upper cartridge lift mechanism, 70B...lower cartridge lift mechanism, 71...lift cylinder, 72...connecting plate, 80...tape end detection mechanism, 81...fixing plate, 82...lift cylinder da, 83...connecting plate, 84...holding frame, 85...motor, 86...drive shaft, 87...end detection roller, 88...end detection sensor, 90...control unit, 100...winding cartridge, 110...housing, 120...side plate member, 121...winding shaft support portion, 121a...removal prevention protrusion (corresponding to second removal prevention protrusion), 121b...insertion guide portion, 121c...bearing portion (corresponding to second bearing portion), 121d...insertion hole, 122...shaft support portion, 122a...removal prevention protrusion (corresponding to first removal prevention protrusion), 122b...insertion guide portion, 122c...bearing portion (corresponding to first bearing portion), 123...attached shaft Support portion, 123a...slide groove, 123b...shaft hole, 124...thick portion, 125...handle, 130...outer wall panel, 130a...upper surface portion, 130b...side surface portion, 130c...flange portion, 140...front cover panel (corresponding to cover member), 140a...side surface portion, 140b...guide slope portion, 150...rear cover panel (corresponding to cover member), 150a...side surface portion, 150b...steep slope portion, 160...opening, 200...winding tube, 201...pipe-shaped portion, 202...joint cover, 202a...connecting recess, 202b...guide protrusion, 210...tape holding tube, 220...sticking mechanism, 221...support Shaft, 221a...screw hole, 221b...applying roll shaft, 222...peeling roller, 230...pressing mechanism, 231...spring shaft, 231a...head, 232...spring member, 240...winding hold-down mechanism, 241...roll support member, 241a...shaft support slit, 241b...spring mounting shaft, 241c...spring locking portion, 242...holding roller, 242a...roller portion, 243...biasing spring, B1...bearing, H1, H2...hinge, R1, R2...locking member, T1...adhesive tape, T1R...adhesive tape roll, T2...tape for, T2R...tape roll for, W...work

Claims (6)

A dust removal device for removing dust from a workpiece,
A dust removal roller that adsorbs dust adhering to the surface of the workpiece;
an adhesive tape holder that transfers the dust adhering to the dust removal roller and that holds an adhesive tape roll around which an adhesive tape having slits at predetermined intervals is wound;
a tape end detection mechanism for detecting an end of the adhesive tape at the outermost periphery of the adhesive tape roll;
A control unit for controlling the operation of the tape end detection mechanism;
Equipped with
The tape end detection mechanism includes:
A holding frame;
an end detection sensor attached to the holding frame for detecting an end of the outermost adhesive tape of the adhesive tape roll;
A detection motor attached to the holding frame;
an end detection roller that is rotatably held by the holding frame, is given a driving force from the detection motor, and rotates in a state of contact with an end of the outermost adhesive tape during detection;
a roller lifting cylinder for moving the end detection roller toward and away from the outermost periphery of the adhesive tape;
having
The control unit is
When it is determined that it is time to update the outermost adhesive tape, the roller lifting cylinder is operated to press the end detection roller against the outermost adhesive tape,
In this pressed state, the detection motor is operated to rotate the adhesive tape roll via the end detection roller,
In this rotating state, the end detection sensor detects the end of the outermost periphery of the adhesive tape.
A dust removal device characterized by: The dust removal device according to claim 1,
The detection motor is a stepping motor.
A dust removal device characterized by: The dust removal device according to claim 2,
a take-up cartridge including a take-up tube for taking up the used adhesive tape, a peeling tape holding tube for holding a peeling tape roll around which a peeling tape for peeling off the outermost adhesive tape from the adhesive tape roll is wound, and a peeling roller for pressing the peeling tape pulled out from the peeling tape roll against the adhesive tape roll;
a winding motor for providing a driving force for rotating the winding cylinder;
a cartridge lifting mechanism for lifting and lowering the take-up cartridge;
Equipped with
The control unit is
when the edge of the outermost periphery of the adhesive tape is detected by the edge detection sensor, the edge is positioned at a standby position a predetermined distance away from the edge, and then driving of the detection motor is stopped;
After the detection motor is stopped, the cartridge lifting mechanism is operated to press the peeling tape against the outermost adhesive tape via the peeling roller;
After the peeling tape is pressed against the adhesive tape, the roller lifting cylinder is operated to move the end detection roller pressed against the outermost adhesive tape in a direction away from the adhesive tape,
After this movement, the winding motor is driven to rotate the adhesive tape roll to an excess position where the peeling tape pressed against the peeling roller exceeds an end of the outermost adhesive tape,
after the excess position is exceeded, the cartridge lifting mechanism is operated while continuing the operation of the winding motor, thereby moving the winding cartridge toward a position away from the adhesive tape roll, thereby performing a renewal operation of peeling off the adhesive tape.
A dust removal device characterized by: The dust removal device according to claim 3,
a peeling start detection sensor that detects a leading end of the feeding of the adhesive tape when the peeling tape is pressed against the outermost adhesive tape by the operation of the cartridge lifting mechanism and the outermost adhesive tape is peeled off from the adhesive tape roll;
a peeling end detection sensor that detects a terminal end of the adhesive tape in a feeding direction that is being fed together with the peeling tape toward the winding tube;
Equipped with
The control unit is
when the take-up cartridge is being moved toward a position away from the adhesive tape roll and the leading end of the adhesive tape in the feed direction is detected by the peeling start detection sensor, it is determined that a normal peeling operation is being performed, and the take-up motor is controlled to continue to be driven;
after the peeling completion detection sensor detects the trailing end of the feeding of the adhesive tape, the rotation of the winding motor is stopped.
A dust removal device characterized by: The dust removal device according to claim 3 or 4,
When the dust removal roller, the adhesive tape holder, and the tape end detection mechanism constitute one clean unit, a plurality of the clean units are provided,
The control unit controls the renewal operation of any one of the plurality of clean units to be performed at a different timing with respect to the renewal operations of the other clean units.
A dust removal device characterized by: 1. An adhesive tape renewal method for renewing an adhesive tape wound with a predetermined length of gaps and having dust transferred from a dust removal roller that adsorbs dust on a surface of a workpiece, comprising:
The end of the outermost adhesive tape is detected by a tape end detection mechanism, which includes:
A holding frame;
an end detection sensor attached to the holding frame and configured to detect an end of the adhesive tape at the outermost periphery of an adhesive tape roll around which the adhesive tape is wound;
A detection motor attached to the holding frame;
an end detection roller that is rotatably held by the holding frame, is given a driving force from the detection motor, and rotates in a state of contact with an end of the outermost adhesive tape during detection;
a roller lifting cylinder for moving the end detection roller toward and away from the outermost periphery of the adhesive tape;
and
a roller pressing step of pressing the end detection roller against the outermost adhesive tape by operating the roller lifting cylinder when a timing for updating the outermost adhesive tape has arrived;
a rotating step of rotating the adhesive tape roll around which the adhesive tape is wound via the end detection roller by operating the detection motor while the outermost periphery of the end detection roller is pressed against the adhesive tape;
a detection step in which the end detection sensor detects an end of the adhesive tape at the outermost periphery while the adhesive tape roll is rotating;
An adhesive tape renewal method comprising the steps of:

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